• 한국수소및신에너지학회논문집
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• 제21권3호
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• pp.201-206
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• 2010

In present work, $La_{0.8}Ca_{0.2}CrO_3$ (LCC) ceramic interconnect layer for SOFC was prepared by using thermal plasma spray coating process. The LCC powders were synthesized by Pechini method and calcined at the temperature of $1000^{\circ}C$. The prepared LCC powder was characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), particle counter, BET analysis, respectively. In addition, basic and essential properties of LCC layer coated by thermal plasma spray coating process such as the morphology of surface and cross section for coated layer, gas leak rate, and electrical conductivity were analyzed and discussed. Based on these experimental results, it can be concluded that the LCC layer coated by thermal plasma spray coating process can be suitable as a ceramic interconnect of SOFC operated at $800^{\circ}C$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.118-118
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• 2010

현재 반도체 제조 공정 중 많은 비중을 차지하는 식각 및 증착 공정에는 대부분 플라즈마를 사용하고 있으며, 이러한 반도체 장비내의 공정 부분품들은 수율과 생산성을 향상시키기 위하여 내플라즈마 특성이 우수한 세라믹 또는 세라믹 코팅막으로 구성되어 있다. 더욱이 최근에는 미세공정을 위해 고밀도 플라즈마 공정이 요구되면서, 노출된 세라믹 층이 침식되어 파티클이 떨어져 나오거나 모재와 세라믹 막 사이의 박리현상과 같은 심각한 문제들이 발생되고 있다. 따라서 보다 우수한 내플라즈마 특성을 갖는 세라믹 코팅 기술 개발이 시급한 실정이다. 현재 내플라즈마성 세라믹 코팅막 제조를 위한 코팅기술로서는 주로 용사법이 이용되고 있으나 기공률이 높고 치밀하지 못한 등의 문제점으로 인하여 사용수명이 짧다는 한계에 봉착하였다. 이에 본 연구에서는 상온에서 치밀하고 고속으로 세라믹 후막 형성이 가능한 Aerosol Deposition (AD)법과 AD법의 단점인 edge, corner, hole에서 코팅이 잘 안 되는 점을 보완할 수 있는 Arc Plasma Anodizing (APA)법을 조합하여, 상용화된 Al 모재위에 APA법을 사용하여 $Al_2O_3$ 후막 중간층을 형성한 뒤 그 위에 AD법으로 치밀한 $Al_2O_3$ 후막 성막함으로써 내 플라즈마 향상을 위한 새로운 개념의 제조기술개발을 시도하였다. 이를 위해 우선 Al 모재 위에 APA를 사용하여 중간층인 $Al_2O_3$막을 제조하였으며, 중간층의 두께에 따른 특성을 확인한 결과, $Al_2O_3$중간층의 두께가 두꺼워질수록 표면조도가 증가함을 확인 할 수 있었다. AD법으로 $Al_2O_3$중간층 위에 치밀한 $Al_2O_3$막을 제조하는데 있어 중요인자를 확인하기 위해, AD법으로 중간층 위에 $Al_2O_3$막을 제조한 후 성막특성을 관찰하였다. 그 결과, 중간층의 표면조도가 $0.8-1\;{\mu}m$인 경우에는 수 ${\mu}m$의 두께로 성막 되었으나, 표면조도가 $1\;{\mu}m$ 이상인 $Al_2O_3$중간층 위에서는 성막 되지 않았다. 이를 통해 AD법으로 치밀하고 두꺼운 $Al_2O_3$ 후막을 $Al_2O_3$중간층 위에 성막하기 위해서는 표면조도가 중요인자임을 확인하였다.

• Journal of Welding and Joining
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• 제14권6호
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• pp.109-118
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• 1996

Al$_2$O$_3$-TiO$_2$powders of six different compositions were plasma-sprayed on Ti substrate. The spray powders and the spray coated layers were analysed and compared using SEM and X-RD. The elastic properties (specific elastic constant and damping coefficient) of the coated specimens were measured in order to select the optimum composition range of ceramics for use in a speaker diaphragm. A correlation between the microstructure and elastic properties was also investigated. When $Al_2$O$_3$powders with 0- 13% TiO$_2$were plasma sprayed, the coated layers were composed of metastable y-Al$_2$O$_3$with small amount of $\alpha$-Al$_2$O$_3$and the content of $\alpha$-Al$_2$O$_3$was increased with TiO$_2$content. Specific elastic constant was rapidly increased with 2 and 13% TiO$_2$addition to $Al_2$O$_3$. The internal damping was nearly unchanged with TiO$_2$content The specific elastic constant seemed to be dependent on the content of $\alpha$-Al$_2$O$_3$in the coated layer.

• 동력기계공학회지
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• 제7권4호
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• pp.55-60
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• 2003

This paper is to investigate the fatigue crack growth of plasma-sprayed coating steels according to heat treatments. The experimental materials are carbon steels(substrate: S45C) with plasma-sprayed coating layers of Ni-4.5%Al and $TiO_2$. The fatigue test is conducted on compact tension specimen by a servo-hydraulic fatigue testing machine. The specimens are heat-treated at $400^{\circ}C\;and\;800^{\circ}C$, respectively. Loading condition is a constant amplitude sinusoidal wave with a frequency of 10Hz and a load ratio of 0.1. The fatigue crack growth length is automatically measured by a compliance method. In the case of non-heat treated specimens, the fatigue crack growth rates of both substrate and coating specimen are almost same. The crack growth rates of substrates and coating steels by heat treatment are larger than those of the non-heat treated one, because the ductile property increase by heat treatment. In ${\Delta}K<18MPa{\cdot}m^{1/2}$, the crack growth rates of the heat-treated specimens are slightly taster than non-heat treated one. But the both heated and non-heated one are almost same in ${\Delta}K>18MPa{\cdot}m^{1/2}$.

• Journal of Advanced Marine Engineering and Technology
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• 제24권1호
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• pp.49-58
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• 2000

Thermal spraying is one of the most common surface coating techniques to be used for many applications and flame spraying covers a wide range of different materials which can be coated onto various substrates. The purpose of this study is to investigate the effects of mixed ratio in composite coatings on the mechanical and anti-corrosion properties. The five different types of composite coatings were made with $Al_2O_3$ ceramic and Ni-alloy powder on the mild steel substrate by flame spraying method. The mechanical properties such as microhardness, adhesive strength and erosion resistance and corrosion resistance were tested for the sprayed coating specimens. The results obtained are summarized as follows; 1. The composite coating layers greatly improve the microstructure, erosion resistance and adhesive strength by increasing the content of Ni-Al alloy. 2. Microhardness of the compsite coating layer is decreased by increasing the content of Ni-Al alloy. 3. The anti-corrosion properties is considerably improved by increasing the compsite rate of Ni-Al alloy.

• 대한기계학회논문집A
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• 제21권3호
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• pp.439-446
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• 1997

A traditional notion of composites has been composed as a uniform dispersoid, but now it is proposed without regard to such rule with process development. Functionally Graded Material(FGM) consists of a new material design that is to make intentionally irregular dispersion state. In this study, thermal stress analysis of plasma spraying PSZ/NiCrAlY gradient material was conducted theoretically using a finite-element program. A formations of the model are direct bonding material(NFGM) and FGM with PSZ and NiCrAlY component element. The temperature conditions were $700^{\circ}C$ to 1100.deg. C assuming a cooling-down precess up to room temperature. Fracture damage mechanism was analyzed by the parameters of residual stress.

• 동력기계공학회지
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• 제6권3호
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• pp.24-30
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• 2002

The deformation and fracture behaviors of both Al2O3 and Ni 4.5wt.%Al plasma thermal spray coating were investigated by an acoustic emission method. Plasma thermal spray coating is formed by a process in which melted particles flying with high speed towards substrate, then crash and spread on the substrate surface cooled and solidified in a very short time, stacking of the particles makes coating. A tensile test is conducted on notch specimens in a stress range below the elastic limit of substrate. A bendind test is done on smooth specimens. The waveforms of AE generated from the both test coating specimens can be classified by FFT analysis into two types which low frequency(type I) and high frequency(type II). The type I waveform is considered to corresponds exfoliation of coating layers and type II waveform corresponds the plastic deformation of notch tip. The fracture of the coating layers can estimate by AE event and amplitude, because AE features increase when the deformation generates.

• 동력기계공학회지
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• 제2권3호
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• pp.41-48
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• 1998

This study was aimed at development of fabrication process of functionally graded materials(FGM), consisting of metal and ceramic by thermal spraying method. NiCrAIY/$Al_2O_3$ FGM were made by using plasma spraying onto the SS400 carbon steel substrate. And mechanical properties such as microhardness, thermal shock resistance and adhesive strength of the coating layer were investigated. Adhesive strength was evaluated by acoustic emission method. It was resulted that NiCrAIY/$Al_2O_3$ FGM made by thermal spraying method showed excellent thermal shock resistance and adhesive strength compared to the other lamellar structures of sprayed coatings and that AE is useful tool to evaluate the defect of thermal sprayed coating layer.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.603-607
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• 2009

액체로켓엔진 연소기의 내벽에 사용하기 위한 니켈/크롬 도금 공정 개발을 수행하였다. 열충격 시험을 통해 니켈 도금 조건을 선별하였고 니켈/크롬 도금이 수행된 축소형 연소기의 연소시험을 통해 도금 층의 내구성 검증을 수행하였다. 시험결과 도금 층의 균열 및 박리는 발견되지 않았고, 이 결과로부터 현재 사용중인 대기 플라즈마 용사된 세라믹 코팅의 대안으로 니켈/크롬 도금을 액체로켓엔진 연소기에 사용할 수 있으리라 사료된다.

• 한국세라믹학회지
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• 제39권9호
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• pp.851-856
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• 2002

산화몰리브덴($MoO_3$)이 첨가된 산화크롬 용사코팅층을 제조하여 산화몰리브덴의 첨가에 따른 고온(450$^{\circ}C$)에서의 플라즈마 용사코팅층에 마찰, 마멸특성을 조사하였다. 마찰, 마멸 특성에 대한 실험을 위하여 왕복동 마멸시험장치를 사용하였다. TEM을 이용하여 코팅층의 미세 구조와 각 상들의 조성을 살펴보았다. 분석 결과에 의하면 산화몰리브덴이 입계로 분산되어 있어 코팅층의 경도와 밀도의 증가가 발생하였다. 마멸시험후 마멸면의 물리적 변화와 화학적 조성의 변화를 SEM와 XPS를 통하여 살펴보았다. 산화몰리브덴이 첨가된 코팅층에서 마찰계수의 감소를 관찰할 수 있었다. 산화몰리브덴이 첨가된 코팅의 마멸된 표면에 마찰, 마멸에 유리한 보호막의 형성이 광범위하게 일어남을 알 수 있었다. 이러한 보호막에 몰리브덴이 산화몰리브덴의 형태로 존재하는 것을 XPS 분석을 통하여 알 수 있었다. 보호막에 산화몰리브덴의 존재가 마찰계수를 감소시키는 것으로 생각된다.