• Title/Summary/Keyword: 센서 플랫폼

Search Result 723, Processing Time 0.033 seconds

진공공정 실시간 측정 기술 개발 동향

  • Sin, Yong-Hyeon;Hong, Seung-Su;Im, In-Tae;Seong, Dae-Jin;Im, Jong-Yeon;Kim, Jin-Tae;Kim, Jeong-Hyeong;Gang, Sang-U;Yun, Ju-Yeong;Yu, Sin-Jae
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.02a
    • /
    • pp.28-28
    • /
    • 2011
  • 우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

  • PDF

Upward, Downward Stair Detection Method by using Obliq ue Distance (사거리를 이용한 상향, 하향 계단 검출 방법)

  • Gu, Bongen;Lee, Haeun;Kwon, Hyeokmin;Yoo, Jihyeon;Lee, Daho;Kim, Taehoon
    • Journal of Platform Technology
    • /
    • v.10 no.2
    • /
    • pp.10-19
    • /
    • 2022
  • Moving assistant devices for people who are difficult to move are becoming electric-powered and automated. These moving assistant devices are not suitable for moving stairs at which the height between floor surfaces is different because these devices are designed and manufactured for flatland moving. An electric-powered and automated moving assistant device should change direction or stop when it approaches stairs in a movement direction. If the user or automatic control system does not change direction or stop in time, a moving assistant device can roll over or collide with stairs. In this paper, we propose a stairs detection method by using oblique distance measured by one sensor tilted to flatland. The method proposed in this paper can detect upward or downward stairs by using a difference between a predicted and measured oblique distance in considering a tilted angle of a sensor for measuring an oblique distance and installation height of the sensor on a moving object. Before the device enters a stairs region, if our proposed method provides information about detected stairs to a device's controller, the controller can do adequate action to avoid the accident.

The new explore of the animated content using OculusVR - Focusing on the VR platform and killer content - (오큘러스 VR (Oculus VR)를 이용한 애니메이션 콘텐츠의 새로운 모색 - VR 플랫폼과 킬러콘텐츠를 중심으로 -)

  • Lee, Jong-Han
    • Cartoon and Animation Studies
    • /
    • s.45
    • /
    • pp.197-214
    • /
    • 2016
  • Augmented Reality, virtual reality in recently attracted attention throughout the world. and Mix them mixed reality etc., it has had a significant impact on the overall pop culture beyond the scope of science and technology. The world's leading IT company : Google, Apple, Samsung, Microsoft, Sony, LG is focusing on development of AR, VR technology for the public. The many large and small companies developed VR hardware, VR software, VR content. It does not look that makes a human a human operation in the cognitive experience of certain places or situations or invisible through Specific platforms or program is Encompass a common technique that a realization of the virtual space. In particular, out of the three-dimensional image reveals the limitations of the conventional two-dimensional structure - 180, 360 degree images provided by the subjective and objective symptoms such as vision and sense of time and got participants to select it. VR technology that can significantly induce the commitment and participation is Industry as well as to the general public which leads to the attention of colostrum. It was introduced more than 10 related VR works Year 2015 Sundance Film Festival New Frontier program. The appearance VR content : medical, architecture, shopping, movies, animations. Also, 360 individuals can be produced by the camera / video sharing VR is becoming an interactive tunnel between two possible users. Nevertheless, This confusion of values, moral degeneration and the realization of a virtual space that has been pointed out that the inherent. 4K or HUD, location tracking, motion sensors, processing power, and superior 3D graphics, touch, smell, 4D technology, 3D audio technology - It developed more than ever and possible approaches to reality. Thereafter, This is because the moral degeneration, identity, generational conflict, and escapism concerns. Animation is also seeking costs in this category Reality. Despite the similarities rather it has that image, and may be the reason that the animation is pushed back to the VR content creation. However, it is focused on the game and VR technology and the platform that is entertaining, but also seek new points within the animation staying in the flat Given that eventually consist of visual images is clear that VR sought. Finally, What is the reality created in the virtual space using VR technology could be applied to the animation? So it can be seen that the common interest is research on what methods and means applied.

Design to Realtime Test Data Topic Utilize of Data Distribution Service (데이터 분산 서비스를 활용한 실시간 시험자료 토픽 설계)

  • Choi, Won-gyu
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.21 no.7
    • /
    • pp.1447-1454
    • /
    • 2017
  • The realtime test data topic means that process for the data efficiently from many kinds of measurement device at the test range. There are many measurement devices in test range. The test range require accurate observation and determine on test object. In this realtime test data slaving framework system, the system can produce variety of test informations and all these data also must be transmitted to test information management or display system in realtime. Using RTI DDS(Data Distribution Service) middle ware Ver 5.2, we can product the efficiency of system usability and QoS(Quality of Service) requirements. So the application user enables to concentrate on applications, not middle ware. As the reason, Complex function is provided by the DDS, not the application such as Visualization Software. In this paper, I suggest the realtime test data topic on slaving framework of realtime test data based on DDS at the test range system.

A Study on Integrated Platform for Prevention of Disease and Insect-Pest of Fruit Tree (특용과수의 병해충 및 기상재해 방지를 위한 통합관리 플랫폼 설계에 대한 연구)

  • Kim, Hong Geun;Lee, Myeong Bae;Kim, Yu Bin;Cho, Yong Yun;Park, Jang Woo;Shin, Chang Sun
    • KIPS Transactions on Computer and Communication Systems
    • /
    • v.5 no.10
    • /
    • pp.347-352
    • /
    • 2016
  • Recently, IoT technology has been applied in various field. In particular, the technology focuses on analysing large amount of data that has been gathered from the environmental sensors, to provide valuable information. This technique has been actively researched in the agro-industrial sector. Many researches are underway in the monitoring and control for growth crop environment in agro-industrial. Normally, the average weather data is provided by the manual agro-control method but the value may differ due to the different region's weather and environment that may cause problem in the disease and insect-pest prevention. In order to develop a suitable integrated system for fruit tree, all the necessary information is obtained from the Jeollanam-do province, which has the high production rate in the Korea. In this paper, we propose an integrated support platform for the growing crops, to minimize the damage caused due to the weather disaster through image analysis, forecasting models, by using the micro-climate weather information collection and CCTV. The fruit tree damage caused by the weather disaster are controlled by utilizing various IoT technology by maintaining the growth environment, which helps in the disease and insect-pest prevention and also helps farmers to improve the expected production.

Design of Embodiment-based Programming Education using Arduino for Middle School Students (중학생을 대상으로 한 아두이노를 활용한 체현 기반 프로그래밍 교육 설계)

  • Eom, Hyun-Young;Lee, Kang-Hee
    • The Journal of the Convergence on Culture Technology
    • /
    • v.6 no.1
    • /
    • pp.471-476
    • /
    • 2020
  • We propose an practical embodiment-based programming training course for middle school students using Arduino and conduct survey before and after the curriculum. Arduino is an open source physical computing platform that integrates the IDE used in processing language. It is a low-cost, relatively simple I/O interface compared to other platforms, and because of its practical formability, it is educational material suitable for programming. Subsequent surveys will provide feedback on changes in cognition of programming needs and improvement in thinking skills. In this study, the program based on embody-based programming using Arduino was conducted for 8 weeks for each first grade, and 112 middle school students for two years from '16 to '17. Based on the theoretical and practical training, the training was based on the application of the ultrasonic sensor to the RC car and the preparation of the adduction quadrotor drone. The purpose of this study is to prove that the recognition, necessity, and programming education of middle school students are effective for the improvement of thinking ability through the program based on embody-based programming using Arduino.

Development of IoT-Based Disaster Information Providing Smart Platform for Traffic Safety of Sea-Crossing Bridges (해상교량 통행안전을 위한 IoT 기반 재난 정보 제공 스마트 플랫폼 개발)

  • Sangki Park;Jaehwan Kim;Dong-Woo Seo
    • Journal of Korean Society of Disaster and Security
    • /
    • v.16 no.1
    • /
    • pp.105-113
    • /
    • 2023
  • Jeollanam-do has 25 land-to-island and island-to-island bridges, the largest number in Korea. It is a local government rich in specialized marine and tourism resources centered on the archipelago and the sea bridges connecting them. However, in the case of sea-crossing bridges, when strong winds or typhoons occur, there is an issue that increases anxiety among users and local residents due to excessive vibration of the bridge, apart from structural safety of the bridge. In fact, in the case of Cheonsa Bridge in Shinan-gun, which was recently opened in 2019, vehicle traffic restrictions due to strong winds and excessive vibrations frequently occurred, resulting in complaints from local residents and drivers due to increased anxiety. Therefore, based on the data measured using IoT measurement technology, it is possible to relieve local residents' anxiety about the safety management of marine bridges by providing quantitative and accurate bridge vibration levels related to traffic and wind conditions of bridges in real time to local residents. This study uses the existing measurement system and IoT sensor to constantly observe the wind speed and vibration of the marine bridge, and transmits it to local residents and managers to relieve anxiety about the safety and traffic of the sea-crossing bridge, and strong winds and to develop technologies capable of preemptively responding to large-scale disasters.

A Construction of Active Home Service System Environment Supporting Both Real-Time Location Tracking and Information Appliance Control and Its Application (실시간 위치추적 및 정보가전제어를 지원하는 능동형 홈 서비스 시스템 환경 구축 및 응용)

  • 장재호;임정택;신창선;김남균;주수종
    • Proceedings of the Korean Information Science Society Conference
    • /
    • 2004.10c
    • /
    • pp.631-633
    • /
    • 2004
  • 본 논문에서는 유비쿼터스 홈 네트워킹 환경에서 사용자의 위치 이동을 실시간 추적하고 가정 내 주거 활동의 편의를 제공하는 정보가전기기들을 제어할 수 있는 능동형 홈 서비스 시스템을 제안한다. 본 시스템은 다계층의 분산시스템 환경으로 구성된다. 즉, 물리 센서와 정보가전기기 등이 존재하는 물리층과 유/무선 지원 인터넷/인트라넷 통신 플랫폼을 포함하는 시스템층, 그리고 물리적 장치들로부터 시스템층을 통해 들어오는 정보를 처리하는 응용층으로 구성되며 실 생활 공간 및 시간을 응용 시뮬레이션 환경으로 반영시킨다. 능동형 홈 서비스 시스템의 개발 목적은 실버아파트에서 독거노인의 위치기반 건강관리 정보 서비스 및 아파트 내 정보가전기기들의 맞춤형 제어를 제공하기 위함이다. 이와 같은 시스템을 구축하기 위해서는 홈 네트워크 내에서 사용자의 이동 위치를 파악하는 실시간 위치추적 기술과 정보가전기기들의 동작을 실시간 제어하기 위한 기술이 요구된다. 제안한 시스템에서는 UC at Irine의 DREAM Lab.에서 개발한 TMO(Time-triggered Message -triggered Objecl) 스킴을 적용하여 각 물리 센서와 정보가전기기들을 응용의 구성요소로 개발했다. 이를 통해 가정 내에 이동하는 TMO로 매핑된 이동객체를 추적하고 또한 홍 네트워크로 연결된 정보가전기기들을 정보가전 TMO 동작객체로 매핑하여 이들 사이의 능동적인 상호동작을 통해 맞춤형 서비스 및 실시간 제어가 가능하도록 했다. 마지막으로, 실시간 위치추적 및 정보가전제어 응용 시뮬레이션을 통해 능동형 홈 서비스 시스템을 구성하는 개별 동작객체들의 기능성과 수행성을 검증했다.황에 대하여 소개한다.이스는 실험정보가 저장된 데이터베이스, 분석결과가 저장된 데이터베이스, 그리고 유전자 정보 탐색을 위한 데이터베이스로 분류해 데이터를 효율적으로 관리할 수 있게 하였다. 본 시스템은 LiNUX를 운영체계로 하고 데이터베이스는 MYSQL로 하여 JSP, Perl. 통계처리 언어인 R로 구현되었다.프트웨어를 사용하지 않고도 국내의 순수 솔루션인 리눅스 기반의 LonWare 3.0 다중 바인딩 기능을 통해 저 비용으로 홈 네트워크 구성 관리 서버 시스템 개발에 대한 비용을 줄일 수 있다. 기대된다.e 함량이 대체로 높게 나타났다. 점미가 수가용성분에서 goucose대비 용출함량이 고르게 나타나는 경향을 보였고 흑미는 알칼리가용분에서 glucose가 상당량(0.68%) 포함되고 있음을 보여주었고 arabinose(0.68%), xylose(0.05%)도 다른 종류에 비해서 다량 함유한 것으로 나타났다. 흑미는 총식이섬유 함량이 높고 pectic substances, hemicellulose, uronic acid 함량이 높아서 콜레스테롤 저하 등의 효과가 기대되며 고섬유식품으로서 조리 특성 연구가 필요한 것으로 사료된다.리하였다. 얻어진 소견(所見)은 다음과 같았다. 1. 모년령(母年齡), 임신회수(姙娠回數), 임신기간(姙娠其間), 출산시체중등(出産時體重等)의 제요인(諸要因)은 주산기사망(周産基死亡)에 대(對)하여 통계적(統計的)으로 유의(有意)한 영향을 미치고 있어 $25{\sim}29$세(歲)의 연령군에서, 2번째 임신과 2번째의 출산에서 그리고 만삭의 임신 기간에, 출산시체중(出産時體重) $3.50{\

  • PDF

Analysis Results in Technological Trends of Military Small Giant Venture Tech-Fi Net via Social Network Analysis (사회연결망 분석을 이용한 국방 강소벤처 Tech-Fi Net 기술동향 분석)

  • Park, Jae Woo;Lee, Il Ro;Kwon, Jae Wook;Byun, Kisik;Cho, Sung-Yong
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.20 no.12
    • /
    • pp.444-455
    • /
    • 2019
  • The purpose of this research was to analyze technological trends of 「Military Small Giant Venture Tech-Fi Net」 from Defense Technology Information Service via social network analysis. 「Military Small Giant Venture Tech-Fi Net」, which was constituted for their fine technology for application to the military field, registered 847 technologies of 388 companies. In this research, we analyzed 847 technologies for the relations between "Military System" and "Military Technology Category" via centrality measurement, one of the social network analysis methods. The results indicate that the major technologies of domestic military small giant venture companies were "Sensor" and "ICT" for "C4I System" and "Surveillance and Reconnaissance System" and "Platform/Structure" for "Land System", "Aeronautical System" and "Naval Sea System". In contrast, we recognized inadequate technologies, such as "Propellant" and "Material" for "Missile and Ammunition system" and "Sensor" and "ICT" for "Defense System", We hope that our results and method will be conducive to the technological development of Small Giant Venture companies.

Ship Positioning Using Multi-Sensory Data for a UAV Based Marine Surveillance (무인항공기 기반 해양 감시를 위한 멀티센서 데이터를 활용한 선박 위치 결정)

  • Ryu, Hyoungseok;Klimkowska, Anna Maria;Choi, Kyoungah;Lee, Impyeong
    • Korean Journal of Remote Sensing
    • /
    • v.34 no.2_2
    • /
    • pp.393-406
    • /
    • 2018
  • Every year in the ocean, various accidents occur frequently and illegal fishing is rampant. Moreover, their size and frequency are also increasing. In order to reduce losses of life or property caused by these, it is necessary to have a means to perform remote monitoring quickly. As an effective platform of such monitoring means, an Unmanned Aerial Vehicle (UAV) is receiving the spotlight. In these situations where marine accidents or illegal fishing occur, main targets of monitoring are ships. In this study, we propose a UAV based ship monitoring system and suggest a method of determining ship positions using UAV multi-sensory data. In the proposed method, firstly, the position and attitude of individual images are determined by using the pre-performed system calibration results and GPS/INS data obtained at the time when images were acquired. In addition, after the ship being detected automatically or semi-automatically from the individual images, the absolute coordinates of the detected ships are determined. The proposed method was applied to actual data measured at 200 m, 350 m, and 500 m altitude, the ship position can be determined with accuracy of 4.068 m, 8.916 m, and 13.734 m, respectively. According to the minimum standard of a hydrographical survey, the ship positioning results of 200 m and 350 m data satisfy grade S and the results of 500 m data do grade 1a, where the accuracy is required for positioning the coastline and topography less significant to navigation order. Therefore, it is expected that the proposed method can be effectively used for various purposes of marine monitoring or surveying.