• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.130-130
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• 2004

본 논문에서는 RF 스위치의 엑추에이터로 사용하기 위한 수평구동형 박막형 PZT 엑추에이터의 설계, 제작 및 시험에 관한 것이다 기존의 RF 스위치들은 대부분 수직 방향의 접촉 방식을 채택하고 있고, 대부분 구조체가 두껍지 않은 막으로 이루어져 있어서, 엑추에이터로부터 힘을 충분히 전달받지 못한다. 이로 인해, 접촉력이 상대적으로 작게 되어, 접촉저항을 줄이기 위한 접촉압력을 내기 위해 접촉 면적을 줄일 수밖에 없게 된다. 따라서, 본 연구에서는 효과적인 힘의 전달이 가능한 수평방향의 접촉 방식과 상대적으로 큰 힘을 낼 수 있는 PZT 엑추에이터를 사용하고자 한다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.756-759
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• 2004

We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135$\mu$m, 20$\mu$m and 0.4$\mu$m, respectively. Dimensions of the silicon serpentine spring are thickness of 25$\mu$m, length of 300$\mu$m, and width of 5$\mu$m. The bellows actuator has been fabricated by SOI wafer with 25$\mu$m-top silicon and 1$\mu$m-buried oxide layer. The bellows actuator shows the maximum 3.93$\pm$0.2$\mu$m lateral displacement at 16V with 1Hz sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1Hz to 1kHz at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.