• Title/Summary/Keyword: 압축가스

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Flexible 의료 영상 센서로 적용하기 위한 Flexible ITO substrate의 가스분압 특성 및 Bending의 전기적 특성 연구

  • Gang, Jin-Ho;Hong, Ju-Yeon;Kim, Dae-Guk;O, Gyeong-Min;Heo, Seung-Uk;Nam, Sang-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.185-185
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    • 2013
  • 최근 의료 영상 센서는 급속도로 발전을 이룩하여 미세 병변의 위치와 그 크기를 진단하는 데에 많은 이용이 되고 있다. 하지만 기존 flat panel형태의 의료영상 센서는 인체의 굴곡으로 인한 영상 왜곡으로 발전의 한계에 이르고 있는 실정이다. 이 영상 왜곡으로 인한 오진은 환자에게 불필요한 피폭, 수술적 요법, 약물치료 등 환자에게 치명적인 의료사고를 일으킬 수 있다. 이러한 한계를 극복하기 위하여 flexible substrate을 이용한 투명전극들이 의료영상 센서로서의 적용을 연구 되어 졌다. IZO, ITO, FTO 등의 투명전극들 중 Indium Tin Oxide(ITO)는 다른 전극에 비해 높은 투명도와 낮은 저항으로 인하여 다양한 부분에서 널리 이용 되고 있다. 그러나 ITO를 flexible substrate로 적용 시 불충분한 resistivity와 기계적 강도를 지니고 있으며, 유연성을 위해 전극 재료의 두께를 감소시키면 전도성의 문제를 일으키는 단점이 있는 것으로 알려져 있다. 이러한 문제점을 보완 및 해결하기 위하여 본 연구에서는 sputtering magnetron system를 이용하여 polyethylene terephthalate(PET) substrate 위에 ITO을 증착함으로써 전기적 특성을 알아보았다. PET 필름의 크기를 55 절단하였고 증착 온도는 고온에서 수축하는 PET 필름의 물성을 고려하여 $23^{\circ}C$로 설정 하였다. 가스의 분압 비를 Ar는 50ccm으로 고정하고 O2의 비율을 각각 0, 0.2, 0.4, 0.8, 1ccm으로 나눈 후, 비율에 따라 각각 30, 60, 90sec간 sputtering 증착을 하였다. 또한 각각 30, 60, 90sec간 sputtering 증착하여 O2 유량과 sputtering 증착 시간의 변화에 따른 ITO의 전도특성과 유연성에 대한 전도특성을 측정하였다. 유연성을 측정하기 위해선 bending 각도를 각각 $0^{\circ}$ $30^{\circ}$, $45^{\circ}$, $60^{\circ}$로 구부린 후, Two-point probe를 이용하여 변화된 저항을 통해 ITO의 전기적 성질의 변화를 측정 하였다. 측정결과 flexible ITO substrate의 전도특성은 sputtering 증착시간이 증가할수록 저항 값이 낮아지는 것을 확인하였지만, O2 유량이 증가 시 저항이 낮아지다가 다시 증가하는 결과를 알 수 있었다. 본 연구에서는 Ar:O2의 50:0.8의 조건에서 90sec동안 sputtering 증착한 ITO가 131 ${\Omega}/cm^2$의 저항 값이 측정 되었고 다른 조건에서는 164 ${\Omega}/cm^2$에서 4.7 $k{\Omega}/cm^2$까지 저항변화를 가져 Ar:O2의 50:0.8의 조건이 최적화에 좋은 조건이라 판단하였다. 또한 50:0.8의 조건의 ITO의 경우 bending test시에서도 131 ${\Omega}/cm^2$에서 316 ${\Omega}/cm^2$ 정도의 안정적인 저항변화를 가지는 반면 다른 조건에서는 128 ${\Omega}/cm^2$에서 6.63 $k{\Omega}/cm^2$까지의 변화를 나타나 기계적 형상변화에도 분압비가 영향을 주는 것을 확인 할 수 가 있었다. bending 각도에 따른 저항의 변화를 측정하였을 시, 각도 변화에 따라 중심부의 저항 값이 $60^{\circ}$에서 가장 높은 변화가 나타나 전기저항이 높아진 원인을 찾기 위해 Scanning Electron Microscope (SEM)촬영을 한 결과 저항값이 높아짐에 따라 ITO의 압축응력이 작용하는 부근에 Crack이 발생함을 알 수 있었다. 이러한 결과로 flexible ITO substrate의 Crack발생률을 최소화 시키고 bending시 전도성을 유지하기 위해서는 가스의 유량 최적화가 flexible substrate의 기계적형상변화에 대한 ITO의 내구성을 향상시킬 수 있는 해답이 될 것으로 사료된다.

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Study of Tungsten Nitride Diffusion Barrier for Various Nitrogen Gas Flow Rate by Employing Nano-Mechanical Analysis (Nano-Mechanics 분석을 통한 질화 텅스텐 확산방지막의 질소 유량에 따른 연구)

  • Kwon, Ku Eun;Kim, Sung Joon;Kim, Soo In;Lee, Chang Woo
    • Journal of the Korean Vacuum Society
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    • v.22 no.4
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    • pp.188-192
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    • 2013
  • Many studies have been conducted for preventing from diffusion between silicon wafer and metallic thin film due to a decrease of line-width and multi-layer thin film for miniaturization and high integration of semiconductor. This paper has focused on the nano-mechanical property of diffusion barrier which sample is prepared for various gas flow rate of nitrogen with tungsten (W) base from 2.5 to 10 sccm. The deposition rate, resistivity and crystallographic properties were measured by a ${\beta}$-ray back-scattering spectroscopy, 4-point probe and x-ray diffraction (XRD), respectively. We also has investigated the nano-mechanical property using the nano-indenter. As a result, the surface hardness of W-N thin film was increased rapidly from 10.07 to 15.55 GPa when the nitrogen gas flow was increased from 2.5 to 5 sccm. And the surface hardness of W-N thin film had 12.65 and 12.77 GPa at the nitrogen gas flow of 7.5 and 10 sccm respectively. These results were decreased by the comparison with the W-N thin film at nitrogen gas flow of 5 sccm. It was inferred that these severe changes were caused by the stoichiometric difference between the crystalline and amorphous state in W-N thin film. In addition, these results were caused by increased compressive stress.

A Study on Removal Efficiency of VOCs using Vortex Cyclones (보텍스 사이클론을 이용한 VOCs 제거효율에 관한 연구)

  • Lim, Gye-Gyu
    • Applied Chemistry for Engineering
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    • v.16 no.2
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    • pp.194-199
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    • 2005
  • The principle of vortex cyclone was applied to enhance the treatment efficiency of waste air streams containing particulate matters, phenol, and others. Adsorption, condensation, and/or coagulation could be induced at low temperature zone formed by Joule-Thomson expansion as the pressurized air and pulverized activated carbon were introduced at the tangential direction into the cyclone system applied with the coaxial funnel tube of vortex cyclone. Easily condensible vapors were adsorbed and/or condensed forcibly on coagulated or condensed materials which were formed as cores for coagulation or condensation by themselves or on pulverized activated carbons. These types of coagulation or condensation rates were rapidly promoted by increase in their diameter. The maximum removal efficiency obtained from this experiment for the removal of carbon dioxide and phenol was about 87.3 and 93.8 percent, respectively. Phenol removal efficiency was increased with the relative humidities and enhanced by pulverized activated carbon added. The Joule-Thomson coefficients were increased with the pressure of air injected in the range of the relative humidities between 10% and 50%. It is believed that the moisture, particulate matters, and the pressure of the process air introduced could control the removal efficiency of VOCs.

Consequence Analysis of Hydrogen Filling Stations based on Cascade Compressing Systems (케스케이드 방식 압축시스템 기반의 수소충전소에 대한 정성적 위험성평가)

  • Ahn, Byeong-Jun;Rhim, Jong-Kuk
    • Journal of the Korean Institute of Gas
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    • v.25 no.2
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    • pp.13-21
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    • 2021
  • Because of the recent expansion of hydrogen vehicle supply, the installation of hydrogen filling station is expected to gradually expand. This study attempts to predict the damage scale and propose a safer design form based on the scenario that assumes the worst case of a hydrogen station. A Flacs solver using computational fluid dynamics (CFD) was used to predict the damage scale, and the accuracy was verified by comparing it with the experimental results of previous researchers. The damage scale prediction was conducted for hydrogen leakage and explosion, and the prediction target was the KR model based on the measured values. And as a comparative review model, a roofless model was selected without a ceiling. As a result of analyzing the two models, it was possible to confirm the accumulation and retention of hydrogen gas up to 60 vol% or more in the KR model, whereas in the case of the Roofless model, the phenomenon of discharge and diffusion to the outside of the charging station by riding the wall after leakage. I was able to check. In conclusion, it was reviewed that the type of hydrogen charging station without ceiling is more advantageous for safety than the hydrogen filling station model.

A Methodology to Evaluate Economic Feasibility by Taking into Account Social Costs from Automobile Exhaust Gases (자동차 배기가스로 인한 사회적 비용을 고려한 경제성 평가 방법론)

  • Cho, A-Ra;Lim, Seong-Rin
    • Clean Technology
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    • v.25 no.3
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    • pp.263-272
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    • 2019
  • Air pollutants have a high impact on everyday life as well as on human health; therefore, new technologies such as low-emission vehicles and add-on systems for air pollutant reduction are needed for our society. However, the environmental benefits and costs of those technologies are not taken into account in existing economic feasibility assessments, which is a barrier that needs to be overcome for green technology to achieve wide dissemination and fast penetration in the market. Thus, this study develops a methodology to assess the economic feasibility of an air pollutant reduction technology by taking into account the social costs from air pollutants and carries out a case study to validate the methodology. Because the social unit costs for air pollutants have not been evaluated yet in South Korea, the methodology uses the social unit costs evaluated for the European Union that are then converted to those for South Korea based on the measuring criteria for vehicle emission gases, parity purchasing price, foreign currency exchange rate, and customer price index. The social unit costs for South Korea are used to assess economic feasibility. A case study was performed to assess the economic feasibility of a dual fuel system using diesel and compressed natural gas by taking into account social costs from air pollutants as well as economic costs. This study could contribute to assessing the true economic feasibility of green technology, projects, and policy related with air pollutant reduction.

The Role of Geocrete and Soluble Sodium Silicate as a Substitute to Control Leachate Leaking from Landfill Side Wall (Geocrete와 규산소다액을 이용한 매립지 사면 침출수 누출제어)

  • 조재범;현재혁;나진성;김자영
    • Journal of the Korean Geotechnical Society
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    • v.17 no.6
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    • pp.47-51
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    • 2001
  • There are two strategies to cope with the troubles in landfill site after closure. The first method is active in a way that the wastes are dug up and the recyclable materials are reutilized, meanwhile the materials not recyclable are incinerated in order to minimize the volume of residues to be disposed of. The second method is rather passive and defensive in a way that the source of contamination, that is, buried wastes are not treated. Instead, the transport of leaking leachate and gases generated from the wastes are intercepted and controlled. In this study, as a passive way of the efficient leachate blocking process, applicabilities of geocrete and soluble sodium silicate as a substitute to control leachate leaking from landfill sidewall were investigated. In case of compression test, the strength of mixture I (Geocrete:Sodium silicate=1:3.9 v/v) and mixture II (Geocrete:Sodium silicate=1:2.5 v/v), even after 7 days' curing was higher than the minimum allowance to tolerate the loading(5 kg/$\textrm{cm}^2$). Soaking in the acid fur 4 days and 7 days respectively, the compressive strength of the specimens reduced seriously. The toxicity of geocrete is not detected through the bioassay test, once it was mixed with sodium silicate and the complex was formed. The hydraulic conductivity of the mixtures even after 7 days' curing was lower than the threshold limit $(1.0\times10_{-7}cm/s)$.

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Properties of Foamed Concrete According to Types and Concentrations of Foam Agent (기포제 종류 및 희석 농도에 따른 기포 콘크리트의 특성)

  • Kim, Jin-Man;Jeong, Ji-Yong;Hwang, Eui-Hwan;Shin, Sang-Chul
    • Journal of the Korea Concrete Institute
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    • v.24 no.1
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    • pp.61-70
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    • 2012
  • Recently, the government has been working feverously to save energy and reduce greenhouse gas emission by enacting Basic Act on Low Carbon Green Growth at the national level. Improving the insulation performance of building exterior and insulator can reduce the energy in the building sector. This study is about developing light-weight foamed concrete insulation panel that can be applied to buildings to save energy and to find the optimal condition for the development of insulation materials that can save energy by enhancing its physical, kinetic and thermal characteristics. Various experimental factors and conditions were considered in the study such as foam agent types (AES=Alcohol Ethoxy Sulfate, AOS=Alpha-Olefin Sulfonate, VS=Vegetable Soap, FP=Fe-Protein), foam agent dilution concentration (1, 3, 5%), and foam percentage (30, 50, 70%). Experiment results indicated that the surface tension of aqueous solution including foam agent, was lower when AOS was used over other foam agents. FP produced relatively stable foams in 3% or more, which produced unstable foams containing high water content and low surface tension when diluted at low concentration. Depending on foam agent types, compressive strength and thermal conductivity were similar at low density range but showed some differences at high concentration range. In addition, when concentrations of foam agent and foaming ratio increased, pore size increased and open pores are formed. In all types of foam agent, thermal conductivity were excellent, satisfying KS standards. The most outstanding performance for insulation panel was obtained when FP 3% was used.

Growth of ZnO Film by an Ultrasonic Pyrolysis (초음파 열분해법를 이용한 ZnO 성장)

  • Kim, Gil-Young;Jung, Yeon-Sik;Byun, Dong-Jin;Choi, Won-Kook
    • Journal of the Korean Ceramic Society
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    • v.42 no.4
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    • pp.245-250
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    • 2005
  • ZnO was deposited on sapphire single crystal substrate by an ultrasonic pyrolysis of Zinc Acetate Dehydrate (ZAH) with carrying Ar gas. Through Thermogravimetry-Differential Scanning Calorimetry(TG-DSC), zinc acetate dihydrate was identified to be dissolved into ZnO above $380^{\circ}C$. ZnO deposited at $380-700^{\circ}C$ showed polycrystalline structures with ZnO (101) and ZnO (002) diffraction peaks like bulk ZnO in XRD, and from which c-axis strain ${\Sigma}Z=0.2\%$ and compressive biaxial stress$\sigma=-0.907\;GPa$ was obtained for the ZnO deposited $400^{\circ}C$. Scanning electron microscope revealed that microstructures of the ZnO were dependent on the deposition temperature. ZnO grown below temperature $600^{\circ}C$ were aggregate consisting of zinc acetate and ZnO particles shaped with nanoblades. On the other hand the grain of the ZnO deposited at $700^{\circ}C$ showed a distorted hexagonal shape and was composed of many ultrafine ZnO powers of 10-25 nm in size. The formation of these ulrafine nm scale ZnO powers was explained by the model of random nucleation mechanism. The optical property of the ZnO was analyzed by the photoluminescence (PL) measurement.

Investigation of Fracture Propagation in Cement by Hydraulic Fracturing Under the Tri-axial Stress Condition (시멘트 시료에 대한 삼축압축 환경에서의 수압파쇄시험 연구)

  • Riu, Hee-Sung;Jang, Hyun-Sic;Jang, Bo-An
    • The Journal of Engineering Geology
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    • v.27 no.3
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    • pp.233-244
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    • 2017
  • We conducted hydraulic fracturing experiments on cement samples to investigate the dependency of fracture propagation on the viscosity of injection fluid and the in situ stress state. Ten cubic samples (20 cm side length) were produced using cement that was cured in water for more than one month. Samples were placed in a tri-axial compression apparatus with three independent principal stresses. An injection hole was drilled and the sample was hydraulically fractured under a constant injection rate. We measured injection pressures and acoustic emissions (AE) during the experiments, and investigated the fracture patterns produced by hydraulic fracturing. Breakdown pressures increased exponentially with increasing viscosity of the injection fluid. Fracture patterns were dependent on differential stress (i.e., the difference between the major and minor principal stresses). At low differential stress, multiple fractures oriented sub-parallel to the major principal stress axis propagated from the injection hole, and in some samples the fracture orientation changed during propagation. However, at high differential stress, a single fracture propagated parallel to the major principal stress axis. AE results show similar patterns. At low differential stress, AE source locations were more widespread than at high differential stress, consistent with the fracture pattern results. Our study suggests that hydraulic fracturing during shale gas extraction should be performed parallel to the orientation of minimum differential stress.

Investigation on Properties of Cement Mortar Using Heat Treated Flue Gas Desulfurization Gypsum (열처리된 배연탈황석고를 혼입한 시멘트 모르타르의 물성 연구)

  • Chung, Chul-Woo;Lee, Yong-Mu;Kim, Ji-Hyun;Kim, Young-Su
    • Journal of the Korea Institute of Building Construction
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    • v.16 no.6
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    • pp.497-503
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    • 2016
  • Flue gas desulfurization gypsum is produced from emission process of fossil fuel power plant to remove sulfur dioxide ($SO_2$) from exhaust gas. Production of flue gas desulfurization gypsum in Republic of Korea has been increasing due to the enforced regulations by government agency. Since flue gas desulfurization gypsum has characteristic that is similar to that of natural gypsum, there is a strong possibility for flue gas desulfurization gypsum to replace the role of natural gypsum. However, consumption of such material is still limited, only used for agricultural purposes or to make gypsum boards, it is necessary to expand the use of this material more aggressively. In this research, the chemical and mineralogical properties of flue gas desulfurization gypsum were investigated, and flue gas desulfurization gypsum with heat treatment was used to make cement paste. According to the results, it was found that flue gas desulfurization gypsum used in this experiment was a very high purity gypsum, and shown to have similar property to that of natural gypsum. Heat treating flue gas desulfurization gypsum above $100^{\circ}C$ was shown to bring beneficial effect on both compressive strength and drying shrinkage