• Title/Summary/Keyword: 석영유리

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Preparation of high-purity quartz panel using sol-gel method (졸-겔법을 이용한 고순도 석영유리 기판 제조)

  • Nam, Byeong-Uk;An, Jung-Sook;Park, Sung-Eun;Shin, Ji-Shik;Oh, Han-Seog
    • Proceedings of the KAIS Fall Conference
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    • 2006.11a
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    • pp.272-275
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    • 2006
  • 본 논문에서는 CMP(Chemical Mechanical Polishing) 슬러리용으로 사용되는 저가이면서 입도 분포가 균일한 콜로이달 실리카(Colloidal Silica)를 사용하여 추가의 첨가제 없이 열처리 공정만을 거쳐 석영유리를 제조하여 6N의 순도와 1 mm 두께 기준 86%의 자외선 투과율 그리고 AFM(Atomic Force Microscopy) 및 간섭계 현미경을 이용하여 표면의 거칠기가 1 nm 미만인 고순도 석영유리를 제조하였다.

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Glass Inclusions in Quartz Phenocrysts of Tuff from Sunshin Au Mining Area, Haenam, Jeonnam. (전남 해남의 순신 금광산 지역에 산출하는 응회질암에 포획된 유리포유물)

  • Lee, Seung-Yeol;Yang, Kyoung-Hee;Jeon, Byung-Geun;Bak, Gil;Koh, Sang-Mo;Seo, Jeong-Ryul
    • The Journal of the Petrological Society of Korea
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    • v.18 no.4
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    • pp.337-348
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    • 2009
  • Clear and homogeneous glass inclusions are well preserved at the rim of the quartz phenocrysts of tuff from Sunshin epithermal Au deposit, Haenam, although the host rocks experienced extensive silicification and argillic alteration. Glass inclusion vary in size from $5\;{\mu}m$ to larger than $200\;{\mu}m$ consisting of glass(60~80 vol%) + vapor bubble(15~30 vol%) $\pm$ daughter crystals(<10 vol%). Most of glass inclusions are cubic to rectangular in shape, indicating that the host quartz grew in the stability field of $\beta$-quartz. All the glass inclusions appear to be primary. Glass inclusions are composed of highly evolved high-K calc-alkaline rhyolites, which can represent the final liquidus phase of the magma system. The $Au_2O_3$ concentration (<0.30 wt%) is trivial in the glass, indicating there was no enrichment in the final residual melt. Textural characteristics suggest that magma was water-saturated shortly before or during the eruption. $H_2O$ content of the glass (ca. 2-4 wt%) suggests a water saturation pressure($P_{H2O}$) of about 300-900 bars. This pressure implies a minimum depth of 0.8-2.5 km for the magma chamber.

졸겔법으로 제조된 Ag나노입자가 함유된 석영유리박막의 광학특성

  • Jeong, Chae-Hwan;Bu, Seong-Jae;Kim, Bok-Hyeon;Son, Dong-Hun;Ju, Seong-Min;Han, Won-Taek
    • Proceedings of the Optical Society of Korea Conference
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    • 2006.07a
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    • pp.457-458
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    • 2006
  • 졸겔공정을 이용하여 Ag나노입자가 형성된 석영유리계 유리박막을 제조하였다. Dip-coating 과 건조 및 소결처리를 거쳐 $60{\sim}275nm$ 두께의 박막을 제조하였고, TEM 분석 결과 $2{\sim}5nm$ 크기의 Ag나노 입자가 유리박막에 형성된 것을 확인하였다.

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A study on the brownish ring of quartz glass crucible for silicon single crystal ingot (실리콘 단결정 잉곳용 석영유리 도가니의 brownish ring에 대한 연구)

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Noh, Sung-Hun;Kang, Nam-Hun;Kim, Hyeong-Jun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.3
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    • pp.115-120
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    • 2022
  • A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 ㎛ in size and has an asymmetric brown ring shape. The size and distribution of BR were different depending on the crucible location, and the size and distribution of BR were the largest and most abundant in the round part with the highest crucible temperature during Si ingot growth. BR contains cristobalite, which has a higher coefficient of thermal expansion than quartz glass, so it is considered that surface cracks appear. The color development of BR and pin holes are presumed to be due to oxygen vacancies.

The crystallization behaviours of cordierite gel derived from sil-gel method and glass prepared by the conventional melting method. (용융법과 졸겔법으로 제조된 Cordierite 계 유리와 겔의 결정화 거동)

  • Park, Won-Gyu
    • The Journal of Engineering Research
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    • v.1 no.1
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    • pp.15-22
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    • 1997
  • The crystallization behaviours of cordierite gel derived from sol-gel method and glass prepared from conventional melting method with or without $TiO_2$ as nucleants are compared. The densification temperature of gel is $810^{\circ}C$ and its chemical structure identified by IR analysis is same as that of glass melted by conventional method. The beginning crystallization temperature of gel is $965^{\circ}C$ lower than that of melted glass with 10wt% $TiO_2$, which is $978^{\circ}C$. The crystalline phases developed from gel during heat treatment are identified as spinel, $\beta$-quartz solid solution and $\alpha$-cordierite crystal and crystalline phases in case of glass are (Mg,Al)TiOn and $\beta$-quartz solid solution and $\alpha$-cordierite crystal, respectively. The crystallization in melted glass with nucleants occurs through bulk crystallization and in case of that without nucleants surface crystallization occurs, while the crystallization in gel is internal crystallization from interface between particles formed after densification.

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Experimental Study on Cutting State of Glass by Ultrasonic Scriber (초음파 절단기에 의한 유리 절단면의 상태에 관한 실험적 검토)

  • Lee Chai-Bong
    • Journal of the Institute of Convergence Signal Processing
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    • v.6 no.4
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    • pp.212-216
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    • 2005
  • In an ultrasonic glass scriber, the effect of ultrasonic vibration and its optimum driving frequency were investigated experimentally. To investigate the optimum ultrasonic frequency theoretically, the vibration model of the ultrasonic scriber is assumed. The frequency for maximum amplitude of acceleration is obtained theoretically. To investigate the depth of cutting edge corresponding the each frequency. The quartz glass plate specimen with a dimension of $200mm(L){\times}30mm(W){\times}3mm(T)$ is selected. The ultrasonic transducer is operated by the constant acceleration amplitude for the every frequency. The maximum crack depth was generated when the driving frequency was 18.35kHz. These results were in good agreement with those of the calculated model theoretically.

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Characterization of quartz glass substrate for TFT-LCD panel (TFT-LCD 패널용 석영유리기판의 특성평가)

  • Park, Sung-Eun;Shin, Ji-Shik;Oh, Han-Seog;Kim, Ki-Young;Kang, Bok-Hyun
    • Proceedings of the KAIS Fall Conference
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    • 2006.11a
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    • pp.257-260
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    • 2006
  • 본 논문에서는 TFT-LCD 패널용 석영유리기판을 제작하여 투과율, OH함량, OH농도분포, 점도, 열팽창계수 등에 대한 특성 평가를 하였다. 그 결과 고온 poly-Si TFT-LCD용 기판으로의 사용 가능성을 확인하였다.

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