• Journal of the Korean Institute of Gas
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• v.21 no.6
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• pp.88-95
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• 2017

The usage of toxic gas in Korea is increasing in the development of high-tech industries such as semiconductors, displays and solar panels. The recent survey of domestic toxic gas consumption indicates an increase in annual average of 12.4 percent, but it is still focused on usage, and it is negligent in safety and treating the post. In September 2012, an accident occurred in Gu-mi involving hydrofluoric acid leak demonstrates the absence of safety management. Due to the incident, the government, industry and academia have been interested in chemical substances(toxic gas), and the government-led safety management has been established and implemented, but there are still a lot of safety blind spots. The purpose of this study is to develop effective measurement methods for the destruction or removal efficiency of gaseous materials emitted from the Scrubber used in the semiconductor and display industries. Also, this study demonstrated how toxic gas facilities can be applied without error by verification test for the measurement method guideline of the destruction or removal efficiency of the green-house gas reduction facility in the semiconductor and display industries used by the National Institute of Environmental Research and the UNFCCC, and suggested the differentiated measurement methods for toxic gas reduction facilities, and the third party certification for safety facilities is needed to prevent toxic gas accidents.