• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.7
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• pp.568-574
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• 2000

We have been optimized tungsten(W) plug CMP(chemical mechanical polishing) characteristics using two different kinds of component of slurry and two different kinds of pad which have different hardness. The comparison of oxide film roughness on around W plug after polishing has been carried out. And W plug recess for consumable sets and dishing effect at dense area according to the rate of over-polishing has been investigated. Also the analysis of residue on surface after cleaning have been performed. As a experimental result we have concluded that the consumable set of slurry A and hard pad was good for W plug CMP process. After decreasing the rate of chemical reaction of silica slurry and adding two step buffering we could reduce the expanding of W plug void however we are still recognizing to need a more development for those kinds of CMP consumables.

• Applied Chemistry for Engineering
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• v.8 no.5
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• pp.830-836
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• 1997

The surface modification of iron oxide particle produced from steel-pickled acid by sodium-contained materials was studied. The molar ratio of $SiO_2$ to $Na_2O$ of sodium silicate was 1, 2, 3.5, respectively. The dispersion stability of iron oxide suspension as functions of amount of silica and pH was evaluated by surface charge and sedimentation velocity of iron oxide particle. Then the amount of sodium silicate was determined to provide a dispersion stability of iron oxide particle above pH 7. Finally, the surface modification of iron oxide particle with sodium silicate as silica-contained materials was done by wet ball milling. In the results of study, the dispersion stability of silica modified iron oxide particle was largely depended on amount of silica and pH together. The untreated iron oxide was unstable at pH 8, i.e. isoelectric point, but, the surface modified iron oxide particle with 0.8wt% silica was stable above pH 5. The dispersion stability was enhanced with 0.2wt% of anionic polyelectrolyte.