• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.165.2-165.2
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• 2016

빗각 증착이란 입사 증기가 기판에 수직하게 입사하는 일반적인 공정과는 다르게 증기가 기판의 수직선과 $0^{\circ}$이상의 각을 갖는 증착 방법을 의미한다. 본 연구는 공정 압력이 비교적 높은 스퍼터링 공정에서 빗각 증착을 실시하여 코팅층의 구조제어가 가능한지를 확인하였다. 본 연구에서는 조직의 치밀도 향상을 통한 특성 향상을 위해 TiN 박막을 제조함에 있어서 빗각 증착 기술을 응용하여 단층 및 다층 피막을 제조하고 그 특성을 비교하였다. 스퍼터 소스에 장착된 타겟의 크기는 6"이며, 99.5% Ti 타겟을 사용하였고, Ar 가스 분위기에서 기판으로 사용된 Si(100) 위에 코팅하였다. 기판과 타겟 간의 거리는 10 cm이며, 기판은 알코올과 아세톤으로 초음파 세척을 실시한 후 진공챔버에 장착하고 < $2.0{\times}10-5Torr$ 까지 진공배기를 실시하였다. 진공챔버가 기본 압력까지 배기되면 Ar 가스를 주입한 후 RF 파워에 약 300V의 전압을 인가하여 글로우 방전을 발생시키고 약 30분간 청정을 실시하였다. 기판의 청정이 끝난 후 다시 < $2.0{\times}10-5Torr$까지 진공배기를 한 후 Ar 가스를 주입하여 TiN 코팅을 실시하였다. 빗각 증착을 위한 기판의 회전각은 $70^{\circ}$, $80^{\circ}$와 $-70^{\circ}$, $-80^{\circ}$이며, TiN 박막의 총 두께는 약 $3.5{\sim}4{\mu}m$로 유지하였다. 스퍼터링을 이용한 TiN 박막의 빗각 증착 코팅을 실시하였으며, 공정조건에 따라 주상정이 자라는 모습과 기울어진 각도가 다른 구조를 갖는 박막이 제조되는 것을 확인할 수 있었다. 빗각증착을 실시하는 중에 기판 홀더에 약 -100 V의 전압을 인가하면 인가하지 않은 막에 비해 치밀한 박막이 성장한다는 사실을 확인하였다. 박막의 성능향상을 위하여 스퍼터 시스템에서 빗각 증착을 이용한 TiN 박막 형성을 실시하였다. SEM 단면 이미지에서 확인해본 결과 주상정이 자라는 형상이 공정 압력이 5 mTorr에서 2 mTorr로 낮아짐에 따라 상대적으로 치밀하면서 일정한 형태로 성장하는 것을 확인하였다. 본 연구를 통해 스퍼터링을 이용한 빗각 증착의 Structure Engineering 이 가능함을 확인하였으며 박막의 성능을 향상시키는 기술로서 응용 가능할 것으로 보인다.

• The Journal of Engineering Geology
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• v.2 no.1
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• pp.47-57
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• 1992

Geophysical methods applied to water seepage problem in earth-fill embankment attempt to detect and map the estimate of size and depth of the seepage path. Seepage zones generally produce lOW resistivity anomalies due to high saturation of water. Dipole-dipole resistivity surveying technique, which is actually a combined sounding-profiling procedure, was used to delineate the seepage path through this study. In this study, the finite difference methods to solve the electric potential distribution in 2 112 dimension, was adopted as the numerical scheme for the forward problem. Second order Marquart's method, one the iterative damped least square methods, was selected for the automatic inversion. The computer program was implemented in FORTRAN 77 for 1 6-bit personal computer. In this paper, we present a case history which illustrates the application of dipole-dipole resistivity method to the delineation of water flow in earth-fill structures. Also the automatic two-dimensional resistivity inversion was applied to a field data where the interpretive advantages of the program become evident.

• Journal of the Korean Society of Groundwater Environment
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• v.4 no.4
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• pp.185-190
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• 1997

Electrical surveys were conducted at the Seokdae waste landfill in July,1996. Within the landfill, 4 lines of dipole-dipole surveys and 7 Schlumberger soundings were carried out and 2 soundings in front of the landfill. In the landfill, interpretations of the survey data show low resistivity zones below 10 Ωm to a depth of 50 m from the surface and such low resistivity zones of the D block are thicker than those of the other blocks by about 2~10 m. Considering the depth of the bedrock and the height of waste reclamation, no evidence of bedrock contamination by leachate is indicated. But it is inferred that the weathered zones are contaminated in the landfill. In the block A and B, minor fault having the strike of N$70^{\circ}$W have been confirmed by dipole-dipole surveys, so future contamination of the bedrock by leachate is possible The degree of ground contamination is the highest in the D block due to the leachate plume mainly heading for this block. On the other hand, electrical soundings do not indicate ground contamination by leachate in the front area of the landfill.

• Tunnel and Underground Space
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• v.21 no.3
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• pp.181-191
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• 2011

It is very difficult to prepare a lab. test specimen from weak rock masses affected by faults, highly fractured zone or weathered zone. In conventional method of in situ direct shear test a rock block is sheared inside galleries, where reactions for the hydraulic jacks are available. A new in situ direct shear test apparatus has been developed in this study to perform the test inside galleries as well as open pit conditions. The apparatus is composed of normal and shear reaction plates including load transfer plates, hydraulic cylinder systems, load cells, multistage shear boxes with fixing devices, and needle rollers. Maximum size of the test block is $400{\times}400{\times}460$ mm, and procedures of the test block preparation has been suggested. To explore the field applicability of in situ direct shear test apparatus, proper test block site was investigated by extensive geological field survey. In situ direct shear test has been successful in producing most of information related to strength and deformability of the weak rock.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.456-456
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• 2011

최근 차세대 디스플레이, 터치스크린, 전자파 차폐 및 흡수 등의 다양한 응용분야에 적합한 소재를 개발하기 위한 연구가 진행되고 있다. 현재 주로 사용되는 ITO박막은 희소원소인 인듐의 매장량 한계와 높은 비용이 문제시 되고 있기 때문에, 대체 재료의 개발이 시급하게 요구되고 있다. 탄소나노튜브(CNT)는 금속을 능가하는 이론적인 전기전도도를 갖고 있으며 높은 탄성등의 우수한 기계적 성질을 갖고 있어 다양한 차세대 응용에 있어서 최적의 재료로 주목을 받고 있다. 특히, CNT 기반의 투명전도막은 기존의 ITO 박막 보다 우수한 유연성이 기대되어 더욱 기대를 모으고 있다. 본 연구에서는, 최종 고순도 재료를 얻기까지 합성 및 정제에 많은 공정과 시간이 요구되는 고가의 단층벽 나노튜브(SWNT)를 이용하지 않고, 웨이퍼 기판 위에 수직배향 합성한 상태의 다층벽 나노튜브(MWNT)를 별도의 정제과정 없이 초음파 분산한 뒤, 스프레이 코팅법을 이용하여 고분자 기판 위에 투명전도막을 제작하였고, 이때 각기 다른 길이의 수직배향 MWNT를 이용하여 유연성 투명전도막의 전기적 특성에 미치는 MWNT 길이의 영향에 대해 알아보았다. MWNT는 아세틸렌가스를 이용하여 열CVD법으로 합성하였고, 합성시간을 제어함으로써 길이가 다른 MWNT를 얻을 수 있었다. 투명전도막 제조공정의 단순화를 위하여 이용한 MWNT의 초음파 분산 결과, $500{\mu}m$ 이하 길이의 MWNT에서 분산성이 현저히 빨라지는 것을 확인하였다. 한편, 제작한 MWNT 기반의 유연성 투명전도막은 원자간힘현미경 및 면저항 측정기를 이용하여 막 두께에 따른 면저항 특성을 조사하였다. 그 결과 응용 가능한 면저항을 갖는 MWNT 투명전도막의 두께는 최소 50 nm 이상이어야 함을 알았고, 특히 MWNT등의 접촉점(node) 수에 따른 접촉저항 및 전기전도경로(electric conductivity path)를 고려했을 때 최적의 MWNT 길이가 존재하는 것을 확인하였다.

• The Journal of the Petrological Society of Korea
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• v.23 no.3
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• pp.261-272
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• 2014

Over the last three decades, advances in AMS (Accelerator Mass Spectrometry) and Noble Gas Mass Spectrometer make various application of terrestrial cosmogenic nuclides (CNs) to wide range of earth surface sciences possible. Dating techniques can be divided into three sub-approaches: simple surface exposure dating, depth-profile dating, and burial dating, depending on the condition of targeted surfaces. In terms of Korean landscape view, CNs dating can be applied to fluvial and marine terrace, alluvial fan, tectonic landform (fault scarp and faulted surfaces), debris landforms such as rock fall, talus, block field and stream, lacustrine and marine wave-cut platform, cave deposits, Pliocene basin fill and archaeological sites. In addition, in terms of lithology, the previous limit to quartz-rich rocks such as granite and gneiss can be expanded to volcanic and carbonate rocks with the help of recent advances in CNs analysis in those rocks.

• The Journal of Korean Society for Radiation Therapy
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• v.21 no.2
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• pp.89-95
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• 2009

Purpose: The purpose is to evaluate efficiency of the CT simulator QA phantom manufactured for daily QA. Materials and Methods: We made holes ($1{\times}100{\times}1\;mm$) to verify accuracy between image and real measurement in polystyrene phantom and made 1 mm holes to verify table movement accuracy at superior and inferior 100 mm to the center of the phantom and inserted radiopacity material. To evaluate laser alignment, we made cross mark on the right and left side at phantom and to evaluate CT number accuracy we made 3 cylindrical holes and inserted equivalence material of bone, water, air in them. After CT scanning the phantom, We evaluated accuracy between image and real measurement, accuracy of table movement, laser, and CT number using exposed image. Results: It was measured that the accuracy between image and real measurement was ${\pm}0.3\;mm$, table movement accuracy was ${\pm}0.3\;mm$, laser accuracy was ${\pm}0.5\;mm$ from 7th January to 7th March in 2008 as within the reference point ${\pm}1\;mm$. In the CT number accuracy of bone was ${\pm}10\;HU$, air was ${\pm}5\;HU$, water was ${\pm}5\;HU$ as within the reference point is ${\pm}10\;HU$. Conclusion: We was able to perform CT simulator QA and laser equipment QA more conveniently and fast using manufactured phantom at the same time. We will be able to make more accurate treatment plan that added to QA procedures using images at previous daily QA.

• Economic and Environmental Geology
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• v.48 no.4
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• pp.313-324
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• 2015

This study constructed a 3D geological model for Uggi Nuur Fe-Mn mineralization zone in Mongolia, and the 3D geological distribution is cross-analyzed with magnetic anomaly distribution to figure out relationship between ore zone and subsurface geology. As a result of 4 step 3D modeling procedures including geological cross section, surface modeling, foliation modeling and solid modeling, the geology of the both study area is bordered by faults in NW direction with Munguntessj formation being located in the west side of the fault while Yashill formation is located on the other side of the fault. Moreover, the strike direction of foliation in the both formation shows same directional pattern with the NW faults. The magnetic anomaly distribution reveals that higher anomaly values are concentrated to near the ground surface. The analyses of 3 dimensional distribution between subsurface geology and magnetic anomaly indicates that higher anomaly is mainly distributed over the Munguntessj formation as a elongated lens bodies whereas the magnetic anomaly is evenly found in the both of Munguntessj formation and Yashill formation in the study area 2. It infers that volcanic activities associated mineralization occurred during silurian period, and the mineralized zone is thought to be realigned along the geological structures caused by later stage tectonic activities.

• The Journal of Engineering Geology
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• v.20 no.3
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• pp.329-338
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• 2010

The foundation area for tram contains biotite gneiss, quartzo-feldspathic gneiss, calc-silicate rock, and porphyroblastic gneiss of the pre-Cambrian Kyeonggi gneiss complex. These rocks record at least three stages of deformation, as indicated by fold sets of contrasting orientations (D1-D3). Joints are generally steeply dipping and strike NW-SE to WNW-ESE. The Gonjiam Fault, which strikes WNW-ESE, follows a river in the area. The fault possesses a 3-m-wide fracture zone, a 10-m-wide damage zone, and is 15 km long. Two tunnels have been constructed through the biotite gneiss. The geometric relationship between discontinuities (e.g., joints and foliation) and tunneling direction reveals that set 3 of the AA tunnel is unstable but that BB tunnel is relatively safe.

• The Journal of the Petrological Society of Korea
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• v.11 no.2
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• pp.65-73
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• 2002

The wavy extinction of quartz grains can be used as a good indicator to show the degree of rock deformation. To determine degree of the rock deformation, intensity of wavy extinction (IWE) of quartz grains was measured by using polarizing microscope, digital camera, and NIH image (or Scion Image). In this experiment, the measurement was performed along the line perpendicular to the subgrain boundary of wavy extinction. IWE was measured when a quartz grain shows maximum extinction in polarizing microscope. NIH image was represented in terms of 256 gray-scale brightness, which was associated with intensity of the wavy extinction. IWE was determined by the degree of brightness versus the measuring length of a quartz grain. IWE was analysed in the distribution chart with the collection unit of 5. Regarding the characteristics of data distribution, the median between the mode and the median of the histogram is defined as a representative value for the IWE, and this value is subdivided into the five levels of rock deformation zones (lowest- or non-, low-, medium-, high-, and highest deformation) with their respective indices (D1, D2, D3, D4, and D5). The correlation between the Eonyang Granite and the Yangsan Fault was investigated by using the indices. The results indicate that IWE values decreased away from the fault.