Fabrication of nanostructures using electron beam lithography and the morphology change of nanowire via etching processes (전자빔패턴을 이용한 나노구조물 형성과 에칭에 따른 나노선의 모양 변화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.17-18
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- 2005