• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1396-1403
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• 2006

This study shows that the system performance of a positioning system composed of a piezoelectric actuator-driven flexure guide depends largely on the preload applied on the flexure guide and the driving input amplitude. We used a flexure guided system that had an original resonant frequency of 54Hz. Our experiment showed that we could increase the driving bandwidth above the original resonant frequency, for a case involving a large preload and a small input amplitude. Results show that there is a specific 'separation frequency' where the response of the moving mass of the flexure system decouples from the response oi the piezoelectric actuator, and this specific separation frequency can be selected by a proper choice of the preload and the input amplitude. To find the separation frequency, sine sweep tests were performed. To confirm the increased system bandwidth frequency, open-loop sine tracking experiments were performed. Test results show that the system responds very well up to 130 Hz frequency higher than the original natural frequency (54Hz).

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.4 s.109
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• pp.346-354
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• 2006

This study shows that the system performance of a positioning system composed of a piezoelectric actuator-driven flexure guide depends largely on the preload applied on the flexure guide and the driving input amplitude. We used a flexure guided system that had an original resonant frequency of 54 Hz. Our experiment showed that we could increase the driving bandwidth above the original resonant frequency, for a case involving a large preload and a small input amplitude. Results show that there is a specific 'separation frequency' where the response of the moving mass of the flexure system decouples from the response of the piezoelectric actuator, and this specific separation frequency can be selected by a proper choice of the preload and the input amplitude. To find the separation frequency, sine sweep tests were performed. To confirm the increased system bandwidth frequency, open-loop sine tracking experiments were performed. Test results show that the system responds very well up to 130 Hz frequency higher than the original natural frequency (54 Hz).

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1998.10a
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• pp.568-576
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• 1998

In this thesis discuss with a flexible robotic finger design and controller which is used for the micro flexible robotic finger. So, miniaturization, precision, controller for the control of grasping force and actuator were needed. And, even if we develop a new actuator and controller, in order to use on real system, we must considerate of a many side problem. In a force control of micro flexible finger for grasping an object, the fingertip's vibration was more important task of accuracy control. And, controller were adopt the PD/PI mixed type fuzzy controller. The controller were consist of two part, one is a PD type fuzzy controller for increase the rising time response, the other is a PI type fuzzy controller for decrease of steady-state error. Especially, in a PD type fuzzy controller, we used only seven rules. And, for a PI controller, we adopt a reset factor for the control of input values. so, we have overcome the exceed of controller's input range. For the estimate of ontroller's utility and usefulness, we have experiment and computer simulation of three cases. First, we consider of unit force grasping control for a task object, which is 0.03N. Second, bounding grasping force control which is add to a sinusoidal force on the unit force. At this cases the task force is (0.03+0.01 sin wt N). And consider of following of rectangular forces.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.4
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• pp.1879-1884
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• 2014

Recently, the micro bonding technology comes into the spotlight as the miniaturization of the electronic product. The micro bonding technique can classify by way of laser welding and ultrasonic bonding and etc. However, the research on the micro bonding is much lacks. In this paper, carried out the cooling analysis of the 60 [kHz] ultrasonic bonding equipment to know heat effect of the piezoelectric element when the ultrasonic bonding equipment was operated. The ultrasonic horn having the natural frequency with 60 [kHz] for the dissimilar material bonding of the glass and solder tried to be designed. The parameters and response was set through the basic experiment. The dissimilar material bonding strength analysis using the 60 [kHz] ultrasonic bonding equipment was done. We carried out the bonding for improving bonding strength to using the silver paste. air thightness of bonding surface was confirmed by analysis of bonding interfaces.

• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.265-272
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• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.2
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• pp.69-74
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• 2015

Recently, energy harvesting technology is increasing due to the fossil fuel shortages. Energy harvesting is generating electrical energy from wasted energies as sunlight, wind, waves, pressure, and vibration etc. Energy harvesting is one of the alternatives of fossil fuel. One of the energy harvesting technologies, the piezoelectric energy harvesting has been actively studied. Piezoelectric generating uses a positive piezoelectric effect which produces electrical energy when mechanical vibration is applied to the piezoelectric device. Piezoelectric energy harvesting has an advantage in that it is relatively not affected by weather, area and place. Also, stable and sustainable energy generation is possible. However, the output power is relatively low, so in this paper, newly designed honeycomb shaped piezoelectric energy harvesting device for increasing a generating efficiency. The output characteristics of the piezoelectric harvesting device were analyzed according to the change of parameters by using the finite element method analysis program. One model which has high output voltage was selected and a prototype of the honeycomb shaped piezoelectric harvesting device was fabricated. Experimental results from the fabricated device were compared to the analyzed results. After the AC-DC converting, the power of one honeycomb shaped piezoelectric energy harvesting device was measured 2.3[mW] at road resistance 5.1[$K{\Omega}$]. And output power was increased the number of harvesting device when piezoelectric energy harvesting device were connected in series and parallel.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.1
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• pp.54-62
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• 2013

In this study, a wireless and non-power SAW (surface acoustic wave) temperature sensor was developed. The single inter-digital transducer (IDT) of SAW temperature sensor of which resonance frequency is 434 MHz was fabricated on $128^{\circ}$ rot-X $LiNbO_3$ piezoelectric substrate by semiconductor processing technology. To find optimal acoustic reflector for SAW temperature sensor, various kinds of acoustic reflectors were fabricated and their reflection characteristics were analyzed. The IDT type acoustic reflector showed better reflection characteristic than other reflectors. The wireless temperature sensing system consisting of SAW temperature sensor with dipole antenna and a microprocessor based control circuit with dipole antenna for transmitting signal to activate the SAW temperature sensor and receiving the signal from SAW temperature sensor was developed. The result with wireless SAW temperature sensing system showed that the frequency of SAW temperature sensor was linearly decreased with the increase of temperature in the range of 40 to $80^{\circ}C$ and the developed wireless SAW temperature sensing system showed the excellent performance with the coefficient of determination of 0.99.