• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• The Journal of Korean Physical Therapy
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• v.18 no.4
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• pp.41-50
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• 2006

Purpose: The purpose of this study was to determined that the efficacy and comfort of iontophoretic transdermal delivery of lidocaine by comparison of local anesthetic duration, sensory threshold, pain threshold and pain tolerance levels according to four different cleansing regimes. Methods: Forty healthy volunteers were randomly assigned to four groups; oil cleansing group, lotion cleansing group, solution cleansing group and alcohol cleansing group. All subjects were received lidocaine iontophoresis on the forearm using direct current with 4 mA for 10 minutes. All subjects were measured the duration of local anesthesia after lidocaine iontophoresis, also evaluated the sensory threshold, pain threshold and pain tolerance level during iontophoresis. For comparisons of the efficacy and the sensory characteristics of iontophoresis within the groups, an one-way ANOVA was used. Results: The duration of local anesthesia were found significant difference between groups (p<0.001). The anesthetic duration in solution and alcohol cleansing groups were significantly longer than oil and lotion cleansing group by post hoc (p<0.05). Statistically significant difference were noted in respect to all sensory characteristics such as sensory threshold, pain threshold and pain tolerance between groups (p<0.001). The sensory threshold in solution and alcohol cleansing group were significantly lower than oil and lotion cleansing group by post hoc using Duncan multiple range test (p<0.05). The pain threshold and pain tolerance in solution and alcohol cleansing group were significantly higher than oil and lotion cleansing group by post hoc (p<0.05). Conclusion: These results demonstrated that cleansing regimes have affected the efficacy and discomfort of iontophoretic transdermal delivery of lidocaine. These findings indicate that cleansing agents without oil ingredient contributed to more comfort, and more successful achievement of the iontophoretic transdermal delivery.

• Journal of Advanced Marine Engineering and Technology
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• v.39 no.3
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• pp.217-222
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• 2015

There has been increased amount of atmospheric pollutants including NOx and SOx which cause acid rain and photochemical smog as a result of increased use of fossil fuels. In order to reduce the amount of pollutants produced by fossil fuel, wet scrubber system is introduced in this experiment. Wet scrubber system is applied to a diesel engine (3,298 cc) and the amount of smoke is measured before and after the application in terms of aspect ratio, filling rate, and flow rate. The result showed a lot of smoke reduction when wet scrubber system was applied, and also the aspect ratios and water spray flow rate were the important factors to improve smoke reduction.

• Microbiology and Biotechnology Letters
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• v.32 no.3
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• pp.265-270
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• 2004

To select a promising technologies for removal of odorous gases emitted from a wastewater pump station, four methods such as activated carbon (A/C) adsorption, chemical absorption (acid and alkali scrubber), and two biofilters (polyurethane (PU) and worm cast) were investigated. The average odor removal efficiencies in the PU biofilter and A/C column was over 98%, but in a worm cast biofilter and chemical absorption were below 60-80%. The removal efficiency of PU biofilter was very stable (about 98-99%) in the range of retention times of 4-36s, and a maximum elimination capacity was $1.6${\times}$10^{ 7}$ $OUm^{-3}$$h^{-1}$ Deodorization costs for an activated carbon adsorption and a biofiltration method were investigated. With increasing odor intensity, the operating cost of the A/C column increased linearly, but the operating cost of the biofilteration increased slightly. The capital cost in a biofilter is about two times higher than that in an A/C column, but the operating cost is very lower than that of in A/C column. In conclusion, the biofiltration was evaluated one of the most promising technologies to control odor in a wastewater pump station.

• The Journal of Korean Academy of Prosthodontics
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• v.58 no.4
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• pp.385-391
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• 2020

Denture adhesive is a material used to improve the retention and stability of the denture. And denture adhesive is divided into soluble and insoluble type. It improves the retention, stability of dentures, and masticatory functions of patients. Maintenance like cleansing and periodic follow up is essential. Almost of dental clinicians are only simply aware of the effects of denture adhesives and often rely on the manufacturer's instructions on precautions and maintenance. The purpose of this study is to examine the properties, effects, and precautions of denture adhesives, and to present clinical guidelines for patients and professionals.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.45 no.2
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• pp.105-116
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• 2019

Oil adsorption during hair or body washing is responsible for the hair conditioning. In this study, we established a method to extract oil from a substrate, and to determine amount of adsorbed oil upon substrate using a conventional absorption spectroscopy. We controlled the mole fraction of a surfactant in a mixture of anionic and amphoteric surfactants because that it induces the coacervate that regulates amount of adsorbed oil through the alteration of oil viscosity. Based on this, we established the optimized condition for adsorption and extraction for oil. UV absorbance were employed to estimate the amount of adsorbed oil using optical absorbance after extraction via adsorption. The estimation was confirmed by comparing with a mass analysis in HPLC and an adhesive energy in AFM. It has been proved that this method can be applied to all cases of oil adsorption from the results with various cationic polymers and a complex system of the polymers which regulate the oil adsorption.

• Journal of the Korea Society for Simulation
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• v.18 no.3
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• pp.147-154
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• 2009

In this study we investigate the problem of reducing color change cost at painting operations in an automobile assembly plant. Changing control logic at conveyor junction points prior to the top coat line has been proposed and analyzed using the discrete event simulation model we developed using AutoMod. We also discussed the project which initiated this research as well as the details of painting operations. Simulation analysis showed that the grouping ratio increases from 1.8 to 2.5 if the proposed control logic change is applied to the plant. Contrary to other approaches such as using dedicated equipment for resequencing, our approach has the merit of less investment cost, no need for additional space consumption. We finally note that the grouping ratio can be further increased if our algorithms is implemented as well as CRS (Color Rescheduling Storage) is installed.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.42 no.2
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• pp.103-109
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• 2016

Efficacy of cosmetics has been mainly evaluated by qualitative and quantitative methods based on visual sense, tactile sense and skin structure until now. In this study, we suggested a novel evaluation method for skin status based on sound; measuring and analyzing the rubbing noise generated by applying cosmetics. First, the rubbing noise was measured at a close range by a high-sensitivity microphone in anechoic environment, and the noises were analyzed by 1/3 octave band analysis in frequency-domain. Three conditions, 1) before washing, 2) after washing and 3) after application of cosmetics, were compared. As a result, sound pressure level (SPL) of rubbing noise after washing was larger than that of before washing, and the SPL of rubbing noise after cosmetic application was the smallest. Furthermore, the energy of rubbing noise after application was higher than that of the before and after washing conditions in a low frequency band (lower than 2 kHz region). Conversely, the energy of rubbing noise after application was much lower than the others in a high-frequency band (upper than 2 kHz region). This change of energy distribution was described as a balloon-skin model. High SPL in the low frequency region after the cosmetic applications was due to the increase of "flexibility index", while SPL in the high frequency region significantly decreased because of the attenuation which is related to "softness index". Therefore, we developed two indices based on the spectrum-energy difference for evaluating skin conditions. This proposed method and indices were verified via skin flexibility and roughness measurement using cutometer and primos respectively. These results suggest that acoustic measurement of skin friction noise may be a new skin status evaluation method.

• The Journal of Korean Academy of Prosthodontics
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• v.59 no.3
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• pp.291-298
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• 2021

Purpose. The purpose of this study is to compare five interdental cleansing products' effectiveness on removing artificial dental plaque on the interdental space of zirconia crowns. Materials and methods. A model with abutments on the right mandibular second premolar and first molar were prepared. 10 zirconia crowns for each abutment were fabricated. After applying artificial dental plaque between the zirconia crowns, a single clinician attempted to remove the plaque with five products: interdental toothbrush, end-tuft toothbrush, dental floss, Easypick, Water pik. They were conducted 10 times per group. The aspect and area of removed surfaces were analyzed using images taken with a digital camera. One factor analysis of variance was performed as a statistical analysis, and a post-hoc test was performed using the Scheffé method (P < .05). Results. There were differences in the area and the pattern according to the characteristics of the products. The largest area, including the marginal portion, was removed in the dental floss group. Interdental toothbrush group was the most effective in removing the dental plaque at the marginal portion. Easypick was less effective than the interdental toothbrush. The end-tuft toothbrush showed better results than other products in cleansing mesiobuccal and distobuccal area, but could not cleanse the area directly below the contact point. In Water pik group, artificial dental plaque was scarcely removed. The removal rate of artificial dental plaque was in the order of floss (69.47%), end-tuft toothbrush (49.36%), interdental toothbrush (44.20%), Easy pick (13.04%), and Water pik (0.59%). Conclusion. Dental floss showed the highest removal rate in the interdental space restored with zirconia crowns, while interdental toothbrush was the most effective in removing the dental plaque at the marginal portion.

• Proceedings of the Korean Institute Of Construction Engineering and Management
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• autumn
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• pp.450-453
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• 2003

It is very important to examine and compare initial plan with earned value repeatedly in construction. For this purpose, progress measurement, which reflects the actual progress correctly, is required and it is necessary that accurate field data should be offered. To measure the progress, the entire project mutt be divided into unit works that have an accurate scope of work, and required information must be distributed to the all parties. Under the circumstances of domestic construction industry which focus on the specifications, progress measurement needs to reflect the information of schedule as well as cost that includes the quantity of unit work and construction expenses. Therefore this research proposes weighted method of progress measurement based on the information of cost and schedule.