• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.151-152
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• 2012

• Proceedings of the Korean Vacuum Society Conference
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• 2004.08a
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• pp.196-196
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• 2004

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.253-254
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• 2011

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.101-101
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• 2011

최근 반도체 및 디스플레이 사업의 급속한 발전으로 인해 반도체 공정은 초미세선폭화, 대면적화 되면서 오염입자를 제어하는 것이 이슈가 되고 있다. 반도체 및 디스플레이의 제조공정 중 챔버 내 진공부품은 진공상태에서 플라즈마에 의해 물리적인 데미지와 화학적으로 매우 활성이 높은 라디칼(Radical)반응에 의한 부식이 진행된다. 이러한 공정영향에 의해 챔버 내 부품들은 부식이 되고 공정 중에 오염입자가 발생하게 되어 반도체 및 디스플레이의 수율저하에 큰 영향을 미치고 부품교체 비용 또한 많이 들고 있다. 본 연구에서는 진공부품의 내전압측정방법을 이용하여 진공부품의 피막특성을 평가하는 연구방법으로서 내전압 지그(Zig)를 표준화하여 제작하였고, 재현성있는 데이터로 피막특성을 정량적으로 측정하는 방법을 연구 하였다. 식각공정 중에 발생하는 부식특성에 관해서는 화학부식와 플라즈마부식 열충격 등 각각 독립적으로 부식환경에 노출시켰으며, 진공부품의 손상 전 후의 내전압 특성변화를 이용하였다. 또한, CCP (Capacitativly Coupled Plasma)형의 RF magnetic sputter을 설계 제작하였고 진공부품에 고밀도 플라즈마를 발생시켜 플라즈마데미지에 의해 발생한 오염입자를 실시간으로 monitoring하여, 정량적으로 측정된 내전압특성결과를 비교 검증하였다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.2
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• pp.72-77
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• 2016

Airplane reservoirs made of Al7075 are coated with an anodizing layer to maintain precision, air tightness and corrosion resistance. It is commonly required that the inner surface roughness of the reservoir be less than an average $0.2{\mu}m$ to maintain stable oil pressure. Even though precision polishing is necessary to achieve this quality it is not easy. Inner surface roughness is not uniform and the quality of the product is irregular because most of the work is done by hand. The purpose of this study is to design an exclusive polishing machine and to determine the standard cutting condition and polishing condition necessary for good inner surface roughness and to improve workefficiency.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.12
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• pp.993-998
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• 2016

In today's manufacturing industries, the demand for light non-ferrous materials is considerable due to the need to improve productivity and manufacturability. Since the surface roughness of a material is important for improving the functionality of machined parts, various techniques for surface treatments have been developed to obtain non-ferrous materials with low roughness. A superfinishing method utilizing polishing films is generally applied to the anodized surface of Al7075 in order to improve its roughness. The objective of this research is to determine through experiment the parameters that facilitate the shortest processing time, using a superfinishing method, for reaching a roughness of Ra $0.2{\mu}m$. This objective is met by applying the Taguchi method in the experiments. Through the experiments of superfinishing, the effectiveness of the parameters adopted for the surface treatment is demonstrated.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.7
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• pp.14-21
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• 2019

Large-diameter hydraulic devices such as the hydraulic reservoir in aircraft that serves to balance the hydraulic pressure in the various hydraulic devices in the cabin and to store hydraulic oil are operated by the internal piston systems. However, since this operates in an environment with high temperature and humidity, it may cause the inner surface to flake during its operation. Therefore, an anodizing surface treatment is applied to improve the corrosion resistance, abrasion resistance, and smooth operation. However, anodizing increases the surface roughness. Accordingly, the polishing process that improves the surface roughness after anodizing is important. However, the existing polishing process is performed manually, which results in an inefficient process. Therefore, in this study, we selected the optimum polishing conditions for effective polishing using the experimental design to improve the polishing process for the $Al_2O_3$ film that forms after anodization. Through experiments, we confirmed that the surface uniformity after polishing was superior as the feed rate was slower when the same polishing time had been applied.

• Iberoamérica
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• v.22 no.2
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• pp.25-57
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• 2020

Eduardo Galeano is a left-wing intellectual who led the criticism and accusations of dictatorship and social absurdity in Latin America. It digs into the truth of hidden history that has not been revealed in official history. He values the memory of history to stop repetition of the unfortunate history of the past. The main research topic of this study, 『The Book of Embraces』, is also an extension of such work. Most of the stories in this work depend on the writer's memory. There is no coherence or integration in the content of the story, and the length of the text is not constant, so it is extremely informal and fragmented. This is a strategy to formally reveal the illogical and irrational reality of Latin America. He analyzes the problems of the separation system prevalent in Latin American society from various perspectives. It separates me and the others as well as the past and the present. It makes the memory of history void and paralyzes the consciousness of history. These systems are fixed for convenient governance. In this situation, the pattern of violence becomes more explicit and broad. The anxiety and fear of the Latin American public become commonplace. It is a reality of enduring daily life without hope. Galeano finds this enduring force in historical memory. He believes that when the past and the present meet and embrace, a new history of the future can be encountered. Galeano does not just criticize reality or cynical attitude but also suggests hope for the future.

• Journal of Surface Science and Engineering
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• v.20 no.1
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• pp.25-30
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• 1987

미국의 정부규격은 국방규격(Military Specification and Standard) 연방규격(Federal Specification Standard)이 있으며 금속표면처리에 관련된 규격인 전기도금규격, 아노다이징, 화성피막처리, 기타 코팅 규격은 40여종으로 되어있다. 이들 규격서와 표준서는 미국내 정부베이소 구매시의 금속표면처리 제품과 때로는 장비의 구입 계약시에 지침이 되고 있다. 전민간의 산업체와 일반 상품의 가공에 생산과 품질관리에 두루 적용되고 있어 국내 대미주 지역의 수출은 물론 표면처리 제품의 생산 공정에 활용-기여하고자 규격 주요내용의 기술과 구입방법을 소개하고져 한다.

• Magazine of the Korea Institute for Structural Maintenance and Inspection
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• v.18 no.3
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• pp.27-31
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• 2014