• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1018-1021
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the horizontal forces simultaneously as the probe tip of the equipment approaches to the interface between thin film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ∼ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester. the feasibility test was performed to evaluate the adhesive strength of semiconductor wafer.

• 대한기계학회논문집A
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• 제30권10호
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• pp.1179-1186
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• 2006

This paper was designed to assess the adhesive properties of hard coatings on non-nitrided and nitrided various tool steels. Estimations of adhesion were done to scratch test which is mainly used in hard coating. The critical load$(L_c)$ between coating and substrate is defined through analysis of frictional load vs. normal load curve, signals of acoustic emission and optical observations. Coatings employed in this study are TiN, CrN and TiAlN, tools as substrates are STD11, STD61 and SKH51. It was classified to substrates with/without intermediate nitrided layer and hard coatings on substrate were deposited by arc PVD. Results showed that harder substrates and coatings give higher values of critical loads.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.257-257
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• 2013

4세대 방사광가속기를 2014년 말 건설 완공 목표로 언듈레이터 시제품 제작하여 테스트 진행과정에 있다. 좁은 틈의 언듈레이터를 지나가는 펄스전자의 진행이 잘되려면 낮은 임피던스가 요구되는데, 전자의 진행을 방해하는 주요 요인으로 진공 표면 거칠기와 산화층 두께에 영향을 많이 받는다. 이러한 영향을 줄이기 위하여 연질의 알루미늄 6063-T6를 재료로 압출공정에 혼합가스를 주입하여 표면 산화를 최소화하였다. 본 실험은 6 m 압출형 진공용기에 압출공정만 거친 것과 유체연마 메디아 종류별, 크기별, 처리시간에 따른 표면개선 효과와 산화층 변화를 알아보았다. 그리고 최종 유체연마 메디아제거 과정에 경면 연마된 표면에 2차 스크레치가 발생하는 원인을 진단하고 이를 방지하기 위한 알코올 주입형 정압시스템을 개발한 것을소개한다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1448-1452
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin-film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the tangential forces simultaneously as the probe tip of the equipment approaches to the interface between thin-film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ${\sim}$ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester, the feasibility test was performed to evaluate the adhesive strength of thin-film.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.186-189
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• 2005

This paper was designed to assess the adhesive properties of hard coatings on non-nitrided and nitrided various tool steels. Estimations of adhesion were done to scratch test which is mainly used in hard coating. The critical load(Lc) between coating and substrate is defined through analysis of frictional load vs. normal load curve, signals of acoustic emission and optical observations. Coatings employed in this study are TiN, CrN and TiAlN, tools as substrates are STD11, STD61 and SKH51. It was classified to substrates with/without nitrided layer and hard coatings on substrate were deposited by arc PVD. Results showed that harder substrates and coatings give higher values of critical loads.