• 제목/요약/키워드: 압전저항형 멤스센서

검색결과 1건 처리시간 0.017초

압전저항형 멤스센서를 이용한 진동 측정용 3축 센서 시스템의 최적화 설계 (Optimum Design of 3-Axis Sensor System for Vibration Measurement Using Piezoresistive type MEMS Sensor)

  • 서상윤;배동명;이종규;최병근
    • 한국소음진동공학회논문집
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    • 제23권12호
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    • pp.1082-1089
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    • 2013
  • 3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.