• The Journal of the Acoustical Society of Korea
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• v.37 no.4
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• pp.174-180
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• 2018

In this study, the propagation characteristics of Lamb waves in anisotropic silicon wafers of (100) and (111) direction were investigated by PVDF (Polyvinylidene Fluoride) line-focused transducer. The modified V(f,z) method was used because the Lamb waves are dispersive. For confirming the anisotropy, a line-focused transducer was used and the silicon wafer was rotated 180 degrees at intervals of 1 degree. As a result, $A_0$ and $S_0$ modes were observed. The speed of $S_0$ mode according to propagation direction showed anisotropy which is associated with the crystal structure, and the speed of $A_0$ mode was isotropic. The result is consistent with the crystal structure of silicon and the mechanism of vibration of each Lamb wave modes.