• Journal of the Korean Society for Precision Engineering
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• v.12 no.1
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• pp.5-14
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• 1995

An optical measurement method of three dimensional surface profiles which is named the slit beam projection is suggested and practically implemented. This method is intended especially for noncontact and fast digitization of sculptured surfaces for CAD modeling and die manufacturing. Its basic principles are based on geometric optics. Deatiled optical principles and an sub-pixel image processing technique to enhance the measuring resolutions are described in this study. The measuring performances of the slit beam projection are presented and discussed to demonstrate that an actual measuring accuracy of below .+-. 0.2mm can be achived over the whole measuring range(500mm*300mm*200mm)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.565-568
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• 2005

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Journal of the Korean Institute of Intelligent Systems
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• v.14 no.7
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• pp.871-877
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• 2004

In this paper, for manufacturing a custom-made shoes, shape of foot acquired three-dimensional measurement device which makes shoe-last data for needing a custom-made shoes is founded on artificial intelligence technique and it shows method restoring to the original shape in optimized state. the developed system for this study is based on PC which uses existing three dimensional measurement method. And it gains shoe-last and data of foot shape going through 8 CCD(Charge Coupled Device) Which equipped top and bottom, right and left sides and 4 lasers which also equipped both sides and upper and lower sides. The acquired data are processed image processing algorithm using artificial intelligence technique. And result of data management is better quality of removing noise than other system not using artificial intelligence technique and it can simplify post-processing. So, this paper is constituted hardware and software system and it used neural network for determining threshold value, when input image on pre-processing step is being stage of image binarization and present that results.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.47 no.2
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• pp.51-60
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• 2010

This paper proposes a new scheme to obtain enhanced 3D shape information rapidly for WLPSI(White Light Phase Shifting Interferometry). WLPSI is a convenient method to measure the height of the micro products. First we propose an effective method of limiting search interval for detecting the peak of the visibility function in order to obtain 3D shpae information rapidly. Second we propose an automatic base level decision method basad on image processing and a correction algorithm using the least square approximation method to overcome the global tilt problem of the conventional WLPSI algorithms. Third we propose an adaptive filtering method to remove the distortion known as bat-wing effect which appears near the step discontinuity. Experimental results show that the proposed overall technique is fast and provides more enhanced 3D shape information compared with the conventional WLPSI algorithms.

• Solar Energy
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• v.18 no.3
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• pp.217-228
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• 1998

The purpose of this research is to investigate the characteristics of static and total pressure distribution in the upward free water jet system impinged on a downward flat plate. The rectangular nozzle was used and its contraction and aspect ratio was five and about seven respectively. Experimental conditions considered were jet velocity, distance between nozzle and flat plate, height of supplementary water. It was founded that pressure distribution on the flat plate had the Gaussian curve when the pressure at stagnation point and impinging half width were chosen as the scaling parameters. The maximum pressure was shown at the stagnation point. The central impingement velocity decreased with the increment of distance between nozzle and flat plate, and its slop of decay was similar to that of chracteristics decay region in the three-dimensional free jet.

• Journal of Korea Foundry Society
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• v.32 no.3
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• pp.150-156
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• 2012

발포금속은 초경량 재료로서 폐기공과 개기공의 두 가지 형태의 구조를 지니고 있으며 폐기공은 내충격성, 흡음성, 단열성의 기능을 지니고 있고, 개기공은 필터, 생체지지대, 촉매재, 열방출재 등으로 사용되고 있다. 개기공발포재는 삼차원 구조모양으로 프리커서를 이용한 압력정밀주조나 기공입자용출법으로 제조하고 있으나 기공의 크기나 셀의 형상, 두께 등을 조절하기에 어려움이 있다. 이를 해결하기 위하여 환경친화적인 펄라이트를 사용하여 목적하는 크기의 그래뉼을 제조한 후, 용융마그네슘합금을 감압주조법으로 주조하여 그래뉼의 크기로 기공율을 조절하고, 주형의 온도와 압력에 따른 유동의 길이를 측정하였다. 그래뉼 직경이 2.3 $mm{\O}$ 일때에 주형의 온도 $300^{\circ}C$ 이상, 압력이 5000 Pa 이상에서 유동길이 6.5 cm 이상을 얻었다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Journal of the KSME
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• v.34 no.3
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• pp.177-184
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• 1994

이 글에서는 기하공차의 기본적인 개념들에 대한 설명과 삼차원측정기 응용소프트웨어에서 기하 공차를 평가하기 위한 수학적인 방법들에 대해 소개하였다. 최소영역법은 ISO규격에 의한 공차 평가법이란 점에서 근래의 연구의 대부분을 차지하고 있으나 표준적인 알고리즘이라 할 수 있는 방법은 아직 발표되지 않고 있으며 실용적인 소프트웨어의 경우 최소자승법을 근간으로 하고 있는 실정이다. 최근에는 이러한 형상추출과 기하공차평가를 포함하는 좌표식 측정기 술(coordinate metrology)이 컴퓨터통합생산(computer integrated manufacturing)시스템 구축에 있어서 아킬레스건이라 할 수 있는 컴퓨터원용검사(computer aided quality control)의 핵심적인 기술로 인식되어 선진국에서는 이미 표준기술을 확립하고자 하는 목적으로 체계적인 지원하에 연구를 수행하고 있다. 그러므로 국내에서도 품질보증에 의한 제조업 분야의 생산성 제고를 위 하여 좌표식 측정기술에 대한 연구와 투자가 시급하며 국내의 표준기술 확립이 절실히 요청되고 있다하겠다.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.15 no.4
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• pp.237-242
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• 2022

Acquiring high-quality images in control and measurement systems is one of the important factors. Among image acquisition technologies, SFF (Shape from Focus) is a technology for recovering a 3D shape by acquiring 2D images with different focus levels by moving an object at a predetermined step size along the optical axis. For SFF, when an object is moved at a constant step size, mechanical vibration, referred as jitter noise, occurs in each step along the optical axis. In this paper, a new state estimation filter is designed and applied for reducing the jitter noise. For the application of the proposed method, the jitter noise and focus curves are modeled as Gaussian function. Experimental results demonstrate the effectiveness of proposed method.