• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.179-179
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• 1998

실리콘 집적회로 제조시 sub-micron 의 contact 형성 공정은 질연막 형성 후 이의 식각 및 세정, c contact 실리사이드, 획산방지막, 배선 금속층의 형성 과정올 거치게 된다. 본 연구팀에서는 C.F야f2 헬리 콘 플라즈마훌 이용한 고선택비 contact 산화막 식각공정시 형성된 잔류막충과 오염 손상올 관찰하고 산소 플라즈마 처리와 후속 열처리에 따른 이들의 제거 정도를 관찰하여 이에 대한 결과를 발표하였다. 본 연구메서는 식각 및 후처리에 따라 잔류하는 잔류막과 손상층이 후속 공정인 contact 실리사이드 형 섬에 미치는 영향올 관찰하였다. C C.F바f2 웰리콘 풀라즈마률 이용한 식각시 공정 변수로는 수소가스 첨가, bias voltage 와 과식각 시간 의 효과를 관찰하였으며 다른 조건은 일정하게 하였다 .. Contact 실리사이드로는 Ti, Co-싫리사이드를 선 택하였으며 Piranha cleaning, 산소 플라즈마 처리, 산소 풀라즈마+600 'C annealing으로 각각 후처리된 시 편을 후처리하지 않은 시펀돌과 함께 실리사이드 형성용‘시펀으로 이용하였다 각각 일정 조건에서 동 일 두께의 실리사이드훌 형성시킨 후 4-point probe룰 이용하여 면저황올 측정하였다 후처리하지 않은 시편의 경무 실리사이드 형성은 아주 시펀의 일부분에서만 형성되었으며 후속 세정 및 얼처리훌 황에 따라 실리사이드의 면저항은 감소하여 식각 과정을 거치지 않은 깨끗한 실리콘 웨이퍼위에 실리사이드 를 형성시킨 값(control 값)에 접근하였다. 실리사이드의 면저항값은 식각시 노훌된 실리콘 표면 위에 형 성된 손상충보다는 잔류막에 큰 영향을 받았으며 수소 가스가 첨가된 식각 가스로 식각한 시편으로 형 성한 실리사이드의 면저항값이 손상이 상대적으로 적은 것으로 관찰된 수소훌 첨가하지 않은 식각 가 스로 식각한 시펀 위에 형성된 실리사이드의 면저황에 비해 낮은 값을 나타내었다. 실리사이드의 전기적 륙성에 미치는 손상층의 영향올 좀더 면밀히 관찰하고자 bare 실리콘 wafer 에 잔류막이 거의 없이 손상층을 유발시키는 식각 조건들 (100% HBr, 100%H2, 100%Ar, Cl싸fz)에 대하여 실 리콘 식각을 수행한 후 Co-실리사이드률 형성하여 이의 면저황을 측정한 걸과 100% Ar 가스로 식각된 시편을 이용하여 형성한 실리사이드의 면저항은 control 에 기까운 면저항값올 지니고 따라서 손상층이 실리사이드 형섬메 미치는 영향은 크지 않음을 알 수 있었다. 이상의 연구 결과훌 통해 손상층이 실리사이드의 형성이나 전기적 톡섬에 미치는 영황은 잔류막층 에 의한 영향보다 적다는 것을 알 수 았으며 잔류막층의 두께보다는 성분이나 걸합상태, 특히 식각 및 후처리 후 잔류하는 탄소 싱분과 C-Si 결함에 큰 영향올 받는 것올 알 수 있었다.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.45-45
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• 2009

원가 측면에서 유리한 저항점용접(Resistance Spot Welding)이 차체 용접에 80%이상으로 가장 많이 적용되고 있다. 첨단고강도강(Advanced High Strength Steel)의 저항점용접성 및 용접부 특성에 미치는 공정 변수의 영향에 대한 연구결과는 많으나, 합금원소의 영향에 대해서는 전무하다. 특히, Si는 DP(Dual Phase)강에 첨가 시 균일한 마르텐사이트의 분포를 촉진하는 원소로 저항 점용접성 및 용접부 특성에 영향을 미칠 것으로 예상되며, 이에 대한 연구는 보고된바 없다. 본 연구에서는 냉연 DP강의 저항 점용접시 중요한 인자 중 하나인 너깃경과 전단인장강도에 미치는 Si함유량의 영향을 검토하였다. 사용된 강재 및 용접기는 1.2mm 두께의 Si함유량(0, 0.5, 1.0, 1.5wt%)이 다른 인장강도 780~1000MPa급 냉연 DP강과 단상 AC용접기를 사용하였다. 용접조건은 ISO 18278-2규격에 따라 가압력 4kA, 초기가압시간 40cycle, 유지시간 17cycle로 고정하고, 용접전류만 변화하여 용접을 실시하였다. 너깃경은 용접부 단면을 컷팅 후 폴리싱 하여, 광학현미경과 Image Pro plus를 이용하여 측정했으며, 인장시편규격은 JIS Z 3137를 이용하였다. Si함유량이 증가에 따라 스패터 발생 전류는 감소했고, 너깃경은 직선적으로 증가했다. Si함유량 증가에 따른 너깃경 증가 이유는 저항(R) 측정결과, Si함유량 증가에 따라 모재의 저항이 높아져, 따라서 입열량($Q=I^2Rt$)이 많아지기 때문으로 판단되었다. 인정전단강도는 Si함유량 증가에 따라 직선적으로 증가했다. 이러한 이유는 Si함유량 증가에 따라 너깃경이 증가되기 때문으로 판단되었고, 너깃경과 인장전단강도 사이에 직선적 관계(PL(kN)=$3.2N_{dia.}$-0.81, $R^2$=0.93)를 가지고 있었다. 파단양상은 Si함유량에 상관없이 5.4kA이하에서는 계면파단이 일어났고, 6.0kA이상에서는 풀 아웃 파단이 일어났다. 계면파단주원인은 용접부 가장자리에 지름이 약 $5{\mu}m$이하의 예리한 노치가 존재하여 노치응력집중과 HAZ계면 근처에 미접합부가 존재하기 때문으로 판단되었다. 6.0kA이상에서는 예리한 노치가 없었고, HAZ부가 완전히 접합되어 있기 때문에 풀 아웃 파단이 일어난 것으로 판단되었다. 따라서, Si함유량 증가에 따라 적정용접전류 구간은 감소했고, 너깃경은 직선적으로 증가했다. 또한, Si함유량 증가에 따라 인장전간강도는 증가 했으며, 너깃경과 인장전단강도 사이에 직선적 관계를 가지고 있었다. 파단 양상은 Si함유량에 상관없이 5.2kA이하에서는 계면파단이, 6.0kA이상에서는 풀 아웃 파단이 일어났다.

• Food Science of Animal Resources
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• v.25 no.2
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• pp.121-126
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• 2005

The changes in quality characteristics and shelf-life of vacuum-shrink packaged Bierschinken after stuffing in fibrous casing and stored at 5 and $10^{\circ}C$ were investigated The total aerobic plate count (APC) of Bierschinken was initially <2.00 $log_{10}CFU/cm^2$, however increased gradually over storage period The APCs of Bierschinken maintained at the level of 4.86 and 5.13 $log_{10}CFU/cm^2$ after 35 days at 5 and $10^{\circ}C$, respectively. pH tended to decrease with the extension of storage period The values of TBA and VBN tended to increase with storage time, of which trend was pronounced at $10^{\circ}C$ rather than at $5^{\circ}C$. According to the sensory evaluation, Bierschinken had the marketing value till 28 days irrespective of storage temperature. The shelf-life of Bierschinken tested might be preferentially restricted by the occurrence of off-odor and off-flavor at the end of storage period.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.48 no.4
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• pp.452-468
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• 2012

Marine organisms were collected by the stow nets and the stow net on boat fisheries from April 2010 to November 2011 in the Han River Estuary and categorized as 126 species, 61 families, and 5 taxa. The species were consisted with 34 in Crustacea, 5 in Cephalopoda, 79 in Pisces, unidentified jellyfishes in Cnidaria, and Finless porpoise in Mammals. The major species were composed of fish and crustaceans in the Han River Estuary. The dominant species in Crustacea were Chinese ditch prawn (Palaemon gravieri), blue crab (Portunus trituberculatus), Ridgetail prawn (Exopalaemon carinicauda), and mantis crab (Oratosquilla oratoria), and those in Pisces were Korean anchovy (Coilia nasus), and Japanese grenadier anchovy (Coilia mystus). The length structures of the six dominant species have more than one mode in the Han River Estuary. It reflects that the species inhibit during a part of and/or whole lifetime in the Han River Estuary where they utilize as spawning and/or nursery grounds. Freshwater fishes were collected from station D where is the closest location to the Han River stream, and their appearances were well matched with the large amount of freshwater discharge due to flood periods. Principal components analysis (PCA) was carried out with species compositions and showed temporal and spatial differences by the variations of species.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.42 no.4
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• pp.326-335
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• 2014

Aerodynamic characteristics of the small two-stage turbo blower were investigated using commercial CFD tool(ANSYS CFX Ver. 14.5) in this paper. Turbo blower, which is a centrifugal type of turbomachinery, is used in various industries. It is used for application that required high static pressure rising at relatively small volumetric flow rate. In order to understand the mechanism of static pressure rising, the aerodynamic characteristics of the small two-stage turbo blower are analyzed at high rotating speed in this study. The k-${\omega}$ SST turbulence model, which is good at prediction of adverse pressure gradient flows, was applied. The CFD results of the turbo blower are validated by performance test. The static pressure rising of the turbo blower is nonlinearly increased over the first stage and the second stage. The secondary flow occurred at guide vanes, between the casing and the first impeller shroud, and the bottom of the impeller disk. As a result, It is required that whole fluid area is analyzed to predict aerodynamic characteristics of small two-stage turbo blower. and the result should be selected with considering for error from experiment and CFD.

• Geophysics and Geophysical Exploration
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• v.15 no.4
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• pp.227-234
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• 2012

In this study, we make simulation of density log using a Monte Carlo N-Particle (MCNP) algorithm to make an analysis on density logging under different borehole environments, since density logging is affected by various borehole conditions like borehole size, density of borehole fluid, thickness and type of casing, and so on. MCNP algorithm has been widely used for simulation of problems of nuclear particle transportation. In the simulation, we consider the specific configuration of a tool (Robertson Geologging Co. Ltd) that Korea institute of geoscience and mineral resources (KIGAM) has used. In order to measure accurate bulk density of a formation, it is essential to make a calibration and correction chart for the tool under considerations. Through numerical simulation, this study makes calibration plot of the density tool in material with several known bulk densities and with boreholes of several different diameters. In order to make correction charts for the density logging, we simulate and analyze measurements of density logging under different borehole conditions by considering borehole size, density of borehole fluid, and presence of casing.

• Geophysics and Geophysical Exploration
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• v.21 no.2
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• pp.112-124
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• 2018

Ocean-bottom seismic survey is a seismic acquisition technique which measures data by installing 4-component receiver on the sea floor. It can produce more improved data in quality than any other acquisition techniques. In the ocean-bottom seismic survey, however, the number of receivers is limited due to high cost. Since only a small number of receivers are used for acquisition, ocean-bottom seismic data may suffer from discontinuities of events over traces, which can result in spatial aliasing. In this paper, we implemented Kirchhoff migration using mirror-imaging algorithm to improve the quality of ocean-bottom seismic image. In order to implement the mirror imaging algorithm, the seismograms should be separated into up-going and down-going wavefields and the down-going wavefield should be used for migration. In this paper, we use the P-Z summation method to separate the wavefield. Numerical examples show that the migration results using mirror imaging algorithm have wider illumination than the conventional migration, especially in the shallow layers.

• Journal of Korea Water Resources Association
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• v.53 no.6
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• pp.395-408
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• 2020

This paper aims to develop and apply three different machine learning approaches (i.e., artificial neural networks (ANN), adaptive neuro-fuzzy inference systems (ANFIS), and wavelet-based neural networks (WNN)) combined with an evolutionary optimization algorithm and the k-fold cross validation for multi-step (days) streamflow forecasting at the catchment located in Algeria, North Africa. The ANN and ANFIS models yielded similar performances, based on four different statistical indices (i.e., root mean squared error (RMSE), Nash-Sutcliffe efficiency (NSE), correlation coefficient (R), and peak flow criteria (PFC)) for training and testing phases. The values of RMSE and PFC for the WNN model (e.g., RMSE = 8.590 ㎥/sec, PFC = 0.252 for (t+1) day, testing phase) were lower than those of ANN (e.g., RMSE = 19.120 ㎥/sec, PFC = 0.446 for (t+1) day, testing phase) and ANFIS (e.g., RMSE = 18.520 ㎥/sec, PFC = 0.444 for (t+1) day, testing phase) models, while the values of NSE and R for WNN model were higher than those of ANNs and ANFIS models. Therefore, the new approach can be a robust tool for multi-step (days) streamflow forecasting in the Seybous River, Algeria.

• Geophysics and Geophysical Exploration
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• v.9 no.3
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• pp.225-230
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• 2006

Fluid replacement and conductivity logging have been applied to three boreholes in coastal aquifer in order to identify permeable fractures and to estimate the origin of saline groundwater. Fluid replacement technique measures and monitors the change of borehole fluid conductivity with depth under ambient or pumping condition after replacing the original borehole fluid with different one (by pumping out original one and injecting simultaneously new one at the hole bottom). After the replacement of borehole fluid, the change of fluid conductivity can be the direct indicator of the intake flow of formation water through aquifer such as permeable fractures or porous formations. The conductivity profiles measured with times therefore indicate the locations of permeable zone or fractures within the open hole or the fully slotted casing hole. As a result of fluid conductivity logging for three boreholes at coastal area in Yeonggwang, Jeonam Province, it is interpreted that the seawater intrusion in this area is not by remnant saline groundwater after land reclamation but mainly by intrusion of saline water through fractured rock. This approach might be useful for assessing the characteristics of seawater intrusion, the design of optimal pumping, the mitigation of seawater intrusion using freshwater injection, and estimating the hydraulic characteristics in coastal aquifer.

• Journal of the Korean GEO-environmental Society
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• v.9 no.3
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• pp.17-28
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• 2008

In this study, the residual strength prediction models were proposed by measuring various residual strength according to pit characteristics for metallic water pipes such as cast iron pipe (CIP), ductile iron pipe (DIP), and steel pipe (SP). The exponential prediction model was better fitted to measured residual tensile strength for CIP. In case of DIP and SP, the prediction model using loss of strength was more exactly predicted compared with other model types. The fracture toughness were averagely $40.46kgf/mm^2{\sqrt{mm}}$ for CIP, $85.27kgf/mm^2{\sqrt{mm}}$ for DIP, and $92.27kgf/mm^2{\sqrt{mm}}$ for SP, the determination coefficient ($R^2$) of between measured residual tensile strength and predicted values for residual strength prediction models using fracture toughness was estimated from 0.44 to 0.86. Especially, the proposed residual tensile strength prediction models were applied for the verification and reliability to CIPs and DIPs at 14 sites. The determination coefficient ($R^2$) between measured residual tensile strength and predicted values was estimated from 0.76 to 0.78. Therefore it was thought that the proposed residual tensile strength models could help to support resonable and economical decision of rehabilitation/replacement.