• Title/Summary/Keyword: 선비

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The effect of annealing conditions on ultra shallow $ p^+-n$ junctions formed by low energy ion implantation (저에너지 이온 주입 방법으로 형성된 박막$ p^+-n$ 접합의 열처리 조건에 따른 특성)

  • 김재영;이충근;홍신남
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.5
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    • pp.37-42
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    • 2004
  • Shallow $p^{+}$-n junctions were formed by preamorphization, low-energy ion implantation and dual-step annealing processes. Germanium ions were implanted into silicon substrates for preamorphization. The dopant implantation was performed into the preamorphized and non-preamorphized substrates using B $F_2$2 ions. Rapid thermal anneal (RTA) and furnace anneal (FA) were employed for dopant activation and damage removal. Samples were annealed by one of the following four methods; RTA(75$0^{\circ}C$/10s)+Ft FA+RTA(75$0^{\circ}C$/10s), RTA(100$0^{\circ}C$/10s)+FA, FA+The Ge Preamorphized sample exhibited a shallower junction depth than the non-preamorphized sample. When the employed RTA temperature was 100$0^{\circ}C$, FA+RTA annealing sequence exhibited better junction characteristics than RTA+FA thermal cycle from the viewpoint of junction depth, sheet resistance, $R_{s}$$.$ $x_{j}$, and leakage current.t.

Image Analysis of Computer Aided Diagnosis using Gray Level Co-occurrence Matrix in the Ultrasonography for BPH (전립선비대증 초음파 영상에서 GLCM을 이용한 컴퓨터보조진단의 영상분석)

  • Cho, Jin-Young;Kim, Chang-Soo;Kang, Se-Sik;Ko, Seong-Jin;Ye, Soo-Young
    • Proceedings of the Korea Contents Association Conference
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    • 2015.05a
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    • pp.191-192
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    • 2015
  • 전립선비대증(Benign Prostatic Hyperplasia, BPH)은 전립선조직중에 이행구역의 결절성증식과 요도 주위의 과증식(Hyperplasia)이 특징이다. 경직장초음파(TRUS: transrectal ultrasonography)검사를 이용한 진단에 있어 정상조직과 비대되어 있는 조직의 영상 차이를 비교하고 수량화로 나타내었다, 영상분석에는 GLCM 통계적 파라미터 중에서 Autocorrelation, Cluster Prominence, Entropy, Sum average를 4개의 파라미터에서 병변 인식이 가능하였고 인식 효율은 92-98%가 나왔다. 전립선비대증식에 대한 초음파영상을 가지고 컴퓨터영상처리분석을 제안하여 진단시 참고 자료가 될 것으로 기대한다.

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