• Title/Summary/Keyword: 실리콘 코팅

Search Result 265, Processing Time 0.028 seconds

Improvement of Electron Emission Characteristics and Emission Stability from Metal-coated Carbon Nanotubes (금속 코팅된 탄소나노튜브의 전계 방출 특성 및 신뢰성 향상)

  • Uh, H.S.;Park, S.;Kim, B.
    • Journal of the Korean Vacuum Society
    • /
    • v.20 no.6
    • /
    • pp.436-441
    • /
    • 2011
  • Metal coating with several nanometer thickness was applied on the carbon nanotubes (CNTs) in order to improve electron emission characteristics and emission reliability for the potential applications in the area of various electron sources and displays. CNTs were grown on the 2-nm thick Invar (52% Fe, 42% Ni, 6% Co alloy)-catalized Si substrate by using plasma-enhanced chemical vapor deposition at $450^{\circ}C$. In order to reduce the spatial density of densely packed CNTs, as-grown CNTs were partly etched back by $N_2$ plasma and subsequently coated with 5~150 nm thick Ti by a sputtering method. 5 nm thick Ti-coated CNTs produced four times higher emission current density at the electric field of 6 V/${\mu}m$ and much lower emission current fluctuation, compared with the as-grown CNTs. These improved emission properties are mainly due to not only the work function of Ti (4.3 eV) lower than that of pristine CNTs (5 eV), but also lower contact resistance and better adhesion between CNT emitters and substrate accomplished by Ti coating.

Effect of Oxygen Incorporation in the Fabrication of TiN Thin Film for Frame by UBM Sputtering System (UBM Sputtering System에 의한 안경테용 TiN막 제작에 있어 Oxygen 영향 연구)

  • Park, Moon Chan;Lee, Jong Geun;Joo, Kyung Bok;Lee, Wha Ja;Kim, Eung Soon;Choi, Kwang Ho
    • Journal of Korean Ophthalmic Optics Society
    • /
    • v.14 no.1
    • /
    • pp.63-68
    • /
    • 2009
  • Purpose: TiN films were deposited on sus304 by unbalanced magnetron sputtering system which was designed and developed as unbalancing the strength of the magnets in the magnetron electrode. The effect of oxygen incorporation in the fabrication of deposited films was investigated. Methods: The cross sections of deposited films on Silicon wafer were observed by SEM to measure the thickness of the films, the components of the surface of the films were identified by XPS survey spectra, the compositional depth-profile of deposited films was examined by an XPS apparatus. Results: From the data of XPS depth profile of films, it could be seen that the element O as well as the elements Ti and N present in the surface of the film and the relative percentage of the element O was constant at 65 at.% with respect to the depth of film. Conclusions: The color change with thickness of the films had something to do with the change of Ti $ 2p_{3/2}$ peak intensity and shape mixed of $ TiO_2$, TiN, $ TiO_{x}N_{y}$ compound.

  • PDF

산소 플라즈마로 표면 개질 된 Si-DLC 필름의 젖음각 거동

  • Lee, Jin-U;Mun, Myeong-Un;Lee, Gwang-Ryeol;Jeon, Yu-Taek
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.02a
    • /
    • pp.327-327
    • /
    • 2011
  • DLC 필름은 바이오 적합성, 특히 생체 적합성이 뛰어나기 때문에 바이오 코팅분야에서 널리 이용된다. 많은 연구 결과에 의하면 세포와 장기 등이 바이오 재료 표면에 적절히 접합할 수 있도록, 재료 표면을 산소나 질소를 이용하여 플라즈마 처리로 초친수성 표면으로 개질하고 있다. 하지만, 시간이 지남에 따라서 친수성 표면은 점차 재료의 표면 처리 전의 성질인 소수성을 회복하게 된다. D실제 생체에 적용하기 위해서 이러한 시효 효과에 대한 정확한 평가가 이루어져야 한다. 따라서 산소와 질소 플라즈마 처리 후의 친수성 성질이 소수성 성질로 변해가는 거동을 조사하는게 중요하다. 13.56 MHz의 plasma assisted chemical vapor deposition (PACVD) 법을 이용하여 DLC와 Si-DLC를 500 ${\mu}m$ 두께의 P-type 실리콘(100) 기판에 증착하였다. 박막 증착 과정에 사용한 기체는 벤젠과 희석된 silane이 사용되었다(SiH4/H2=10:90). 박막 증착은 -400 V의 바이어스 전압을 인가하였으며, 이때 증착 압력은 1.33Pa으로 일정하게 유지하여, 두께 $0.55{\pm}0.01{\mu}m$로 증착하였다. X-ray Photoelectron Spectroscopy (XPS) 법을 이용하여 실리콘 함량을 측정하였으며, 증착 된 Si-DLC의 실리콘 함량은 0~4.88 at. %였다. 이후에 질소와 산소 플라즈마를 이용하여 챔버 압력을 1.33 Pa로 유지하여, -400 V의 바이어스 전압을 인가하여 10분간 표면 처리를 하였다. 표면 처리된 DLC와 Si-DLC 표면 위에서의 물방울(water droplet)의 젖음각을 20일간 측정하였다. 플라즈마 표면 처리 된 모든 시편에서 초기 젖음각은 $10{\sim}20^{\circ}$의 친수성 성질을 보였지만, 점차 젖음각이 상승하여 산소 플라즈마 처리 된 Si-DLC를 제외하고는 5일이 지나면서 거의 소수성 표면으로 회복되었다. 산소 플라즈마 처리 된 Si-DLC의 경우, 젖음 각 측정 기간(20일) 동안 $15^{\circ}$ 미만의 친수성 성질을 유지하였다.

  • PDF

Observation of the silicon acrylate effect on the photo-polymerization reaction using micro raman spectroscopic technique (마이크로 라만을 사용한 실리콘 아크릴레이트가 광중합 반응에 미치는 영향 관찰)

  • Oh, HyangRim;Hong, Jin-Who;Yu, Jeong-A
    • Analytical Science and Technology
    • /
    • v.17 no.3
    • /
    • pp.225-229
    • /
    • 2004
  • The effect of the silicon acrylate as a reactive additive on the UV-curing photopolymerization reaction was studied by micro raman technique. For the study, acrylate systems and Darocur 1173 were used as oligomer and monomers, and a photo initiator, respectively. The content of silicon acrylate was within the range of 0-3 wt%. The extent of photo-polymerization reaction as a function of depth from the air interface was obtained from the conversion ratio of acrylate double bond calculated from the intensities of measured bands at $1410cm^{-1}$ and at $1635cm^{-1}$. Micro raman spectroscopic technique can be an useful tool for the investigation of the factors, which can affect the reaction progress, such as oxygen inhibition, composition of the formulations, depth, etc.

Evaluation of Concrtet Properties Using Silicon-Based Repellent (실리콘기반 침투강화제를 사용한 콘크리트의 내구특성 평가)

  • Hwang, Byoung-Il;Kim, Hyo-Jung;Lee, Byung-Jae
    • Journal of the Korean Recycled Construction Resources Institute
    • /
    • v.7 no.4
    • /
    • pp.295-301
    • /
    • 2019
  • Currently, the most commonly used decontamination agent in the country is calcium chloride, and the use of decontamination agents nationwide is on the rise due to climate change in the country. The deicing agent, aimed at deicing snow, is sprayed and the chloride is frozen and thawed by the dissolved surface water, causing various damages such as deterioration to the concrete. Therefore, in this study, the reactive urethane polymer was manufactured to coat concrete surface protection material, which is a method that prevents moisture from externally penetrating by applying to concrete surfaces, and the mixing agent was selected through the size control of molecules and surface modification, and the properties of penetrant stiffening agents and the application method of concrete was evaluated.

Solvent-assisted sealing of poly(methylmethacrylate) microchannel under mild conditions (용매를 이용한 Poly(methylmethacrylate)의 저온 저압 본딩 및 마이크로 채널 표면의 선택적 소수성 코팅기법 개발)

  • Lee, Jae-Seon;Lee, Nae-Yun
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2017.05a
    • /
    • pp.110-110
    • /
    • 2017
  • 마이크로 플루이딕 디바이스는 화학, 생물학 실험 및 생체 의학 진단을 위한 플랫폼으로 지난 20년간 그 사용 및 연구가 증가되어 왔다. 마이크로 플루이딕 디바이스를 제작하는 데 있어 가장 일반적으로 사용되는 재료는 실리콘이지만 비용이 많이 들고 불투명하므로 광학 검출이 필요한 곳에 적용이 제한된다. 이러한 측면에서 열가소성 플라스틱은 상업화의 중요한 요소인 대량 생산에 있어 큰 잠재력을 가지고 있으며 저렴하고, 가공이 쉽고, 유연하고, 광학적으로 투명하고, 화학적으로 불활성이며, 생체적합성을 가진다. 본 연구에서는 열가소성 플라스틱의 일종인 PMMA Poly(methylmethacrylate)를 효율적으로 접합하기 위해 비교적 낮은 온도와 낮은 압력에서 에탄올을 활용한 접착방식을 개발하였다. 먼저, PMMA 기판의 전체 표면을 $80^{\circ}C$에서 20 분 동안 에탄올로 처리한 후, $60^{\circ}C$에서 20 분간 열 압착하는 방식으로 영구적인 결합이 이루어졌다. 결합 강도 및 채널의 sealing 정도를 확인하기 위해, 인장 강도, 누수 및 파열 테스트를 수행하였다. 결합강도는 약 12.4 MPa로 타 연구와 비교할 때 매우 높았으며 마이크로 채널의 전체 내부 체적보다 거의 450 배 높은 강한 액체 흐름을 견딜 정도로 견고한 결합이 유지되었다. 열가소성 플라스틱의 본딩에 사용되는 유기 용매는 광학 특성을 희생시키지 않으면서 결합 속도를 높일 수 있지만, 결합 공정 중에 용매로 인해 마이크로 채널이 막히는 현상이 발생될 수 있다. 따라서, 견고한 본딩을 유지하면서 채널 막힘을 방지하기 위해 마이크로 채널을 소수성으로 선택적으로 처리하여 내벽의 표면 특성을 튜닝해 주는 기법을 추가로 적용하였다. 본 연구에서 사용한 방법은 아민-PDMS (polydimethylsiloxane) 링커를 적용하여 기판 표면의 극성을 변경시켜 주었다. 아민-PDMS 링커는 PC (polycarbonate), PET (polyethylene terephthalate), PVC (polyvinyl chloride) 및 PI (polyimide)와 같은 다양한 열가소성 플라스틱의 표면 소수성을 현저히 증가시키며 화학적, 열적 안정성이 뛰어나다. 아민-PDMS 링커는 PMMA의 카보닐 그룹과 반응할 수 있는 아민 사이드 그룹을 포함하는 PDMS 백본으로 구성되며 처리된 대상표면을 소수성으로 만든다. 아민-PDMS 링커 처리 이후 채널은 소수성으로 변화되었으며 이는 접촉각(contact angle)의 증가로 확인되었다. 코팅된 채널을 에탄올로 30분간 80도에서 처리하여도 소수성은 그대로 유지되어 마이크로 채널의 선택적인 소수성 코팅이 성공적으로 수행되었다.

  • PDF

Physical Properties of Covered Stent in Gastric Acid Environment: In Vitro Study (위산 환경에서 피막형 스텐트의 물성 변화)

  • Park, Sung Chul;Park, Nark-Soon;Kim, Dong-Gon;Nah, Jae-Woon;Jeen, Yoon Tae;Cho, Hye Jin;Kim, Eun Sun;Keum, Bora;Seo, Yeon Seok;Lee, Hong Sik;Chun, Hoon Jai;Um, Soon Ho;Kim, Chang Duck;Ryu, Ho Sang
    • Polymer(Korea)
    • /
    • v.38 no.3
    • /
    • pp.351-357
    • /
    • 2014
  • In membrane covered stent, occlusion and fracture from membrane degradation by gastric acid sometimes occurred. Therefore, we investigated the physical properties of membrane covered stent according to its ingredient and concentration in gastric acid environment. Membrane covered stents consisted of silicone and polyurethane with 15%, 18%, 20% concentrations were used. After incubating stents in a condition of pH 1.2, we checked any changes at every 3 weeks for 18 weeks. The changes of membrane surface, radial expansion and recovery force of stent were investigated. Coating thickness increased proportionally to an increase in ingredient concentration. Surface was evenly coated with silicone compared to the case with polyurethane and its homogeneity was excellent in a high concentration. Degradation was much severe in the case of polyurethane. The radial force of silicone was higher than polyurethane, and the decrease of radial and recovery force was higher in the case of polyurethane. In conclusion, high concentration of silicone membrane was more stable than polyurethane in acid environment of in vitro study.

Investigation on the Electrical Characteristics of mc-Si Wafer and Solar Cell with a Textured Surface by RIE (플라즈마기반 표면 Texturing 공정에 따른 다결정 실리콘 웨이퍼 표면물성과 태양전지 동작특성 연구)

  • Park, Kwang-Mook;Jung, Jee-Hee;Bae, So-Ik;Choi, Si-Young;Lee, Myoung-Bok
    • Journal of the Korean Vacuum Society
    • /
    • v.20 no.3
    • /
    • pp.225-232
    • /
    • 2011
  • Reactive ion etching (RIE) technique for maskless surface texturing of mc-silicon solar wafers has been applied and succeed in fabricating a grass-like black-silicon with an average reflectance of $4{\pm}1%$ in a wavelength range of 300~1,200 nm. In order to investigate the optimized texturing conditions for mass production of high quantum efficiency solar cell Surface characteristics such as the spatial distribution of average reflectance, micrscopic surface morphology and minority carrier lifetime were monitored for samples from saw-damaged $15.6{\times}15.6\;cm^2$ bare wafer to key-processed wafers as well as the mc-Si solar cells. We observed that RIE textured wafers reveal lower average reflectance along from center to edges by 1% and referred the origin to the non-uniform surface structures with a depth of 2 times deeper and half-maximum width of 3 times. Samples with anti-reflection coating after forming emitter layer also revealed longer minority carrier lifetime by 40% for the edge compared to wafer center due to size effects. As results, mc-Si solar cells with RIE-textured surface also revealed higher efficiency by 2% and better external quantum efficiency by 15% for edge positions with higher height.

Low-Temperature Crystallization of Amorphous Si Films by Cu Adsorption (구리 흡착에 의한 비정질 실리콘 박막의 저온 결정화 거동)

  • Jo, Seong-U;Son, Dong-Gyun;Lee, Jae-Sin;An, Byeong-Tae
    • Korean Journal of Materials Research
    • /
    • v.7 no.3
    • /
    • pp.188-195
    • /
    • 1997
  • Copper ions were adsorbed on amorphous Si films by spincoating of Cu solutions and were employed as surface nucleation sites for low-temperature crystallization. The crystallization temperature can bc lo~vered down to $500^{\circ}C$ and rhe crystallization time can be shortened by Cu adsorption. The Cu-adsorbed amorphous films were crystallized by fractal growth with the shape of tree branches. The fractal size ranged from $30 to 300{\mu}m$, depending on the Cu solution concentration. The fractals consisted of f e a t h e r like elliptical grains with the size of $0.3~0.4{\mu}m$. which was comparable to that of the intrinsic films crystallized at $600^{\circ}C$. Both the nucleation activation energy and grotvth activation energy decreased as the Cu concentration in the solution increased. The results suggest thcit the adsorbed Cu increases preferred nucleation sites at the surface and enhmces crystallization by reducing thc activation energies of nucleation and growth.

  • PDF

Evaluation of Elution Characteristics by Material for Kitchen Utensils - Focusing on the Metallic Kitchen Utensils (유통 주방기구의 재질별 용출 특성 평가 -금속제 주방기구 중심으로-)

  • Kim, Jae-Kwan;Im, Kyung-Sook;Kim, Myung-Gil;Park, Sung-Hee;Seo, Mi-Young;Lee, Yu-Na;Kim, Jung-Sun;Ku, Eun-Jung;Chae, Sun-Young;Park, Yong-Bae;Yoon, Mi-Hye
    • Journal of Food Hygiene and Safety
    • /
    • v.36 no.1
    • /
    • pp.51-59
    • /
    • 2021
  • In this study we analyzed the elution rates of 11 metals from 82 metallic kitchen utensils purchased in the market. The elution frequency of the 11 types of metals was iron > aluminum > chromium, nickel > zinc > copper > lead > arsenic > antimony > stannum > cadmium. For metallic kitchen utensils, the elution rate of heavy metals was 7.3-93.9%, and the average elution concentration was 0.001-13.473 mg/L. The average elution concentration of heavy metals was ranged between none-detected (N. D.) to 30.473 mg/L for non-coated kitchen utensils and 0.000-10.005 mg/L for coated kitchen utensils. The average elution concentration of metals from domestic kitchen utensils ranged from 0.001-25.145 mg/L, and from 0.000-33.518 mg/L for imported kitchen utensils. In particular, aluminum was found to be high in domestic kitchen utensils while iron was high in imported kitchen utensils. The average elution concentration of heavy metals was N.D.-2.670 mg/L for stainless steel, N.D.- 31.575 mg/L for aluminum, and N.D.-307.737 mg/L for iron. The amount of transition to food after cooking was investigated.