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PECVD를 통해 향상된 SiN/SiO2/ITO 다층박막의 무반사 효과에 대한 연구

  • Choe, Min-Jun;Gwon, Se-Ra;Song, Ae-Ran;Jeong, Gwon-Beom;An, Gyeong-Jun;Baek, Ju-Yeol;Kim, Bu-Gyeong;Jang, Hyeok-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.274-274
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    • 2016
  • 터치스크린패널로 응용하기 위하여 80%이상의 높은 투과도와 낮은 저항이 요구된다. 그 중에서도 무반사 효과 (anti-reflective, AR) 를 크게하여 투과도를 향상시키는 방법으로 나노구조물, 증착시 경사각, 다층박막 방법 등이 연구 개발되고 있다. 단일 박막을 이용하여 무반사 코팅을 하는 경우, 정밀한 굴절률 조절이 어려우며 낮은 반사율 영역의 선폭이 좁은 단점이 있다. 반면, 저/고굴절률 다층박막의 경우 비교적 굴절률 조절이 용이하고 가시광영역 전반적으로 높은 투과도를 가질 수 있다. plasma enhanced chemical vapor deposition (PECVD) 증착법을 이용하여 무반사 효과를 증대시키기 위해 저/고굴절률 다층구조의 박막을 두께조합에 따라 평가하였으며, 가장 널리 사용되고 있는 Sputtering증착법과 비교하여 연구하였다. 제작된 다층박막의 구조는 glass(sub.)/SiN/SiO2/ITO 이며, 무반사 코팅층인 SiN/SiO2층은 각각 PECVD와 Sputtering 증착법을 통해 성장되었고, ITO는 스퍼터링 증착법을 이용하여 동일하게 성장하였다. 그 결과 PECVD 증착법이 Sputtering 증착법에 비하여 가시광영역(400~800nm)에서 더 높은 투과도를 얻게 되었다. 결과의 차이에 대해서 PECVD 증착법과 Sputtering 증착법으로 성장된 SiN, SiO2 박막의 광학적 특성과 물리적 특성의 변화를 spectroscopic ellipsometry (SE), Rutherford backscattering (RBS), atomic force microscopy (AFM) 을 이용하여 비교, 분석하였다.

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Characteristics of ZnO:Al thin films deposited with differentworking pressures (증착 압력에 따른 ZnO:Al 박막의 특성)

  • Kim, Seong-Yeon;Sin, Beom-Gi;Kim, Du-Su;Choe, Yun-Seong;Park, Gang-Il;An, Gyeong-Jun;Myeong, Jae-Min
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.49.2-49.2
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    • 2009
  • 투명전극은 디스플레이, 태양전지와 같은 광전자 소자에 필수적이며, 지금까지 개발된 재료 중에는 ITO가 가장 투명하면서 전기전도도가 높고 생산성도 좋기 때문에 투명전극의 재료로 사용하고 있다. ITO는 낮은 비저항(${\sim}10^{-4}{\Omega}cm$) 과 높은 투과율 (~85 %), 상대적으로 넓은 밴드갭 에너지 (3.5 eV) 의특성과 같이 뛰어난 전기적 광학적 특성에 반해서 높은 원자재 가격, 불안정한 공급량 등으로 인한 문제점이꾸준히 제기되고 있다. 따라서 $In_2O_3$:Sn, ZnO:Al, ZnO:Ga, ZnO:F, ZnO:B, TiN 등과 같은 물질들로대체하려는 연구가 활발하게 진행되고 있다. ZnO는 ITO보다원자재의 수급이 원활하기 때문에 원가가 낮으며, 상대적으로 낮은 온도에서도 제작이 가능하다. 또한 화학적으로 안정적이므로 ZnO에 Al, Ga 등의 3족 원소를 도핑함으로써 낮은 비저항의 박막 제작이 가능하고, ITO 박막과 비교하여 etching이 쉬우며 기판과의 접착성이 좋으며, sputtering 공정시 plasma 분위기에서의 안정성이 뛰어나고 박막증착율이 높기 때문에 투명전극으로 적합한 재료이다. 본 연구에서는 cylindrical type의 Aldoping된 ZnO single target을 사용하여 박막 증착 압력의 변화를 주어 유리기판 위에 DC sputtering을 하였다. Fieldemission scanning electron microscope (FESEM)을 통해 ZnO:Al 박막의 표면의 형상과 두께를 확인하였으며, X-ray diffraction (XRD) 분석을 통해 박막의 결정학적 특성을 관찰하였다. 투명전극용 물질로서 ZnO:Al 박막의 적합성 여부를 확인하기 위하여 Van der Pauw 방법을 이용하여 박막의 비저항, 전자 이동도, 캐리어 농도를 측정하였으며, 박막의 기계적 성질 및 표면 접착성을 확인하기 위하여 nano-indentaion 분석을 하였다. 또한 UV-vis spectrophotometer를 이용하여 ZnO:Al 박막의 투과율을 분석하여 투명전극으로의 응용 가능성을 확인하였다.

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Changes in KVA Resulting from Correction Condition of Refractive Error (굴절이상 교정상태에 따른 동적시력 변화)

  • Shim, Hyun-Suk;Kim, Sang-Hyun;Kang, Hye-Sook
    • Journal of Korean Ophthalmic Optics Society
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    • v.18 no.2
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    • pp.165-171
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    • 2013
  • Purpose: This study are to analyze and to compare between pupillary size, reaction time, refractive error, corrected vision, dominant eye, static visual angle (SVA) and kinetic visual acuity (KVA) of male and female college students, to measure KVA of them in full correction and to identify changes of KVA by +0.50 D and -0.50 D spherical power addition respectively in full correction condition. Methods: KVA, SVA, pupillary size, reaction time, refractive error, corrected vision and dominant eye of 40 male and 40 female optical science students were measured by utilizing KOWA AS-4A, reaction time measurement program, subjective refractometer, and objective refractometer, and KVAs were measured when +0.50 D/-0.50 D were added in both eyes respectively. Results: Binocular KVA of whole subjects was $0.45{\pm}0.22$, and in monocular KVAs were $0.36{\pm}0.19$ for right eye and $0.34{\pm}0.19$ for left eye, and binocular KVA was significantly higher than monocular KVA. It appeared that the better SVA was, the better KVA was in significant way, and in terms of refractive error the less myopia amount was, the better KVA was, but it was not significant statistically. The lower astigmatism was, the slightly and significantly higher KVA was when dividing between equal or less than -1.00 D astigmatism group and over -1.00 D astigmatism group. In resulting from correction condition of refractive error KVAs were $0.45{\pm}0.22$ for full correction, $0.26{\pm}0.15$ for +0.50 D addition, $0.48{\pm}0.22$ for -0.50 D addition which indicates that KVA in over myopia correction was significantly the highest and followed by full correction and under correction. Similar findings were revealed in both male and female, and KVA of male was better than female in comparing between male and female. There was no significantly different KVA between dominant eye and non-dominant eye. Conclusions: Accordingly, it is concluded that KVA is related with far distance SVA, astigmatism amount, and refractive error amount except a dominant eye. Through this research, it was found that prescription for enhancing KVA is to make full correction or to overcorrect slightly myopia.

Comparison to Contrast Sensitivity of Male and Female Adults in Their 20s (20대 성인 남녀의 대비감도 비교)

  • Choi, Soon-Lyoung;Han, Kwang-Lae;Shim, Hyun-Suk
    • Journal of Korean Ophthalmic Optics Society
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    • v.19 no.1
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    • pp.87-92
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    • 2014
  • Purpose: Comparison with contrast sensitivity between binocular and monocular of 20s adult was measured by spatial frequency 3.0, 6.0, 12.0 and 18.0 cpd and compares difference between monocular and binocular and difference between male and female. Methods: Topcon CV-3000 Phoroptor was used for full correction of 99 ophthalmic optics students and contrast sensitivity were measured by using Vector Vision CSV-1000E at 2.5 m in photopic condition (100 $cd/m^2$). Results: Photopic condition at 2.5 m, average contrast sensitivity of entire subject was 52.54, 80.40, 36.79 and 13.56 with right eye and 52.33, 81.29, 41.73 and 14.22 with left eye in 3, 6, 12 and 18 cpd. For both eye 65.46, 113.69, 52.04 and 19.44 were measured. The contrast sensitivity of male was 58.22, 83.52, 37.89 and 13.82 with right eye and 56.03, 46.68 and 15.67 with left eye in spatial frequency of 3, 6, 12 and 18 cpd. Both eyes were measured to 70.89, 120.96, 56.56 and 19.89. The contrast sensitivity of female was 46.50, 77.09, 35.61 and 13.28 with left eye and 48.40, 70.43, 36.47 and 12.68 with left eye in spatial frequency of 3, 6, 12, 18 cpd. Both eyes were 59.68, 105.97, 47.23 and 18.95. Conclusions: Contrast sensitivity value of binocular shows higher than monocular to both male and female. Contrast sensitivity of difference between male and female were statistically remarkably higher to male in right eye 3 cpd, left eye 6 cpd, 12 cpd and both eye 3 cpd. In other frequency, there was no statistical significance but male shows higher.

Study on the Visual Cells in the Retina of Macropodus ocellatus (Pisces, Osphronemidae) Freshwater Fish from Korea (한국산 담수어류 버들붕어, Macropodus ocellatus (Pisces, Osphronemidae) 망막의 시각세포에 관한 연구)

  • Kim, Jae Goo;Park, Jong Yong
    • Korean Journal of Ichthyology
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    • v.29 no.3
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    • pp.218-223
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    • 2017
  • Using both light and scanning electron microscopies, it was investigated on the visual cells as well as the eyes of Macropodus ocellatus (Pisces, Osphronemidae). This species had a circular lens and yellowish cornea. The eyes had $3.5{\pm}0.2mm$ which is $31.1{\pm}3.0%$ in a percentage of eye diameter relative to head length. The retina ($158.2{\pm}10.6{\mu}m$) was built of several layers, including the visual cell layer which consists of three types of cells: single cons ($27.8{\pm}1.6{\mu}m$) and equal double cone ($33.9{\pm}3.7{\mu}m$), and large rods ($57.3{\pm}1.3{\mu}m$). The visual cell layer then was classified into the correct pattern. All visual cells were clearly distinguished from two parts (inner and outer segments). The elongated rod cells were extend to the bottom of the retinal pigment epithelium. In scanning electron microscopy, the outer segment links to inner segment by so-called calyceal piles. The M. ocellatus single and double cones appearance form a flower-petal arrangement, which is a regular mosaic pattern that contains quadrilateral units by four double cones surrounding a single cone.

The Study of the Characteristic of Ti Thin Film Using Small Magnetron Sputtering Method for Sunglass Lens (소형 Magnetron sputtering 방법에 의한 썬글라스 렌즈용 Ti 박막의 특성연구)

  • Park, Moonchan;Jung, Boo Young;Lee, Jong Geun;Joo, Kyung Bok;Lee, Wha Ja
    • Journal of Korean Ophthalmic Optics Society
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    • v.13 no.1
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    • pp.59-63
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    • 2008
  • Purpose: Ti thin films were deposited on slide glass and CR-39 lenses using small magnetron sputtering apparatus to of Ti thin films. Methods: The thickness of Ti thin films were measured by cross section SEM, the transmittance and reflectance of them were obtained using spectrophotometer, the refractive index and extinction of them were obtained from VASE data. Results: The transmittances of Ti thin films with 60 nm, 120 nm, 140 nm thickness were a little change within the visual region from 400 nm to 750 nm, but were increased a little amount at near 400 nm. The transmittance of 60 nm, 120 nm, 140 nm Ti thickness in d-line was 30%, 25%, 20%, respectively. Also, it was shown that the refractive indices and extinction coefficients of the Ti thin films obtained from VASE were similar to those of Ti thin film offered macleod program. Conclusions: Ti films on CR-39 with these transmittances were available for sunglass lens. It was indicated that the refractive indices and extinction coefficients of the Ti thin films were decreased with the thickness of Ti thin film, for the thickness of Ti thin films was due to very thin.

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Visual Cells in the Retina of Iksookimia longicorpa (Pisces; Cobitidae) of Korea (한국산 미꾸리과 어류 왕종개 Iksookimia longicorpa 망막의 시각세포)

  • Kim, Jae Goo;Park, Jong Young
    • Korean Journal of Ichthyology
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    • v.27 no.4
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    • pp.257-262
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    • 2015
  • The visual cells in the retina of Iksookimia longicorpa (Pisces, Cobitidae) were investigated by light and scanning electron microscopes. The retina ($216.42{\pm}13.36{\mu}m$) has several layers, and the visual cell layer consists of unequal double cones and large rods. In a double cone, two members are unequal such that one cone is longer than the other (long element $26.42{\pm}1.7{\mu}m$, short element $16.82{\pm}1.1{\mu}m$). The cones form a row mosaic pattern in which the partners of double cones are linearly oriented with a large rod. The visual cells observed have an outer segment (hematophilic), inner segment (eosinophilic). In scanning electron microscopy, the outer segment links to inner segment by so-called calyceal piles (calyceal processes) of membrane discs surrounded by double membranes.

Change of Electro-optical Properties of Polymer Dispersed Liquid Crystal Lens with Addition of Extra Photo-initiator (광개시제 첨가에 따른 고분자 분산형 액정 렌즈의 전기-광학 특성 변화)

  • Kim, Jaeyong;Han, Jeong In
    • Korean Chemical Engineering Research
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    • v.52 no.3
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    • pp.321-327
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    • 2014
  • Polymer dispersed liquid crystal lenses of the cell gap of $11{\mu}m$ and $30{\mu}m$ were made from a uniformly dispersed mixture of 40 wt% NOA65 prepolymer - 60 wt% E7 liquid crystal with the variations of the additional photoinitiator. The photoinitiator, benzophenone of 5.0 wt% was originally in the commercial prepolymer NOA65. In this works, the influence of the benzophenone amount intentionally added in the commercial NOA65 on the electrical properties of polymer dispersed liquid crystal lens for smart electronic glasses. The additional quantities of the photoinitiator were 1, 2, 4, 8 and 16 wt% of the weight of NOA65 - E7 mixture. All the electro-optical properties of the sample with added benzophenone such as the driving voltage, the slope of the linear region, the response time and contrast ratio were more improved than that of commercial NOA65 only. These improvements were due to the increase of the average size of E7 liquid crystal droplets in the samples with the increase of the added benzophenon amount. The liquid crystal droplet size was increased from $5.3{\mu}m$ to $12.2{\mu}m$ when the photoinitiator was added from 0 wt% to 8 wt%. At the same concentration range of the photoinitiator, the driving voltage was ranged from 11.1 V to 17.3 V. The slopes of the linear region were in the range of 10.35~13.96 %T/V, which were more enhanced than that of NOA65 without the additional benzophenone. In particular, though the deteriorations by cell gap of $11{\mu}m$ were so effective to offset the influence of the added benzophenone for both rising and falling response time, it is confirmed that there were still somewhat improvement by the additional benzophenone. Response time and contrast ratios of all the samples with excess benzophenone were slightly enhanced.