• The Journal of the Acoustical Society of Korea
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• v.16 no.6
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• pp.61-67
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• 1997

Piezoelectric gyroscopes are the devices to measure angular rotational velocity of a system with respect to an inertial frame of reference means of the Coriolis principle. Most of current piezoelectric gyroscopes detect rotational velocity about a single axis of rotation. This paper describes development of a new dual axial gyroscope made out of the piezoelectric ceramic, PZT, which can overcome the limitation of the current single axial type. The validity of the new structure is checked through finite element analysis. Based on the design, an experimental sample of the sensor is fabricated and its performance is discussed in comparison with the theoretical expectation. The resutls show that the present gyroscope is capable of measuring the rotational velocity over two orthogonal axes simultaneously with good enough sensitivity and distinction between the two axial components of the rotation.

• Journal of the Korean Ceramic Society
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• v.38 no.7
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• pp.634-638
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• 2001

본 연구에서는 마이크로 내시경용 바이오 센서로 응용하기 위한 Al/PZT/RuO$_2$로 이루어진 마이크로 캔틸레버를 제작하였으며, 공진 특성 및 병원체의 흡착에 따른 공진 특성 그리고 검출 감도(sensitivity)에 미치는 구조적인 영향을 전산모사를 통하여 알아보았다. 길이 100$mu extrm{m}$, 폭 50$\mu\textrm{m}$, 두께 0.3$\mu\textrm{m}$/0.25$\mu\textrm{m}$/0.7$\mu\textrm{m}$ (Al/PZT/RuO$_2$)의 크기의 제작된 마이크로 캔틸레버는 89kHz의 공진주파수를 가지고 있음을 전산모사를 통해 알 수 있었다. 바이오 센서로 응용될 때의 검출 감도는 흡착 질량의 증가에 비례하여 향상되었으며, 5% 이상의 검출 감도를 갖기 위해서는 흡착 질량이 약 5 나노그램 이상이 되어야 함을 확인할 수 있었다. 캔틸레버의 크기를 결정하는 길이, 폭, 두께중 사용 주파수 대역은 길이의 조절을 통하여 결정할 수 있고, 검출 감도의 향상을 위해서는 가능한 한 두께를 얇게 해야 함을 알 수 있었다. 반면에 폭의 변화는 공진주파수나 검출 감도에 거의 영향을 미치지 않았다.

• Journal of Sensor Science and Technology
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• v.30 no.3
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• pp.148-153
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• 2021

During the manufacture of a ZnS lens with excellent transmittance in the mid-infrared region (3-5 ㎛) by the hot-press process, a single-layer sintering method is used in which one lens is manufactured in one process. Additional research is required to improve this single-layer sintering method because of its low manufacturing efficiency. To solve this problem, the variation in optical properties of ZnS lenses with change in sintering temperature was investigated by introducing a Stack sintering method that can sinter multiple lenses simultaneously. A carbon paper was placed between the molded lenses and sintered into five layers. The average permeability of 67% at medium infrared wavelengths of 3-5 ㎛ was excellent under the following sintering conditions: pressure of 50 MPa and temperature of 850℃. This value is 1% less than the average permeability in the case of single-layer sintering of the ZnS lens. It was confirmed that the stack sintering method developed in this study can be used to manufacture a large number of lenses with excellent characteristics in a single process.

• Journal of Sensor Science and Technology
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• v.31 no.4
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• pp.255-259
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• 2022

In this study, we fabricated ZnS substrates with excellent transmittance in the mid-infrared region (3-5 ㎛) using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon (DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance efficiency. To reduce the reflectance and further improve transmittance in the mid-infrared region, anti-reflection (AR) coating was designed for DLC/ZnS /AR and AR/ ZnS /AR structures. The coating structure, microstructure, and optical properties of the AR-coated ZnS substrates were subsequently investigated by employing energy dispersive X-ray spectroscopy, scanning electron microscopy, and Fourier-transform infrared (FTIR) spectroscopy. The FTIR spectroscopy results demonstrated that, in the mid-infrared region, the average transmittance of the samples with AR coating on one and both sides increased by approximately 18% and 27%, respectively. Thus, AR coating improved the transmittance of the ZnS substrates.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1591-1593
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• 2004

압력센서는 몇 가지 센싱 메카니즘을 가지고 있으므로 종류가 다양하고 크기 변에서도 여러 가지가 이용되고 있다. 최근에는 센싱 부분이 작으며 제어부분도 포함되는 ASIC화된 센서 시스템이 개발되고 있다. 여기에 이용되는 대부분의 탄성물질은 힘을 받았을 때 물질 내부의 벌크에서 저항 값이 변화하는 특성을 갖고 있다. 이러한 특성은 피에조 저항률(piezoresistivity)로 언급되며 스트레인 게이지의 감도에 영향을 주는 중요한 요소로 작용한다. 다이어프램으로 금속대선 세라믹을 사용하면 안정성이 우수한 특정을 가칠 수 있으며, 부식성 가스 류 및 화학성분에 대해서 내성이 강하고 환경변화에 따른 변형과 공정의 단순화 등 우수한 특성을 갖고 있는 것이 큰 장점이다. 센싱부는 산화 루세니움($RuO_2$)을 주 성분으로 하는 분말을 Paste화 하여 다이어프램 위에 스크린 프린팅을 하여 기본성능을 나타내었으며 특히, 상품화에서 중요한 일반성능에서는 온도 특성에 대한 Span 과 Offset 그리고 공정의 단순화에 대해서 고찰을 하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.105-108
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• 1998

Pt-WO$_3$-Si$_3$N$_4$-SiO$_2$-Si-Al 캐패시터를 이용한 NO$_2$ 가스 센서를 개발하였다. 표준 실리콘 MNOS구조에 촉매 게이트로 Pt와 가스 흡착층으로 WO$_3$를 이용함으로서 전통적인 세라믹 가스 센서보다 낮은 온도에서 NO$_2$ 가스를 감지할 수 있었다. 은도 변화와 NO$_2$ 가스 농도의 변화에 따라서 디바이스의 NO$_2$ 가스 감도를 조사하였다. Pt-WO$_3$ 계면에서 NO$_2$ 이온농도의 변화에 기초로 한 가스 감지 모델을 제시하였다. 제시된 가스 감지 모델을 계면에서의 가스 반응 속도론에 의하여 분석함으로서 확인하였다.

• Proceedings of the KIEE Conference
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• 1997.07e
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• pp.1696-1701
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• 1997

본 연구에서 사용된 절연유 열화센서는 주 매질이 기공 세라믹(Porous Ceramic)으로 구성되어 있어 열화생성된 유불용성분(油不溶 成分)이 일정 크기의 기공 속을 통과할 때 절연유의 열화정도에 따라 인위적인 도전 통로가 형성되는 데, 이러한 회로를 이용하여 전기적인 분석으로 측정된 센서의 누설전류치와 기존 실시되고 있는 절연유 분석법인 전산가, 내압치와 상호 비교 분석한 결과, 지금까지 샘플링에 의한 화학적인 분석법에 앞서 전기적인 분석법으로 절연유 열화 상태를 간단하게 분석할 수 있다는 가능성을 제시하였다.

• Journal of Sensor Science and Technology
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• v.19 no.6
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• pp.475-482
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• 2010

Rogowski coil which detects magnetic flux on current changes. It is used for digital integration with watt-hour meter's current sensor, because, Rogowski coil has non-cored or non-magnetic core structure, so that, it cannot be saturated magnetically. This is a study for inventing accurate electric current sensors that have been applied on multi-layer ceramic substrate. We have confirmed its properties from each different layer's materials and pattern sizes by MWS 3D Electromagnetic field analysis program. And, after sensor manufacturing on multi-layer ceramic substrate, we confirmed its sensing quality is reliable as accurate electric current sensor for watt-hour meter.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.491-499
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• 1997

We fabricated the ceramic PLT tablet which was composed of 5, 10 and 15 mol% lanthanum concentration and thin film PLT to develope pyroelectric materials, and investigated their characteristics. Using TG/DTA, we determined calcination and sintering temperature to sinter the PLT completely and to prevent volatilization of the Pb components. The calcination and sintering temperature were $850^{\circ}C$, $1150^{\circ}C$ respectively, and there was a lot of mass loss at higher sintering temperature. By measuring temperature-dielectric constant characteristics of ceramic tablet we investigated dielectric constant characteristics depends on La concentration. The Curie point of PLT with 5, 10 and 15 mol% lanthanum concentration were $330^{\circ}C$, $269^{\circ}C$ and $210^{\circ}C$ respectively. Using PLT ceramic tablet we observed IR detection characteristics, and then deposited PLT thin film by rf magnetron sputtering. We verified that PLT thin film fabricated with completely sintered PLT target had the same structure to target by investigating lattice constant and optical transparency.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.5
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• pp.349-357
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• 2015

The piezoelectric paint sensor is a paint type sensor comprising of an epoxy and piezoelectric powder, which is the main component of a piezoelectric material. This sensor can be easily attached to any type of structure as compared to other sensors because it is viable to directly apply it on structures, as in the case with a typical paint. In this study, the capability of piezoelectric paint sensor for impact detection was evaluated. In Particular, the applications of the piezoelectric paint sensor for railroad vehicles were considered. There have been various cases reported about the damages caused by flying gravel to the under-cover of the railroad vehicle during operation. In order to prevent this, real-time monitoring of the large under-cover surface of the railroad vehicle is unavoidable. Under the assumption of vehicle application, sensor sensitivities were measured after multiple and prolonged exposure to thermal cycle environment $-20{\sim}60^{\circ}C$). Sensitivity evaluation of paint sensor under environmental conditions was conducted in an aluminum specimen. In results, despite the small variations in sensitivity, we could confirm the applicability of this paint sensor for impact detection even after a severe environmental exposure test.