• Title/Summary/Keyword: 압력 계측

Search Result 325, Processing Time 0.027 seconds

Elli-Situ 2000 (in situ, 실시간 표면 및 박막 모니터 장비)

  • 방현용;주한용
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.46-46
    • /
    • 2000
  • 과학기술 및 산업의 발달로 인하여 실험 중 또는 공정 상에서 in situ, 실시간으로 측정하고 분석하며 이를 되먹임하는 품질제어의 중요성이 대두되고 있다. 반도체 공정 또는 박막제조 공정 중에서 박막의 두께, 굴절율, 물질의 조성비 등을 알아내는 것이 긴요한 과제로 대두되고 있으며, 이를 위하여 공정중인 제품의 품질을 실시간으로 평가하는 장비가 요구되고 있는 것이다. 나아가 공정중의 예상하지 못한 시료의 특성변화를 그대로 감지하여 적절히 보정해 주는 되먹임 기법은 높은 수율을 보장하는 첨단기법이라 할 수 있다. 이러한요구에 부응할 수 있는 본 제품(Elli-situ 2000)은 박막의 두께 표면변화를 sub 의 정밀도를 가지고 in situ, 실시간으로 정밀 측정할 수 있는 첨단 계측장비로서 빛의 편광상태 변화를 측정하기 때문에 공정 중의 시료에 영향을 주지 않는 비간섭 특성과 비접촉 특성의 장점 뿐만 아니라 공기중에서는 물론 진공이나 액체 등의 매질에서도 사용될 수 있어서 매질에 대한 제약이 거의 없다는 장점도 가지고 있다. 편광상태의 제어 및 측정을 필요한 광학장비의 경우, 제작이 까다롭기 때문에 대부분 가격이 높은 편이고 사용방법이나 측정 데이터에 대한 해석이 어렵다는 단점이 있으나, Elli-situ 2000의 경우 상용화된 외국제품(국내제품은 없슴)과 비교하여 성능 및 가격경쟁력에 있어서도 우위에 있으며 간단, 명료한 장비조작 및 컴퓨터를 사용한 구동의 전자동화를 이룸으로써 초보자도 쉽게 측정하고 데이터를 처리할 수 있도록 하였다. 또한 취부대의 경우, 진공포트 플랜지의 표준규격(2-3" Del-Seal 플랜지 규격)에 맞춤으로써 기존의 진공챔버에 부착하여 진공에 전혀 영향을 주지 않는 상태에서 시료의 변화를 in situ, 실시간으로 정밀 측정할 수 있도록 하였다. 하였다.O 박막은 산소 가스압력과 기판온도, 인가 전류를 변화시켜가며 증착하였으며 이에 따른 박막의 결정성 변화를 알아보았다. 기판온도를 실온에서 점차 증가시켜나가면 $\Delta$$\theta$50은 급격히 감소하며 30$0^{\circ}C$에서는 결정성이 우수한 막을 얻을 수 있었다. 또한 산소 가스 압력이 0.5~1mTorr에서 $\Delta$$\theta$50은 양호한 값을 나타내었지만 그 이상에서는 c-축 배향성이 나빠짐을 확인하였다. 따라서 대향타겟식스퍼터 장치를 이용하여 ZnO 박막을 증착시 가스압력 0.5~1mTorr, 기판온도 20$0^{\circ}C$이상의 막 제작조건에서 결정성이 우수하게 나타나는 것을 확인할 수 있었다. gluten이 단단해졌음을 알수 있었다. 유화제 stearly 칼슘, 혹은 hemicellulase를 amarans 10% 대체한 밀가루에 첨가하면 확연히 비용적을 증대시킬 수 있다는 사실을 알 수 있었다. quinoa는 명아주과 Chenopodium에 속하고 페루, 볼리비아 등의 고산지에서 재배 되어지는 것을 시료로 사용하였다. quinoa 분말은 중량의 5-20%을 quinoa를 대체하고 더욱이 분말중량에 대하여 0-200ppm의 lipase를 lipid(밀가루의 2-3배)에 대하여 품질개량제로서 이용했다. 그 결과 quinoa 대량 7.5%에서 비용적, gas cell이 가장 긍정적 결과를 산출했고 반죽의 조직구조가 강화되었다. 또 quinoa 대체에 의해 전분-지질 복합제의 흡열량이 증대된 것으로부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다. 이것은

  • PDF

Uplift Pressure Removal System in Underground Structure by Utilizing Geocomposite System (지오컴포지트를 이용한 양압력 제거공법)

  • Shin, Eun-Chul;Kim, Jong-In;Park, Jeong-Jun
    • Journal of the Korean Geotechnical Society
    • /
    • v.22 no.9
    • /
    • pp.61-68
    • /
    • 2006
  • Recently the large scale civil engineering projects are being implemented by reclaiming the sea or utilizing seashore and river embankment areas. The reclaimed land and utilized seashore are mostly soft ground that doesn't have sufficient bearing capacity. This soft ground consists of fine-grained soil such as clayey and silty soils or large void soil like peat or loose sand. It has high ground water table and it may cause the failure and crock of building foundation by uplift pressure and ground water leakage. In this study, the permittivity and the transmissivity were evaluated with the applied normal pressure in the laboratory. The laboratory model tests were conducted by utilizing geocomposite drainage system for draining the water out to release the uplift pressure. The soil used in the laboratory drainage test was dredged soil from the reclaimed land where uplift pressure problems can arise in soil condition. Geocomposite drainage system was installed at the bottom of apparatus and dredged soil was layered with compaction. Subsequently the water pressure was supplied from the top of specimen and the quantities of drainage and the pore water pressure were measured at each step water pressure. The results of laboratory measurements were compared with theoretical values. For the evaluation of propriety of laboratory drainage test, 2-D finite elements analysis that can analyze the distribution and the transferring of pore water pressure was conducted and compared with laboratory test results.

Stand-alone Real-time Healthcare Monitoring Driven by Integration of Both Triboelectric and Electro-magnetic Effects (실시간 헬스케어 모니터링의 독립 구동을 위한 접촉대전 발전과 전자기 발전 원리의 융합)

  • Cho, Sumin;Joung, Yoonsu;Kim, Hyeonsu;Park, Minseok;Lee, Donghan;Kam, Dongik;Jang, Sunmin;Ra, Yoonsang;Cha, Kyoung Je;Kim, Hyung Woo;Seo, Kyoung Duck;Choi, Dongwhi
    • Korean Chemical Engineering Research
    • /
    • v.60 no.1
    • /
    • pp.86-92
    • /
    • 2022
  • Recently, the bio-healthcare market is enlarging worldwide due to various reasons such as the COVID-19 pandemic. Among them, biometric measurement and analysis technology are expected to bring about future technological innovation and socio-economic ripple effect. Existing systems require a large-capacity battery to drive signal processing, wireless transmission part, and an operating system in the process. However, due to the limitation of the battery capacity, it causes a spatio-temporal limitation on the use of the device. This limitation can act as a cause for the disconnection of data required for the user's health care monitoring, so it is one of the major obstacles of the health care device. In this study, we report the concept of a standalone healthcare monitoring module, which is based on both triboelectric effects and electromagnetic effects, by converting biomechanical energy into suitable electric energy. The proposed system can be operated independently without an external power source. In particular, the wireless foot pressure measurement monitoring system, which is rationally designed triboelectric sensor (TES), can recognize the user's walking habits through foot pressure measurement. By applying the triboelectric effects to the contact-separation behavior that occurs during walking, an effective foot pressure sensor was made, the performance of the sensor was verified through an electrical output signal according to the pressure, and its dynamic behavior is measured through a signal processing circuit using a capacitor. In addition, the biomechanical energy dissipated during walking is harvested as electrical energy by using the electromagnetic induction effect to be used as a power source for wireless transmission and signal processing. Therefore, the proposed system has a great potential to reduce the inconvenience of charging caused by limited battery capacity and to overcome the problem of data disconnection.

Flow Dimensional Analysis for Constant Pressure Injection Test (정압주입시험을 이용한 지하수유동차원 해석)

  • 이은용
    • The Journal of Engineering Geology
    • /
    • v.3 no.2
    • /
    • pp.149-165
    • /
    • 1993
  • Nowadays, the field hydraulic test is still an only method to evaluate groundwater characteristics in subsurface. The results of hydraulic test are very important for the concept model of fracture hydrogeology as well as the geometric pattern of fractures. The hydraulic tests performed in Korea are generally analysed under such assumption as steady radial flow in homogeneous aquifer or along simple geometry of fractures. Also the transmissivity measured in a fixed interval length is equivalent to a sum of individual fracture transmissivities in test legth. The boundary effects of weH hydraulics and the geometry of flow paths are hardly obtained from the test results analysed by a steady flow method. To circumvent this problem, the flow dimensional analysis was attempted from the results of constant pressure injection test carried out in a fractured granite area. A comparison of the hydraulic conductivity values from the transient and steady analysis shows that the latter is about a factor of 2~3 higher than the former. However, it was possible to analyse a flow dimension of each test interval from flow rate variation with time. The upper part of the bedrock(<10m deep) indicates an open boundary and the flow dimension shows nearly steady states, while the lower part of the bedrock(>25m deep) is characterized as sublinear flow dimension with a dosed boundary. In one of the test sections(15m deep), the flow dimension was changed from linear flow to spherical flow. From the experience of this study, one of the immediate problems to be solved is to enhance the field testing equipments, i.e., an accurate flowmeter with autorecording and a pressure detecting device to be able to install in the test section.

  • PDF

Development of Biotelemetry Method by Combining the SSBL Method and the Pinger Synchronizing Method (1) - Design and production of system - (SSBL 방식과 핑거동기 방식을 조합한 바이오텔레메터리 방식의 개발 (1) -시스템의 설계 및 제작 -)

  • 박주삼;고탁창언
    • Journal of the Korean Society of Fisheries and Ocean Technology
    • /
    • v.39 no.3
    • /
    • pp.218-229
    • /
    • 2003
  • A new biotelemetry method that the installation and the treatment of equipment is convenient and the instantaneously detailed location of the fish attached the pinger is able to track comparatively easily was developed. The receiving system in this biotelemetry method was advanced for track the detailed behavior of the fish by the miniature tracking pinger, because it was a burden to fish to add the pinger with the water temperature and the pressure sensor. By combining of the super short base line (SSBL) method to detect the direction of pinger and the pinger synchronizing method to measure the range from receiving transducer to pinger, the three dimensional locations of fish to the receiving transducer is gotten instantaneously. The receiving system is devised to realize the high precision or wide detection range by application of the basic design method for receiving system of biotelemetry developed by the present authors and the hydrophone array configuration. The measurement distance error in the pinger synchronizing method is minimized through the correction of which the deviation of transmission pluse period of pinger is caused by changing water temperature. A prototype system which is able to track the instantaneously detailed location of the fish by the SSBL and pinger synchronizing biotelemetry (SPB) method was produced.

Prediction Method and Characteristics of Micro-pressure Wave on High-speed Railway Tunnel (고속선 터널미기압파 특성 및 예측기법 연구)

  • Yun, Su-Hwan;Nam, Seong-Won;Kim, Seok-Won
    • Journal of the Korean Society for Railway
    • /
    • v.18 no.1
    • /
    • pp.8-14
    • /
    • 2015
  • This paper describes a prediction method for micro-pressure wave emitted from a tunnel on the Kyung-bu high-speed railway. Pressure and micro-pressure wave were measured simultaneously to obtain some constants for the prediction method. The change of a micro-pressure wave were analyzed according to the speed of the train, the track bed type, and the distance from a tunnel portal. At a train speed of 300km/h, the micro-pressure wave of 4.0km long ballast track tunnel is about 7.5Pa; that of 3.3km long slab track tunnel is about 14.3Pa The strength of the micro-pressure wave decreases in inverse proportion to the distance and becomes about 0.5~1.0Pa at a point of 100m from the tunnel exit. Micro-pressure waves were predicted using the formula with the obtained the constants. Using a comparison between the predicted data and field measurement data, it was confirmed that micro-pressure wave can be predicted easily through the prediction formula.

Estimation of Engine Output for Marine Diesel Engines (선박용 디젤엔진의 출력산정에 관한 연구)

  • Jung, Kyun-Sik;Lee, Jin-Uk;Jung, Jin-Ah;Choi, Jae-Sung
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.35 no.4
    • /
    • pp.436-442
    • /
    • 2011
  • To obtain the engine output correctly is basically very important factor for estimating a engine performance. But, it has been reported that the IHP measured from electronic indicator such as MIPS(Mean Indication Pressure System) has a deviation compared to mechanical indicator. It was reported by authors that the uncertainty of crank angle for TDC position could be one of the reasons. In this paper, the uncertainty of crank angle for TDC position and its influence to engine output were investigated respectively about M/E and G/E for marine diesel engines. For the purpose, two sampling methods of pressure in cylinder were considered which were 'angle base sampling' and 'time base sampling'. Angle base sampling is real crank angle acquired from angle encoder which is attached to crank shaft and time base sampling is crank angle calculated by detected revolution with Z-pluse of encoder. Time base sampling is same method of MIPS. This paper concluded that time base sampling method is not suitable for obtaining the output of marine diesel engine on board because of instantaneous speed variation and load fluctuation. Also it is verified that the variation of engine speed by load fluctuation should be one of reasons additionally in case of M/E.

Experimental Analysis of a Supersonic Plasma Wind Tunnel Using a Segmented Arc Heater with the Power Level of 0.4 MW (0.4 MW 급 분절형 아크 히터를 이용한 초음속 플라즈마 풍동 특성 실험)

  • Kim, Min-Ho;Lee, Mi-Yeon;Kim, Jeong-Soo;Choi, Chea-Hong;Seo, Jun-Ho;Moon, Se-Yeon;Hong, Bong-Guen
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.41 no.9
    • /
    • pp.700-707
    • /
    • 2013
  • Experimental analyses on a supersonic plasma wind tunnel of CBNU (Chonbuk National University) were carried out. In these experiments, a segmented arc heater was employed as a plasma source and operated at the gas flow rates of 16.3 g/s and the total currents of 300 A. The input power reached ~350 kW with the torch efficiency of 51.4 %, which is defined as the ratio of total exit enthalpy to the input power. The pressure of plasma gas in the arc heater was measured up to 4 bar while it was down to ~45 mbar in a vacuum chamber through a Laval nozzle. During this conversion process, the generated supersonic plasma was expected to have a total enthalpy of ~11 MJ/kg from the measured input power and torch efficiency. In addition to the measurement of total enthalpy, a cone type probe was inserted into the supersonic plasma flow in order to estimate the angle between shock layer and surface of the probe. From these measurements, the temperature and the Mach number of the supersonic plasma were predicted as ~2,950 K and ~3.7, respectively.

Extraction of Parameters for Acupoint Discrimination and Design of discrimination system (경혈식별을 위한 파라메터 추출 및 식별시스템의 설계)

  • 이용흠;박창규
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.5 no.1
    • /
    • pp.89-101
    • /
    • 2001
  • The conventional pattern-methods for discrimination of acupoint, meridian line which is the basic object of diagnosis and medical treatment in oriental medicine is discriminated the conduction point by the stimulation in body skin with DC. But, it is not sufficient to truth in discrimination ratio, coincident ratio, body effect, reproductivity. Therefore, this paper is extracting the optimal parameter of frequency and waveform in order to improve the conventional pattern, and proposing the SPAC(Single Power Alternative Current) stimulus pattern applying that. Also, this algorithm proposes to be able to discriminate with low pressure of the electrode by displaying in the level meter both the absolution and relation value of the skin current. It is able to decrease pain and body effect by electrode pressure and discriminate acupoint regardless of skin current in difficult discrimination spot. It is compared the performance of system applying the extracted optimal parameter and algorithm, and it is confirmed that there is difference in discrimination parameter of acupoint reacted to the individual and the meridian. It is compared that discrimination, coincident ratio of the traditional acupoints as the acupoint stimulation pattern. It is confirmed truth of optimal parameter and discrimination algorithm. Keyword: Meridian, Discrimination, Coincident, Body effect, Reproductivity, SPAC, Optimal parameter.

  • PDF

Sensitivity Analysis of Finite Element Parameters for Estimating Residual Stress of J-Groove Weld in RPV CRDM Penetration Nozzle (원자로 CRDM 관통노즐 J-Groove 용접부 잔류응력 예측을 위한 유한요소 변수 민감도 해석)

  • Bae, Hong-Yeol;Kim, Ju-Hee;Kim, Yun-Jae;Oh, Chang-Young;Kim, Ji-Soo;Lee, Sung-Ho;Lee, Kyoung-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.36 no.10
    • /
    • pp.1115-1130
    • /
    • 2012
  • In nuclear power plants, the reactor pressure vessel (RPV) upper head control rod drive mechanism (CRDM) penetration nozzles are fabricated using J-groove weld geometry. Recently, the incidences of cracking in Alloy 600 CRDM nozzles and their associated welds have increased significantly. The cracking mechanism has been attributed to primary water stress corrosion cracking (PWSCC), and it has been shown to be driven by welding residual stresses and operational stresses in the weld region. The weld-induced residual stress is the main factor contributing to crack growth. Therefore, an exact estimation of the residual stress is important for ensuring reliable operation. This study presents the residual stress computation performed for an RPV CRDM penetration nozzle in Korea. Based on two and three dimensional finite element analyses, the effect of welding variables on the residual stress variation is estimated for sensitivity analysis.