• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.442-442
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• 2010

공정 플라즈마 장치에서 이중 주파수법을 이용하여 실시간 유전박막 두께 측정법에 대한 보상연구를 하였다. 이중 주파수법은 유전박막과 플라즈마 쉬스를 간단한 전기적인 등가회로로 모델링하여 유전박막의 두께를 측정하는 방법이다. 이중 주파수법의 문제는 측정탐침의 인가전압에 따른 유전박막의 두께 측정치가 다르다는 점이다. 플라즈마 쉬스를 선형 저항만으로 등가하였기 때문에, 쉬스의 인가전압에 상관없이 쉬스 저항의 값이 일정하다는 가정이 존재한다. 그러나 쉬스 저항은 쉬스의 인가전압에 종속적이면서 비선형적인 특성을 갖는다. 측정 탐침에 출력 전압이 인가될 때 쉬스 양단에서 인가전압에 따른 쉬스의 등가저항의 비선형성을 고려하여 측정 탐침에 증착된 유전박막의 커패시턴스성분에 대한 방정식을 Numerical analysis로 풀어 유전박막의 두께 측정값을 보상하였다. 보상된 위의 방법으로 다양한 RF파워, 압력에 따라 $Al_2O_3$박막의 두께를 실시간으로 측정하여 비교하였다. 그 결과 이 방법은 낮은 플라즈마 밀도(${\sim}10^9cm^{-3}$)에서도 인가전압에 따른 유전 박막두께측정의 오차를 줄일 수 있었다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.11
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• pp.63-70
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• 2008

In this paper, a smart sensor system for the MEMS pressure sensor was developed. A compensation algorithm and programmable calibration circuits were presented to eliminate errors caused by temperature drift of piezoresistive pressure sensors in itself. This system consisted of signal conditioning, calibration, temperature detection, microprocessor, and communication parts and these were integrated into a SOC. A RS-232 interface was employed for monitoring and control of a smart sensor system. The area of fabricated IC is $4.38{\times}3.78\;mm^2$ and a $0.35{\mu}m$ high voltage CMOS process was used. Compensation error for temperature drift of 50 KPa pressure sensors was measured into ${\pm}0.48%$ in the range of $-40^{\circ}C{\sim}150^{\circ}C$. Total power consumption was 30.5 mW.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.1
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• pp.76-81
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• 2009

A nonlinear pressure controller to actively regulate the thrust of a solid propulsion system is presented. To compensate for the parametric uncertainties with respect to the chamber pressure induced by changing nozzle throat area, Lyapunov-based parameter adaptation method has been applied. In order to verify the effectiveness of the proposed control method, the experiments were carried out using the cold gas test equipment that can simulate the operating environment of variable thrust solid propulsion system. The experiment results show that the nonlinear pressure controller has better performance than conventional P and PI controller.

• Polymer(Korea)
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• v.25 no.1
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• pp.122-132
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• 2001

Thermoplastic film infusion process was investigated by using a rubber tool, which intrinsically contains a thermally-expandable characteristic and effectively compensates for the pressure loss caused by thermoplastic polymer infusion. Increasing temperature up to the melting temperature of matrix, the polymer melt subsequently infused into the dry fabric, but the pressure was successfully sustained by the rubber tool. Even with the decreased resin volume, the rubber tool produced sufficiently high elastic force for continuous resin infusion. Combining D'Arcy's law with the compressibility of rubber tool and elastic fiber bed, a film infusion model was developed to predict the resin infusion rate and pressure change as a function of time. In addition, the film infusion process without the rubber tool was viewed and analyzed by a compression process of the elastic fiber bed and viscous resin melt. The compressibility of fiber bed was experimentally measured and the multiple-step resin infusion was well described by the developed model equations.

• Journal of the Korean Society of Hazard Mitigation
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• v.5 no.3 s.18
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• pp.23-28
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• 2005

This study defined engineering mechanism and compensation method to establish reference pressure of smoke control zone with atmospheric pressure that is compensated for temperature. The reliable pressure differential sensor was developed by establishing the specifications, algorithms and constructing engineering data. The development of pressure differential sensor can cut down number of processes, manufacturing and installation cost by removing pressure measurement pipe established separately for non smoke control zone, and improve the accuracy of pressure differential by embedding pressure measurement ports for non smoke control zone. More correct and reliable pressure differentials can be obtained by the central control rather than the existent individual control. This will provide the basics and the flexibility to the integral smoke control system and accordingly improve the performance of disaster prevention.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.2
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• pp.165-174
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• 2007

Variable displacement type piston pump uses various controllers for controlling more than one state quantity like pressure, flow, power, and so on. These controllers need the mathematical model closely expressing dynamic behavior of pump for analyzing the stability of control systems which usually use various kinds of state variables. This paper derives the nonlinear mathematical model for variable displacement type piston pump. This model consists of two 1st oder differential equations by the continuity equations and one 2nd oder differential equation by the motion equation. To simplify the model we obtain the linear state variable model by differentiating the three nonlinear equations. And we verify this linearized model by comparison of simulation with experimentation and analyze the stability for the flow/pressure control. Finally this paper suggests the design compensation to ensure the stability of the systems.

• Journal of Ocean Engineering and Technology
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• v.26 no.6
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• pp.66-73
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• 2012

A pressure compensated chamber of a pilot mining robot isolates and protects an electrical-electronic system from the ambient highly pressured water. Since the inner pressure of the chamber is compensated with outer water pressure using hydraulic oil and pressure compensator, there exists a pressure difference, less than 1 bar, between outer and inner surface. The structural safety of the chamber is obtained relatively easier than the canister type which inner pressure is kept as the atmospheric pressure. However, due to the adoption of box shape for space efficiency and usage of the transparent engineering plastic viewport for checking inner circumstance, the viewport can be largely deformed. This large deformation can cause an additional tensile force, called the prying force, to the bolt-flange connection parts of the viewport. In this paper, we suggest the structural design equation considering the prying action for designing the structure of a box-shape pressure compensated chamber.

• Proceedings of the KIEE Conference
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• 2001.07d
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• pp.2163-2165
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• 2001

화력 발전소 드럼수위의 제어는 보일러 시스템의 효율적인 운용을 위해 중요한 위치를 차지하고 있다. 드럼수위의 제어 목적은 드럼수위를 외란에 관계없이 항상 설정치로 유지하는 것이다. 정상 운전중에는 드럼의 중앙이하 부분에는 물이 차 있고, 상부에는 증기가 차 있으나 만일 수위가 너무 높아지면 carry over 현상이 발생하며 반대로 너무 낮으면 드럼 하부의 과열 및 튜브의 손상을 초래하여 대사고를 유발하게 되므로 드럼수위는 항상 정상으로 유지해야 한다. 드럼수위 제어루프는 처음에는 드림수위만을 제어입력으로 취하는 PI 제어기에 의해 이루어지다가, 주증기량이 일정량 이상 유지되면 드럼수위가 일정한 설정치를 유지하도록 급수량, 드럼수위, 주증기량에 의한 PI-PI 캐스케이드 형태의 제어로 절환되어 제어가 이루어진다. 또한 드럼 수위는 차압검출기에 의해서 측정되어지는데, 드럼의 압력에 따라 물과 증기의 밀도가 변하기 때문에 차압검출기에 의한 드럼수위 지시치는 드럼압력에 의한 보상도 요구되어진다. 본 논문에서는 중용량 화력발전소를 대상으로 드럼수위 보상과 드럼수위 제어기를 구현하고, 적용하여 실제 발전출력 증발시의 드럼수위 제어결과를 보임으로서 구현한 드럼수위 제어기의 효용성을 보인다.

• Journal of agriculture & life science
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• v.52 no.6
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• pp.103-109
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• 2018

The performance of drip irrigation devices depends on flow uniformity related to the function of pressure compensation. The flow uniformity can be secured when the internal fluid pressures at the positions of the flow holes are maintained uniformly. The pressure compensation effect of the drip irrigation devices can be optimized with the combination of soft silicon and labyrinth structures. However, for a drip irrigation devices composed of only hard labyrinth structures, the flow rate is changed largely with the length and the internal geometry of the labyrinth structure. Although a drip irrigation devices with only hard labyrinth structures can be fabricated simply, the changes of flow rates with internal fluid pressures are much larger than those of the drip irrigation devices with soft silicon. Because the drip irrigation devices with only labyrinth structures can be utilized widely through the optimization of the fluid pressure, the length of the structures, and the cross-sectional area of them, the study on the optimization can play an important role for enhancing the performance of the drip irrigation devices. In this study, experimental and numerical studies for investigating the performance of the drip irrigation devices had been conducted. In the experiments and numerical calculations(CFD), the variable parameters were the lengths of the labyrinth structures(#1~#8) and the fluid pressures(0.5~3.0 bar).

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.3
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• pp.231-235
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• 2016

There are two methods for conducting the containment local leakage rate test (LLRT) in nuclear power plants: the make-up flow rate method and the pressure decay method. The make-up flow rate method is applied first in most power plants. In this method, the leakage rate is measured by checking the flow rate of the make-up flow. However, when it is difficult to maintain the test pressure because of excessive leakage, the pressure decay method can be used as a complementary method, as the leakage rates at pressures lower than normal can be measured using this method. We studied the method of measuring over leakage using the pressure decay method for conducting the LLRT for the containment building at a nuclear power plant. We performed experiments under conditions similar to those during an LLRT conducted on-site. We measured the characteristics of the leakage rate under varies pressure decay conditions, and calculated the compensation ratio based on these data.