• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.6
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• pp.276-281
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• 2021

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y₂O₃ and YF₃ as raw materials. Mixing ratio of the Y₂O₃ and YF₃ was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.4
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• pp.153-157
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• 2023

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we mixed AlF₃ powder with the solid-state reacted yttrium oxyfluoride (YOF) in order to increase plasma-etching resistance of the plasma spray coated YOF layer. Effects of the mixing ratio of AlF₃ with YOF powder on crystal structure, microstructure and chemical composition were investigated using XRD and FE-SEM. The plasma-etching ratios of the plasma-spray coated layers were calculated and correlation with AlF₃ mixing ratio was analyzed.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1144-1148
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• 2012

Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

• Korean Journal of Materials Research
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• v.32 no.10
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• pp.442-447
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• 2022

Sealing treatment is a post-surface treatment of the plasma spray coating process to improve the corrosion resistance of the coating material. In this study, the effect of the sealing on the corrosion resistance and adhesive strength of the plasma spray-coated alumina coatings was analyzed. For sealing, an epoxy resin was applied to the surface of the coated specimen using a brush. The coated specimen was subjected to a salt spray test for up to 48 hours and microstructural analysis revealed that corrosion in the coating layer/base material interface was suppressed due to the resin sealing. Measurement of the adhesive strength of the specimens subjected to the salt spray test indicated that the adhesive strength of the sealed specimens remained higher than that of the unsealed specimens. In conclusion, the resin sealing treatment for the plasma spray-coated alumina coatings is an effective method for suppressing corrosion in the coating layer/base material interface and maintaining high adhesive strength.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.678-678
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• 2013

은 나노선은 투명 금속전극으로 저온 공정이 가능하고, 플랙서블 기판에 사용 가능하여 다양한 분야의 응용 소재 연구가 진행 중에 있다. 본 연구에서는 전면 전극으로 은 나노선을 스프레이 코팅하고, 알루미늄 도핑된 산화아연(AZO)을 sputter로 증착하였다. 광 경로를 길게 하기 위해 AZO 기판을 수열합성법을 통해 산화아연 나노선을 성장하였다. 은 나노선 전극 기판과 산화아연 나노선이 성장된 기판의 광 투과도를 분석하기 위해 UV-visible을 이용하였으며, FE-SEM, AFM을 이용하여 각 기판의 형상을 분석하였다. 은 나노선은 500 nm 파장영역에서 투과도 86.93%, 면저항 16 ${\Omega}/{\square}$보였다. ITO 기판보다 400~600 nm 영역에서 헤이즈가 증가되는 것을 확인 할 수 있었다. 산화아연 나노선이 성장된 기판을 이용하여 P3HT:PCBM 블랜딩된 유기 태양전지를 제작하여 전기적 특성 및 효율을 평가하였다.

• Journal of ILASS-Korea
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• v.13 no.4
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• pp.193-199
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• 2008

Spray coating is a versatile surface modification technology in which coating is built-up based on the successive deposition of micron-scaled particles. Depending on the coating materials, the coatings can meet the required mechanical properties, corrosion resistance, and other properties of base materials. Spraying processes are mainly classified into thermal and kinetic spraying according to their bonding mechanism and deposition characteristics. Specifically, thermal spraying process can be further classified into many categories based on the design and mechanism of the process, such as frame spraying, arc spraying, atmospheric plasma spraying (APS), and high velocity oxygen-fuel (HVOF) spraying, etc. Kinetic spraying or cold gas dynamic spraying is a newly emerging coating technique which is low-temperature and high-pressure coating process. In this paper, overall view of thermal and kinetic spray coating technologies is discussed in terms of fundamentals and industrial applications. The technological characteristics and bonding mechanism of each process are introduced. Deposition behavior and properties of technologically remarkable materials are reviewed. Furthermore, industrial applications of spray coating technology and its potentials are prospected.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.382-383
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• 2008

In this paper we presented experimental results of a gas sensor utilizing multi-walled carbon nanotube (MWNT)composites for the alcohol detection which is useful to checking drinking and driving, for example. The MWNT-composites were deposited using spray method on PES substrates suitable for use in low-cost and flexible sensors. We observed the variation of conductance from the sensors exposed to alcohol vapors evaporated at 37C equal to the human body temperature to match real condition. As the result, the conductance was decreased with the increase of ethanol vol% diluted in water. The sensors showed good sensitivity and linearity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.241-241
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• 2004

프린팅 기법은 크게 젯팅(Jetting) 기법과 코팅(Coating) 기법으로 나눌 수 있는데, 이중 젯팅 기법은 액체 상태의 재료를 노즐을 통하여 분사하는 기법을 말하며, 그 방식으로는 전하제어형, 확산형, 자성 잉크형 등의 연속 방식, 피에조형, 전기열 변환형, 방전형, 고체잉크형, 정전흡입형 등의 DOD 방식, 잉크 미스트형, 스프레이형 등의 기타 방식으로 나누어 볼 수 있다. 젯팅 공정을 이용하여 폴리머 계열을 2차원 흑은 3차원 형상으로 제작하는 것은, 기존의 잉크젯 분사시스템을 수정 보완하는 것으로도 기술적으로 가능하다.(중략)

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.9
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• pp.783-788
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• 2008

We suggest a CNT-based gas sensor for breath alcohol measurement. The sensor was composed of single-walled carbon nanotubes (SWCNTs) thin film on flexible PES (polyethersulfone) substrate, and the SWCNTs thin film was formed by multiple spray-coating with SWCNTs solution which was well-dispersed, highly controlled and functionalized in ethanol solvent. In this work, three types of SWCNTs thin films were deposited with changes in the number of spray-coatings to 20, 40 and 60 times in order to compare electrical response properties of the SWCNTs thin films. from the fabricated sensors, conductance and capacitance responses were measured and discussed. Alcohol gas sensors have been commercialized widely as gauge for breath alcohol measurement which is applicable to checking whether car drivers are drinking-driving or not. Our alcohol gas sensors showed good sensitivity and linearity even at room temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.7
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• pp.550-554
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• 2013

Carbon nanotubes (CNT) / polyvinylidene fluoride (PVDF) piezoelectric composite films for nanogenerator devices were fabricated by spray coating method. When the CNT/PVDF mixture solution passes through the spray nozzle with small diameter by the compressed nitrogen gas, electric charges are generated in the liquid by a triboelectric effect. Then randomly distributed ${\beta}$ phase PVDF film could be re-oriented by the electric field resulting from the accumulated electrical charges, and might be resulted in extremely one-directionally aligned ${\beta}$ phase PVDF film without additional electric field for poling. X-ray diffraction patterns were used to investigate crystal structure of the CNT/PVDF composite films. It was confirmed that they revealed extremely large portion of the ${\beta}$ phase PVDF crystalline in the film. Therefore we could obtain the poled CNT/PVDF piezoelectric composite films by the spray coating method without additional poling process.