• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1202-1207
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• 1993

An optical method of slit beam scanning topography is presented for the 3-dimensional profile measurement of free-formed surfaces. A slit beam of laser is projected in a scanning mode and its illuminated trajectory on the object is captured by using a CCD camera. The 3-dimensional coordinates of the trajectory is then computed by using the given geometry between the slit beam and the camera, so that the whole surface profile of the object can be obtained in a successive manner. Detailed optical principles are described with special emphasis to lateral are discussed to demonstrate the measuring performances of the slit beam scanning topography proposed in this study.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.598-603
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• 2019

Three-dimensional shape measurement technology is used in various industries. Among them, optical three-dimensional shape measurement techniques based on the optical trigonometry are mainly used in the field of semiconductor product inspection, where large quantities of three-dimensional shape measurements are made daily in factories and fine measurements are also required. The light source and the drive circuit, which are components of three-dimensional measurement equipment based on this optical trigonometry, produce heat generated by prolonged operation, and may be exposed to conditions where the ambient temperature is not constant, resulting in temperature-induced measurement errors. In this study, the compensation method of the Thermal Errors for Phase Measuring Profilometry is proposed. Three-Dimensional Shape Measurement Equipment based on Phase Measuring Profilometry is implemented to measure the height of an object and ambient temperature for 10 Hours, and a regression line was obtained line by making simple linear regression using measured temperature and height values. This regression line was used to correct the error of the height measurement according to the temperature, and thermal error was from 139.88 um(Micrometer) to 13.12 um.

• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• Journal of the KSME
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• v.32 no.2
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• pp.175-183
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• 1992

모아레토포그라피를 이용한 금형제작을 위한 클레이모형(clay model)의 3차원 형상측정을 위한 방법이 제시되었다. 그리고 모아레무늬를 해석하는 방법이 제시되어 클레이모형의 형상을 측정 하였고 디지털영상처리기법을 사용하는 일련의 과정을 통해 3차원 형상을 재현하였다. IBM PC/386과 CCD 카메라를 사용하여 실험한 결과 0.005mm의 분해능을 가지며 측정속도가 5분 가량이 소요되었다. 따라서 광학적방법이 접촉식 디지타이징을 이용하였을 경우 발생하는 많은 문제점 등을 효율적으로 보완할 수 있다. 그리고 품질검사를 자동화할 수 있는 방법을 제시하 였고 기존의 모아레토포그라피가 가지는 어려움을 극복하기 위하여 새로운 방법인 주사식 모아 레토포그라피를 제시하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.11
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• pp.3023-3030
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• 2009

In this paper, a prediction and compensation method for the error in the phase measured by using the proportionality between two wavelengths in the TW-PMP (Two-wavelength Phase Measuring Profilometry) is proposed and experimental results are shown to verify the usefulness of the proposed method. For sample object, firstly, a phase-shifting with a quite large number of steps is adopted in measurement, compared with the conventional phase-shifting method, secondly, a 3-3 step phase-shifting method is used to measure the same object which is applied to high-speed 3D shape measurement, and then, measured results from these two phase-shifting methods are compared to calculate measurement noises. From the experimental results applying the proposed compensation method to the measured beat phase and absolute phase, it has proven that noises are decreased by 90% and 17.2% for each case.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.2
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• pp.407-415
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• 1993

This report presents an automatic measurement method of 3-dimensional profiles of free-formed surfaces, by using a touch a touch-trigger contact probe along with a conventional coordinate measuring machine. The method proceeds in three steps; The surface profile under consideration is traced by the probe in an automatic manner, and then its measured data is compensated by considering the actual probe radius. Finally the compensated data is rearranged in the form suitable for the further processings of CAD/CAM applications. Some experimental results are discussed to verify the validity of the method suggested in this study.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1530-1535
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• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.49 no.2
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• pp.8-17
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• 2012

In this paper we proposes a new framework to obtain 3D shape information of thin film rapidly. The conventional equipments based on reflectometry are not suitable for obtaining 3D overall shape information of thin film rapidly since they require more than 30 minutes to measure the absolute thickness for 170 points. The proposed framework is based on an image analysis method that extracts contour lines from interference fringes images using Canny edge detector. The absolute thickness for contour lines are measured and then a height map from the contour lines is obtained by interpolation using Borgefors distance transformation. The extracted height map is visualized using the DirectX 3D terrain rendering method. The proposed framework can provide 3D overall shape information of thin film in about 5 minutes since relatively small number of real measurement for contour lines is required.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.4
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• pp.765-772
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• 2011

In this paper, a simulation-based method is presented to dispose direction finders in three dimensional space for locating targets using the directional data. A direction finder(DF) is a military weapon that is used to find locations of targets that emit radio frequencies by operating two or more DFs simultaneously. If one or more DFs are operated in the air, the accuracy of location estimation can be enhanced by disposing them in a better configuration. By extending the line method, which is a well-known algorithm for 2-D location estimation, into 3-D space, the problem of 3-D location estimation is defined as an nonlinear programming form and solved analytically. Then the optimal disposition of DFs is considered with the presented method in which methods of simulation and search technique are combined. With the suggested algorithm for 3-D disposition of DFs, regions in which targets exist can be effectively covered so that the operation effect of DF be increased.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.5
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• pp.1182-1191
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• 1994

This paper presents an enhanced method of slit beam projection intended for the rapid measurement of 3-dimensional surface profiles of dies and molds. Special emphasis is given to optimizing the design of optical system so that the measuring accuracy can be maximized by adopting two-plane camera calibration together with sub-pixel image processing techniques. Finally, several measurement examples are discussed to demonstrate that an actual measuring accuracy of $\pm$ 0.2 mm can be achieved over the measuring range of 500 mm{\times}300mm{\times}200mm$.