• Title/Summary/Keyword: 석영 유리

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A study on the brownish ring of quartz glass crucible for silicon single crystal ingot (실리콘 단결정 잉곳용 석영유리 도가니의 brownish ring에 대한 연구)

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Noh, Sung-Hun;Kang, Nam-Hun;Kim, Hyeong-Jun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.3
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    • pp.115-120
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    • 2022
  • A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 ㎛ in size and has an asymmetric brown ring shape. The size and distribution of BR were different depending on the crucible location, and the size and distribution of BR were the largest and most abundant in the round part with the highest crucible temperature during Si ingot growth. BR contains cristobalite, which has a higher coefficient of thermal expansion than quartz glass, so it is considered that surface cracks appear. The color development of BR and pin holes are presumed to be due to oxygen vacancies.

Preparation and characterization of phosphate glasses as oxidation resistive coating (내산화 코팅용 인산염 유리의 제조 및 특성 평가)

  • 송현수;최연호;윤존도;김철영
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.147-147
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    • 2003
  • 탄소/탄소 복합체의 내산화 코팅을 위하여 산화티탄, 산화알루미늄, 산화이트륨 등을 포함하는 여러 가지 인산염계 유리를 제조하였다. 유리 산화물조성 몰비는 인산에 대하여 인산알루미늄을 15몰%, 30몰%, 45몰%로 하였고 산화티탄은 70몰%, 산화 이트륨은 25몰%이 되도록 코팅 액을 제조하였다. 제조 된 코팅액은 석영 도가니에서 열처리 하여 급냉 시켰으며, 급냉 시키고 다시 130$0^{\circ}C$, 1시간 동안 열처리하여 유리를 제조하였다. 제조된 유리의 열중량, 열팽창율, 열전도도를 분석하여 탄소 복합체와의 적합성을 조사하고, 내산화성 시험을 위해 탄소/탄소 복합체에 코팅액을 도포하여 산화 감량 비율을 측정하였다. 엑스선 회절분석기와 적외선 분광기를 통하여 인산염 유리의 구조분석을 실시하고 비커스 미세 경도 시험기를 이용하여 기계적 물성을 측정하였다.

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Effect of Glass Melting Conditions on the Structural Properties of Chalcogenide Glasses for Infrared Optics (적외선 광학렌즈용 칼코게나이드 유리의 Glass melting 조건에 따른 특성 변화)

  • Park, Heung-Su;Lee, Hyun-Yong;Cha, Du-Hwan;Kim, Hye-Jeong;Kim, Jeong-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.167-167
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    • 2010
  • Ge-Sb-Se계 칼코게나이드 유리의 Melting 조건변화에 따른 특성변화를 연구하였다. Glass melting 조건(homogenization-temperature, homogenization-time, annealing) 에 따라 제작된 칼코게나이드 유리 bulk를 FT-IR, XRD, SEM 등의 분석장비를 이용하여 특성을 분석하였다. Homogenization temperature가 높을수록 석영관 급냉 시 발생되는 mechanical stress와 내부응력차로 인해 칼코게나이드 유리 깨짐현상이 증가하였으며 조성비와 melting 조건에 따라 XRD분석에서 확인되지 않는 미소결정이 SEM 분석결과 관찰되었다. 본 연구를 통해 칼코게나이드 유리의 melting 조건에 따른 경향성을 확인할 수 있었다.

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Fabrication Technology of Glass Micro-framework by Photolithographic Process (사진식각 공정에 의한 유리 미세구조물 제작 기술)

  • O, Jae-Yeol;Jo, Yeong-Rae;Kim, Hui-Su;Jeong, Hyo-Su
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.871-875
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    • 1998
  • High aspect ratio microstructures were fabricated by photolithography. The material for the microstructure was photosensitive glass which has good mechanical and electrical insulation properties. The photosensitive glass was exposed to ultraviolet light at 312nm through a chromium mask in which the structures are drawn. After heat treatment process over $500^{\circ}C$, the photosensitive glass was etched in a 10% hydrofluoric acid solution with ultrasonic conditions. Final dimension of the micro-framework was greatly dependent on the thickness of photosensitive glass, mask pattern, ultraviolet light exposure and etching conditions. The maximum aspect ratio of the micro-framework obtained from this work was over 30.

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Experimental Study on Cutting State of Glass by Ultrasonic Scriber (초음파 절단기에 의한 유리 절단면의 상태에 관한 실험적 검토)

  • Lee Chai-Bong
    • Journal of the Institute of Convergence Signal Processing
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    • v.6 no.4
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    • pp.212-216
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    • 2005
  • In an ultrasonic glass scriber, the effect of ultrasonic vibration and its optimum driving frequency were investigated experimentally. To investigate the optimum ultrasonic frequency theoretically, the vibration model of the ultrasonic scriber is assumed. The frequency for maximum amplitude of acceleration is obtained theoretically. To investigate the depth of cutting edge corresponding the each frequency. The quartz glass plate specimen with a dimension of $200mm(L){\times}30mm(W){\times}3mm(T)$ is selected. The ultrasonic transducer is operated by the constant acceleration amplitude for the every frequency. The maximum crack depth was generated when the driving frequency was 18.35kHz. These results were in good agreement with those of the calculated model theoretically.

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Quartz Glass Ferrule의 절단가공 및 상태 감시

  • 김성렬;이돈진;김선호;안중환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.286-286
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    • 2004
  • 초고속 정보통신망 구현에 필수적인 광학 연결용 부품인 광 Ferrule은 광섬유 커넥터의 중요부품으로서 우수한 치수정밀도와 내마모성을 갖추어야 한다. 현재, Ferrule로 사용되는 재료는 지르코니아, 알루미나 등 세라믹 물질이 많이 사용되고 있으며 기계적 강도나 내마모성 면에서는 우수하지만, 피연마속도가 석영섬유에 비해 현저히 작아서 특수한 연마방법을 채택해야 하며 성형성이나 가공성이 나빠 생산효율이 낮고 비용이 비싸다는 단점을 가지고 있다.(중략)

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Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots (실리콘 단결정 잉곳 제조용 석영유리 도가니 내 기포 품질평가를 위한 가속시험)

  • Gyu Bin Lee;Seung Min Kang;Jae Ho Choi;Young Min Byeon;Hyeong-Jun Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.3
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    • pp.91-96
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    • 2023
  • To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes was analyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450℃, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550℃ led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired b ake test.

Scientific Conservation and Analysis of Octagonal Green Glass Bottle Excavated from Tomb Hwayu princess (화유옹주묘 출토 녹유리장경각병-보존과 분석)

  • Gang, Hyeong-Tae;Yang, Pil-Seung;Heo, U-Yeong;Jo, Nam-Cheol
    • KOMUNHWA
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    • no.70
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    • pp.5-15
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    • 2007
  • Octagonal green glass bottle with long neck(녹유리장경각병) was found in the tomb of the princess Hwayu who was King Youngjo's daughter by a concubine while the tomb was exhumed and buried in another place around Bucheon City, Gyeonggi-do. This octagonal glass bottle is dark green. It was made in AD 1736-A1795 because it was cngraved an inscription of "건륭년제" the bottom. This glass bottle was taken an X-ray radiography and tested adhesives and restoration materials for the conservation. Loctite 401 was suitable as considering the translucency of the glass bottle, good adhesive property and reversibility of the adhesive so it was chosen. A minute piece of the glass was analyzed the composition and lead isotope ratio. Major chemical composition of the glass bottle consisted of SiO2, K2O, and PbO system and the ratio was 68: 18.5:5.7. Green color of glass bottle was due to Fe2O3 and CuO. When the glass bottle was made, quartz as raw material of silica and K2O as natural saltpeter(KNO3) were utilized. As a result of lead isotope ratio analysis, it was suggested that the galena as raw material of lead for glass making came from the southern part of China. These results are expected to become useful data in background of glass culture and circulation study of old glass.

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Engineering Geological Implications of Fault Zone in Deep Drill Cores: Microtextural Characterization of Pseudotachylite and Seismic Activity (시추코어 단층대에서의 지질공학적 의미: 슈도타킬라이트의 미세조직의 특징과 지진활동)

  • Choo, Chang-Oh;Jeong, Gyo-Cheol
    • The Journal of Engineering Geology
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    • v.27 no.4
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    • pp.489-500
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    • 2017
  • It is not rare that pseudotachylite, dark colored rock with glassy texture, is recognizable in deep core samples drilled up to 900 m from the surface. Pseudotachylite with widths varying few to 20 cm is sharply contacted or interlayered with the host rocks composed of Jurassic granite and Precambrian amphibolite gneiss, showing moderately ductile deformation or slight folding. Pseudotachylite occurring at varying depths in the deep drill core are slightly different in texture and thickness. There is evidence of fault gouge at shallower depths, although brittle deformation is pervasive in most drill cores and pseudotachylite is identified at random depth intervals. Under scanning electron microscope (SEM), it is evident that the surface of pseudotachylite is characterized by a smooth, glassy matrix even at micrometer scale and there is little residual fragments in the glass matrix except microcrystals of quartz with embayed shape. Such textural evidence strongly supports the idea that the pseudotachylite was generated through the friction melting related to strong seismic events. Based on X-ray diffraction (XRD) quantitative analysis, it consists of primary minerals such as quartz, feldspars, biotite, amphibole and secondary minerals including clay minerals, calcite and glassy materials. Such mineralogical features of fractured materials including pseudotachylite indicate that the fractured zone might form at low temperatures possibly below $300^{\circ}C$, which implies that the seismic activity related to the formation of pseudotachylite took place at shallow depths, possibly at most 10 km. Identification and characterization of pseudotachylite provide insight into a better understanding of the paleoseismic activity of deep grounds and fundamental information on the stability of candidate disposal sites for high-level radioactive waste.

The Scientific Analysis of Floor Tile Excavated from the Beobgwangsa Temple Site in the Pohang (포항 법광사지 출토 녹유전의 자연 과학적 조사)

  • Moon Whan-Suk;Han Min-Su;Hwang Jin-Ju;Kim Ho-Sang
    • KOMUNHWA
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    • no.60
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    • pp.101-120
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    • 2002
  • The floor tile on a coated green-glass was excavated from the Beobgwangsa Temple Site in the Pohang City. We analyzed using the MXRD, ICP-AES, EDXRF, TG/DTA and TIMS. As a result of microscope analysis, it was composed of quartz, feldspar and clay particl

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