• Journal of Korean Society of Environmental Engineers
• /
• v.35 no.5
• /
• pp.356-362
• /
• 2013

An attempt has been made to optimize elongated rotating arc plasma $NH_3$ scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce $NH_3$ as byproduct and efficient dry process for the decomposition of $NH_3$ is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the $NH_3$ decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of $NH_3$ decomposition.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.5
• /
• pp.284-293
• /
• 2016

One of the most efficient procedures for the solution of partial differential equations is the method of differential quadrature. The differential quadrature method (DQM) has been applied to a large number of cases to overcome the difficulties of complex algorithms of computer programming, as well as the excessive use of storage due to the conditions of complex geometry and loading. The in-plane vibrations of curved beams with extensibility of the arch axis, including the effects of rotatory inertial and shear deformation, are analyzed by the DQM. The fundamental frequencies are calculated for members with various slenderness ratios, shearing flexibilities, boundary conditions, and opening angles. The results are compared with the numerical results obtained by other methods for cases in which they are available. The DQM gives good mathematical precision even when only a limited number of grid points is used, and new results according to diverse variations are also suggested.