• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.7-15
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• 2003

Spinning Rotor Gauge (SRG) has been used to transfer standard gauge for international comparison at the high vacuum standards. We calibrated a spinning rotor gauge by using dynamic calibration system (DCS) that was a national high vacuum standards system. And its uncertainties were evaluated with the International Organization for Standardization (ISO), they were recognized ai A type uncertainty, B type uncertainty, combined Standard uncertainty, and expanded uncertainty. The combined standard uncertainties were $1.8007\times10^{-5}$ Pa ~ ~$4.8422\times10^{-5}$ Pa for this spinning rotor gauge.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.186-194
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• 2005

A Spinning Rotor Gauge was calibrated between $4.04\times10^{-3}$ Pa and $1.11\times10^{-2}$ Pa at the high vacuum standard by static expansion method. The results were analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The expanded uncertainty was $3.0035\times10^{-3}$ Pa at $7.5448\times10^{-3}$ Pa. $95\%$ confidence level, and coverage factor of k = 1.