• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.5
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• pp.479-484
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• 2009

Nondestructive evaluation(NDE) of ceramic matrix composites is essential for developing reliable ceramics for industrial applications. In the work, C-Scan image analysis has been used to characterize surface crack of SiC ceramics nondestructively. The possibility of detection of surface crack were carried out experimentally by two types of ultrasonic equipment of SDS-win and $\mu$-SDS, and three types of transducer of 25, 50 and 125 MHz. A surface micro-crack of ceramics was not detected by transducer of 25 MHz and 50 MHz. Though the focus method was detected dimly the crack by transducer of 125 MHz, the defocus method could detect the shape of diamond indenter. As a whole, the focus method and the defocus method came to the conclusion that micro crack have a good possibility for detection.