• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.71-71
• /
• 2015

반도체 및 디스플레이 소자 제조를 위한 진공 플라즈마는 다양한 공정 조건하에서 다양한 공정 가스의 물리화학적 반응에 의한 박막의 형석 및 식각 반응을 유도한다. 실 공정 하에서 기체 성분의 환경 조건에 의하여 박막층 및 식각 구조 형성에 심각한 영향이 발생할 수 있으며, 공정 조건에서 기체 압력을 완벽하게 컨트롤 하는 것은 현실상 불가능하므로 기체 부분압력이 실시간으로 반드시 모니터링 되고 이를 피드백으로 하여 압력 변수가 조정되어야 완벽하게 공정을 제어할 수 있다. 이를 위하여 현장에서 플라즈마 공정을 실시간 in-situ 모니터링 할 수 있는 다양한 진단 방법이 도입되고 있으며 접촉신 진단 방법은 플라즈마와 섭동으로 인한 교란을 유발하고, 이온에너지 측정의 한계가 존재하며 비접촉식 방법 중의 하나인 유도형광법(LIF)은 측정 물질의 제한으로 인하여 플라즈마 내에 존재하는 다양한 가스 종의 거동을 살필 수 없는 등 현실 적용 측면에서 실 공정에 적용하는데 단점이 존재한다. 공정 상태 및 RF에 의한 영향을 주고받지 않고, 민감한 공정 변화의 감지 및 혼합가스를 사용하는 실시간 공정 진단을 위하여 비접촉 광학 측정 방식인 발광 분광 분석법(optical emission spectroscopy, OES)이 각광받고 있으며, 본 강습에서는 분광학의 기본 개념 및 OES를 이용한 진공 플라즈마 진단 방법에 관한 전반적인 개요를 설명하도록 한다

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1219-1222
• /
• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.13 no.1
• /
• pp.29-36
• /
• 2009

In this paper, we proposed auto exposure(AE) algorithm and hardware implementation for apply to mobile phone camera. AE is a function that control camera exposure automatically for appropriate to object. Existing AE is using micro controller unit and there are some problems about high expense and slow processing speed. For improve these problems, we proposed AE algorithm for hardware implementation without micro controller unit therefor we can expect improvement about the content of a production and operation speed. We proposed the algorithm that is considered efficiency of hardware resource and the results of hardware implementation of proposed AE algorithm apply to mobile phone camera sensor, we verified proposed AE function.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.16 no.11
• /
• pp.2569-2574
• /
• 2012

HMS(Hull Mount Sonar) equipment mounted on PCC(Patrol Combat Corvette) is suitably designed for active mode, and the specific character of sensor or system is not appropriate for the frequency range to detect a torpedo. In this article, in order to implement the function of detecting torpedoes with HMS of existing PCC, I will analyze the feature of input signals each PCCs and design a circuit to compensate reversely for the input signal in certain frequency. And also, I will suggest the most adequate torpedo defense system suitable for the special operating environment and the characteristic of naval vessels, implementing functions such as AGC of input signal and fixing the frequency range of different input signals per different warships.

• Membrane Journal
• /
• v.14 no.2
• /
• pp.142-148
• /
• 2004

This paper presents the enhancement of oxygen transfer efficiency using vibrating intravascular lung assist device (VIVLAD) for patients having chronic respiratory problems. The flow rate was controlled by the pump and monitored by a built-in flow meter. The vibration apparatus was composed of a piezo-actuator, a function generator, and a power amplifier. Gas flow rates of up to 6 L/min through the 120-cm-long hollow fibers have been achieved by exciting a piezo-actuator. The output PVDF sensor and FRF (frequency response function) were investigated by various frequency in VIVLAD. As a result, the maximum oxygen transfer rate was found to occur with maximum amplitude and the transfer of vibration to the hollow fiber membranes. It was excited by the frequency band of 35 Hz at various distilled water flow rates, and various module types.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.44 no.1
• /
• pp.16-21
• /
• 2007

A Dual-Path Voltage Multiplier for passive RFID Tags was proposed and fabricated by using a 0.25um CMOS process with additional steps for schottky diodes. The proposed circuit needs only 4 additional diodes, and the area increment compared to conventional one is negligible in multi-stage voltage multipliers. The simulation and measurement results show that the output power capability of proposed multiplier are about two times larger than the conventional half-wave multiplier.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2010.06a
• /
• pp.331-331
• /
• 2010

본 연구에서는 차량 하중에 의해 압전체가 변형되어 전기에너지를 발생시키는 도로용 압전에너지 하베스터를 개발하기위한 설계 및 실험을 진행하였다. 최대의 전기에너지가 발생되도록 압전사각 시트를 닥터브레이드로 제작하여, 이를 강판에 부착하고 고유주파수를 낮추기 위해 끝단에 질량을 달아 캔틸레버형태의 구조로 제작하였으며 끝단 질량의 변화와 가진주파수에 따른 발전특성을 비교하였다. 이로써 도로용 센서 및 방향지시등의 전원으로 사용하기 위한 도로매설용 압전 에너지 하베스터의 타당성을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2010.06a
• /
• pp.19-19
• /
• 2010

현재 산업에서 높은 정밀성과 설치의 간편함으로 이용량이 증가하고 있는 초음파 유량계는 압전진동자를 사용하여 측정을 한다. 일반적으로 초음파 유량계에서 초음파를 발생하고 수신하는 압전 세라믹 진동자의 경우 대부분 $200^{\circ}C$ 이상의 고온에서는 사용이 불가능하다. 따라서 고온에서의 이용을 위한 사용가능 온도의 영역을 개선하기 위한 조성이나 구조적인 변화가 필요하였고, 조성변화에 있어서는 한계가 있기 때문에 구조 측면에서 접근하고자 하였다. 초음파 유량계의 구조에 있어 외접형 도파관 방식을 선택하였으며, 도파관의 길이, 방열판의 개수, 재질 등의 변수에 대하여 시뮬레이션을 하였다. 시뮬레이션 결과를 바탕으로 얻어진 결과에 대하여 샘플을 제작하였으며, 압전 진동자에 도달되는 온도를 평가 하였을 시 방열판에 대한 온도감소효과를 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.28-28
• /
• 2008

Generally speaking, Rogowskii coil for magnetic flux change detection according to electric current is used for digital addition watt-hour meter, because it is not saturated at electromagnetic that not Current Transformer working by magnetic material but non-magnetic material. In this paper, we described sensitive quality an electric current coil sensor followed by the principal of Rogowskii coil on the low dielectric loss LTCC, change different line width, gap, line length at sensing parts and extinction parts.

• Journal of the Korean Institute of Intelligent Systems
• /
• v.13 no.1
• /
• pp.91-96
• /
• 2003

The forces and moments at the aircraft c.g. have components due to aerodynamic effects and to engine thrust. For the flight stability and autopilot systems we present a attitude control method using an intelligent control algorithm Which is based on the control rules from experts knowledge concerning the motion equations and other experiences. Then a robust fuzzy controller is developed to control the flight attitude. The controller can deal with multiple inputs and outputs. We have made an aircraft model and the orientation sensor for experimental flights. The control rules based on the flight expert s experience and knowledge can be programmed by fuzzy rules, and determined control rules by experimental flight. We can be stable attitude control by fuzzy controller.