• Title/Summary/Keyword: 산화 실리콘

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Thermal and Mechanical Evaluation of Environmental Barrier Coatings for SiCf-SiC Composites (SiCf-SiC 복합재료의 내환경 코팅 및 열, 기계적 내구성 평가)

  • Chae, Yeon-Hwa;Moon, Heung Soo;Kim, Seyoung;Woo, Sang Kuk;Park, Ji-Yeon;Lee, Kee Sung
    • Composites Research
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    • v.30 no.2
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    • pp.84-93
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    • 2017
  • This study investigates thermal and mechanical characterization of environmental barrier coating on the $SiC_f-SiC$ composites. The spherical environmental barrier coating (EBC) powders are prepared using a spray drying process for flowing easily during coating process. The powders consisting of mullite and 12 wt% of Ytterbium silicate are air plasma sprayed on the Si bondcoat on the LSI SiC fiber reinforced SiC composite substrate for protecting the composites from oxidation and water vapor reaction. We vary the process parameter of spray distance during air plasma spray of powders, 100, 120 and 140 mm. After that, we performed the thermal durability tests by thermal annealing test at $1100^{\circ}C$ for 100hr and thermal shock test from $1200^{\circ}C$ for 3000 cycles. As a result, the interface delamination of EBC never occur during thermal durability tests while stable cracks are prominent on the coating layer. The crack density and crack length depend on the spray distance during coating. The post indentation test indicates thermal tests influence on the indentation load-displacement mechanical behavior.

Improvement of Conductive Micro-pattern Fabrication using a LIFT Process (레이저 직접묘화법을 이용한 미세패턴 전도성 향상에 관한 연구)

  • Lee, Bong-Gu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.5
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    • pp.475-480
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    • 2017
  • In this paper, the conductivity of the fine pattern is improved in the insulating substrate by laser-induced forward transfer (LIFT) process. The high laser beam energy generated in conventional laser induced deposition processes induces problems such as low deposition density and oxidation of micro-patterns. These problems were improved by using a polymer coating layer for improved deposition accuracy and conductivity. Chromium and copper were used to deposit micro-patterns on silicon wafers. A multi-pulse laser beam was irradiated on a metal thin film to form a seed layer on an insulating substrate(SiO2) and electroless plating was applied on the seed layer to form a micro-pattern and structure. Irradiating the laser beam with multiple scanning method revealed that the energy of the laser beam improved the deposition density and the surface quality of the deposition layer and that the electric conductivity can be used as the microelectrode pattern. Measuring the resistivity after depositing the microelectrode by using the laser direct drawing method and electroless plating indicated that the resistivity of the microelectrode pattern was $6.4{\Omega}$, the resistance after plating was $2.6{\Omega}$, and the surface texture of the microelectrode pattern was uniformly deposited. Because the surface texture was uniform and densely deposited, the electrical conductivity was improved about three fold.

Characteristics in the Deposition of Mn-Zn Ferrite Thin Films by Ion Beam Sputtering Using a Single Ion Source (단일 이온원을 사용하는 이온빔 스퍼터링법에 의한 Mn-Zn 페라이트 박막의 증착 기구)

  • Jo, Hae-Seok;Ha, Sang-Gi;Lee, Dae-Hyeong;Hong, Seok-Gyeong;Yang, Gi-Deok;Kim, Hyeong-Jun;Kim, Gyeong-Yong;Yu, Byeong-Du
    • Korean Journal of Materials Research
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    • v.5 no.2
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    • pp.239-245
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    • 1995
  • Mn-Zn ferrite thin films were deposited on $SiO_2(1000 \AA)/Si(100)$ by ion beam sputtering using a single ion source. A mosaic target consisting of a single crystal(ll0) Mn-Zn ferrite with a Fe metal strip on it was used. As-deposited films without oxygen gas flow have a wiistite structure due to oxygen deficiencies, which originated from the extra metal atoms sputtered from the metal strips during deposition. The as-deposited films with oxygen gas flow, however, have a spinel structure with (111) preferred orientation. The crystallization of thin films was maximized at the ion beam extraction voltage of 2.lkV, at which the deposited films are bombarded appropriately by the energetic secondary ions reflected from the target. As the extraction voltage increased or decreased from the optimum value, the crystallinity of thin films becomes poor owing to a weak and severe bombardment of the secondary ions, respectively. Crystallization due to the bombardment of the secondary ions was also maximized at the beam incidence angle of $55^{\circ}$. The as-deposited ferrite thin films with a spinel structure showed ferrimagnetism and had an in-plane magnetization easy axis.

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유리화 비정형 탄소(vitreous carbon)를 이용하여 제작한 전계방출 소자의 균일성 증진방법

  • 안상혁;이광렬
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.53-53
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    • 1999
  • 전계방출을 이용한 평판 표시장치는 CRT가 가진 장점을 모두 갖는 동시에 얇고 가벼우며 낮은 전력소모로 완벽한 색을 구현할 수 있는 차세대 표시장치로서 이에 대한 여국가 활발히 이루어지고 있다. 여기에 사용되는 음극물질로서 실리콘이나 몰리 등을 팁모양으로 제작하여 사용해 왔다. 하지만 잔류가스에 의한 역스퍼터링이나 화학적 반응에 의해서 전계방출 성능이 점차 저하되는 등의 해결해야할 많은 문제가 있다. 이러한 문제들을 해결하기 위하여 탄소계 재료로서 다이아몬드, 다이아몬드상 카본 등을 이용하려는 노력이 진행되어 왔다. 이중 유리화 비정형 탄소는 다량의 결함을 가지고 있는 유리질의 고상 탄소 재로로서, 전기전도도가 우수하면서 outgassing이 적고 기계적 강도가 뛰어나며 고온에서도 화학적으로 안정하여 전계방출 소자의 음극재료로서 알맞은 것으로 생각된다. 유리화 비정형 탄소가루를 전기영동법으로 기판에 코팅하여 전계방출 소자를 제작하였다. 전기영동 용액으로 이소프로필알코올에 질산마그네슘과 소량의 증류수, 유리화 비정형 탄소분말을 섞어주었고 기판으로는 몰리(Mo)가 증착된 유리를 사용하였다. 균일한 증착을 위해서 증착후 역전압을 걸어 주는 방법과 증착 후 플라즈마 처리를 하는 등의 여러 가지 방법을 사용했다. 전계방출 전류는 1$\times$10-7Torr이사에서 측정하였다. 1회 제작된 용액으로 반복해서 증착한 횟수에 따라 표면의 거치기, 입자의 분포, 전계방출 측정 결과 등의 차이가 관찰되었다. 발광이미지는 전압에 따라 변화하였고, 균일한 발광을 관찰하기 위해서 오랜 시간동안 aging 과정을 거쳐야 했다. 그리고 구 모양의 양극을 사용해서 위치를 변화시키며 시동 전기장을 관찰하여 위치에 따른 전계방출의 차이를 조사하여 발광의 균일성을 알 수 있었다.on microscopy로 분석하였으며 구조 분석은 X-선 회절분석, X-ray photoelectron spectroscopy 그리고Auger electron spectroscope로 하였다. 증착된 산화바나듐 박막의 전기화학적 특성을 분석하기 위하여 리튬 메탈을 anode로 하고 EC:DMC=1:1, 1M LiPF6 액체 전해질을 사용한 Half-Cell를 구성하여 200회 이상의 정전류 충 방전 시험을 행하였다. Half-Cell test 결과 박막의 결정성과 표면상태에 따라 매우 다른 전지 특성을 나타내었다.도상승율을 갖는 경우가 다른 베이킹 시나리오 모델에 비해 효과적이라 생각되며 초대 필요 공급열량은 200kW 정도로 산출되었다. 실질적인 수치를 얻기 위해 보다 고차원 모델로의 해석이 필요하리라 생각된다. 끝으로 장기적인 관점에서 KSTAR 장치의 베이킹 계획도 살펴본다.습파라미터와 더불어, 본 연구에서 새롭게 제시된 주기분할층의 파라미터들이 모형의 학습성과를 높이기 위해 함께 고려된다. 한편, 이러한 학습과정에서 추가적으로 고려해야 할 파라미터 갯수가 증가함에 따라서, 본 모델의 학습성과가 local minimum에 빠지는 문제점이 발생될 수 있다. 즉, 웨이블릿분석과 인공신경망모형을 모두 전역적으로 최적화시켜야 하는 문제가 발생한다. 본 연구에서는 이 문제를 해결하기 위해서, 최근 local minimum의 가능성을 최소화하여 전역적인 학습성과를 높여 주는 인공지능기법으로서 유전자알고리즘기법을 본 연구이 통합모델에 반영하였다. 이에 대한 실증사례 분석결과는 일일 환율예측문제를 적용하였을 경우, 기존의 방법론보다 더 나운 예측성과를 타나내었다.pective" to workflow architectural discussions. The vocabulary suggested

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Pulsed Laser Deposition을 이용하여 GZO/Glass 기판상에 성장시킨 염료감응형 태양전지용 $TiO_2$ Blocking Layer의 특성 연구

  • Yeo, In-Hyeong;Kim, Ji-Hong;No, Ji-Hyeong;Kim, Jae-Won;Do, Gang-Min;Sin, Ju-Hong;Jo, Seul-Gi;Park, Jae-Ho;Mun, Byeong-Mu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.259-259
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    • 2011
  • 염료감응형 태양전지(Dye-Sensitized Solar Cells:DSSC)는 환경 친화적이며, 저가의 공정에 대한 가능성으로 기존의 고가의 결정질 실리콘 태양전지의 경제적인 대안으로 각광을 받고 있다. 최근 염료감응형 태양전지는 투명 전도성 산화막(Transparent Conducting Oxide : TCO)으로 사용되는 Fluorine Tin Oxide (FTO)가 증착된 유리기판 위에 주로 제작된다. FTO는 낮은 비저항과 가시광선 영역에서 높은 투과도를 가지는 우수한 전기-광학적 특성을 갖지만, 비교적 공정이 까다로운 Chemical Vapor Deposition (CVD)법으로 제조하며, 전체 공정비용의 60%를 차지하는 높은 생산단가로 인해 현재 FTO를 대체할 재료개발 연구가 활발히 진행되고 있다. 그 중 ZnO (Zinc Oxide)는 우수한 전기-광학적 특성과 비교적 저렴한 가격으로 새로운 TCO로써 주목받고 있다. ZnO는 넓은 energy band gap (3.4 [eV])의 육방정계 울자이트(hexagonal wurtzite) 결정 구조를 가지는II-VI족 n형 반도체 물질이며, III족 금속원소인 Al, Ga 및 In 등의 불순물을 첨가하면 TCO로서 우수한 전기-광학적 특성과 안정성을 나타낸다. 이들 물질중 $Zn^{2+}$ (0.060 nm)의 이온반경과 유사한 $Ga^{2+}$0.062 nm) 이온이 ZnO의 격자반경을 최소화 시킬 수 있다는 장점으로 최근 주목 받고 있다. 하지만 Ga-doped ZnO (GZO)의 경우 DSC에 사용되는 루테늄 계열의 산성 염료 하에 장시간 두면 표면이 파괴되는 문제가 발생하며, $TiO_2$ paste를 Printing 후 열처리하는 과정에서도 박막의 파괴가 발생할 수 있다. 이를 방지하기 위해 $TiO_2$ Blocking Layer를 GZO 투명전극 위에 증착하였다. 또한, $TiO_2$ Blocking Layer를 적용한 GZO 박막을 전면전극으로 이용하여 DSC를 제작하여 효율을 확인하였다. 2wt%의 $Ga_2O_3$가 도핑된 ZnO 박막은 20mTorr 400$^{\circ}C$에서 Pulsed Laser Deposition (PLD)에 의해 성장되었고, $TiO_2$박막은 Ti 금속을 타겟으로 이용하여 30mTorr 400$^{\circ}C$에서 증착되었다. Scanning electron microscopy (FE-SEM)을 이용한 박막 분석 결과 $TiO_2$가 증착된 GZO 박막의 경우 표면 파괴가 일어나지 않았다. Solar Simulator을 이용하여 I-V특성 측정결과 상용 FTO를 사용한 DSC 수준의 효율을 나타내었다. 이에 따라 Pulsed Laser Deposition을 이용해 제작된 GZO 기판은 $TiO_2$ Blocking Layer를 이용하여 표면 파괴를 방지할 수 있었으며, 이는 향후 염료감응형 태양전지의 투명전극에 적용 가능 할 것으로 판단된다.

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Study on the Mixed Materials and Epoxy Materials for Restoration of Ceramics - chromaticity·porosity·sedimentary rate - (도자기 보존을 위한 복원제의 특성 연구 - 색도(色度)·기공률(氣孔率)·침전률(沈澱率)·황변도(黃變度)를 중심으로 -)

  • Lee, Haesoon
    • Conservation Science in Museum
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    • v.6
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    • pp.55-66
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    • 2005
  • Three types of epoxy resins (Epo-Tek 301, Araldite 103, and Araldite 106) and three types of pigments (bunche, pastel, and conté), which are materials for porcelain restoration, were selected as examination materials. The tone change, porosity, and sedimental resulting from the mixtures of varying ratios of these three materials were observed. Samples were also made from the mixture of Epo-teck 301, four kinds of white pigments, and six types of fillers and subjected to ultraviolet ray penetration for 200 hours to observe the oxidation of the epoxy resins. The result showed that the chemical composition of pastel drastically changed when mixed with Epo-tek 301. Although bunche and conté displayed clear colors, those of conté were less clear when it was mixed with other substances. Adding a small amount of Epo-tek 301 tended to be driven into the corner, whereas mixing a large amount caused saturation and boiling. On the other hand, AW 106 did not display clear colors owing to its high viscosity; when mixed in large amounts, however, the clarity of colors improved. For AY 103, a similar standard of color clarity was maintained regardless of the mixture ratio. The following was ranked according to the level of porosity: [Pastel>bunche≒conté]. In terms of sedimentary, however, [bunche>conté>Pastel], [Epo-tek 301> AY 103> AW 106]. The result of measuring the degree of yellowing revealed that titanium, pastel, silicon dioxide, and kaolin tended to turn yellow, whereas bunche, conté, diatomaceous earth, and calcium hydroxide tended to resist yellowing.

Fabrication and Evaluation of NMOS Devices (NMOS 소자의 제작 및 평가)

  • 이종덕
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.16 no.4
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    • pp.36-46
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    • 1979
  • Using N_ Ch silicon gate technology . the capacitors and transistors with various dimenssion were fabricated. Although the applied process was somewhat standard the conditions of ion implantation for the gate were varied by changing the implant energies from 30keV to 60keV for B and from 100 keV to 175keV for P . The doses of the implant also changed from 3 $\times$ 10 /$\textrm{cm}^2$ to 5 $\times$ 10 /$\textrm{cm}^2$ for B and from 4$\times$ 10 /$\textrm{cm}^2$ to 7 $\times$ 10 /$\textrm{cm}^2$ for P . The D. C. parameters such as threshold voltage. substrate doping level, the degree of inversion, capacitance. flat band voltage, depletion layer width, gate oxide thickless, surface states, motile charge density, electron mobility. leakage current were evaluated and also compared with the corresponing theoretical values and / or good numbers for application. The threshold voltages measured using curve tracer and C-V plot gave good agreements with the values calculated from SUPREM II which has been developed by Stanford University process group. The threshold vol tapes with back gate bias were used to calculate the change of the substrate doping level. The measured subthreshold slope enabled the prediction of the degree of inversion The D. C. testing results suggest the realized capacitors and transistors are suited for the memory applications.

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Design of a radiation-tolerant I-gate n-MOSFET structure and analysis of its characteristic (I 형 게이트 내방사선 n-MOSFET 구조 설계 및 특성분석)

  • Lee, Min-woong;Cho, Seong-ik;Lee, Nam-ho;Jeong, Sang-hun;Kim, Sung-mi
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.10
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    • pp.1927-1934
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    • 2016
  • In this paper, we proposed a I-gate n-MOSFET (n-type Metal Oxide Semiconductors Field Effect Transistor) structure in order to mitigate a radiation-induced leakage current path in an isolation oxide interface of a silicon-based standard n-MOSFET. The proposed I-gate n-MOSFET structure was designed by using a layout modification technology in the standard 0.18um CMOS (Complementary Metal Oxide Semiconductor) process, this structure supplements the structural drawbacks of conventional radiation-tolerant electronic device using layout modification technology such as an ELT (Enclosed Layout Transistor) and a DGA (Dummy Gate-Assisted) n-MOSFET. Thus, in comparison with the conventional structures, it can ensure expandability of a circuit design in a semiconductor-chip fabrication. Also for verification of a radiation-tolerant characteristic, we carried out M&S (Modeling and Simulation) using TCAD 3D (Technology Computer Aided Design 3-dimension) tool. As a results, we had confirmed the radiation-tolerant characteristic of the I-gate n-MOSFET structure.

Synthesis, Characterizations, and Applications of Metal-Ions Incorporated High Quality MCM-41 Catalysts (고품질 금속 이온 첨가 MCM-41 분자체 촉매의 제법, 특성화 및 응용 반응)

  • Lim, Steven S.;Haller, Gary L.
    • Korean Chemical Engineering Research
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    • v.51 no.4
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    • pp.443-454
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    • 2013
  • Various metal ions (transition and base metals) incorporated MCM-41 catalysts can be synthesized using colloidal and soluble silica with non-sodium involved process. Transition metal ion-typically $V^{5+}$, $Co^{2+}$, and $Ni^{2+}$-incorporated MCM-41 catalysts were synthesized by isomorphous substitution of Si ions in the framework. Each incorporated metal ion created a single species in the silica framework, single-site solid catalyst, showing a substantial stability in reduction and catalytic activity. Radius of pore curvature effect was investigated with Co-MCM-41 by temperature programmed reduction (TPR). The size of metallic Co clusters, sub-nanometer, could be controlled by a proper reduction treatment of Co-MCM-41 having different pore size and the initial pH adjustment of the Co-MCM-41 synthesis solution. These small metallic clusters showed a high stability under a harsh reaction condition without serious migration, resulting from a direct anchoring of small metallic clusters to the partially or unreduced metal ions on the surface. After a complete reduction, partial occlusion of the metallic cluster surface by amorphous silica stabilized the particles against aggregations. As a probe reaction of particle size sensitivity, carbon single wall nanotubes (SWNT) were synthesized using Co-MCM-41. A metallic cluster stability test was performed by CO methanation using Co- and Ni-MCM-41. Methanol and methane partial oxidations were carried out with V-MCM-41, and the radius of pore curvature effect on the catalytic activity was investigated.

A study on the oxide semiconductor $[(I_{n2}O_3)_x{\cdot}(S_nO_2)_{1-x}]_{(n)}/Silicon(p)$, solar cells fabricated by two source evaporation (이가열원(二加熱源) 증착법(蒸着法)에 이한 산화물(酸化物) 반도체(半導體) $[(I_{n2}O_3)_x{\cdot}(S_nO_2)_{1-x}]_{(n)}/Silicon(p)$, 태양전지(太陽電池)에 관한 연구(硏究))

  • Jhoon, Choon-Saing;Kim, Yong-Woon;Lim, Eung-Choon
    • Solar Energy
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    • v.12 no.2
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    • pp.62-78
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    • 1992
  • The solar cells of $ITO_{(n)}/Si_{(p)}$, which are ITO thin films deposited and heated on Si wafer 190[$^{\circ}C$], were fabricated by two source vaccum deposition method, and their electrical properties were investigated. Its maximum output is obtained when the com- position of the thin film consist of indium oxide 91[mole %] and thin oxide 9[mole %]. The cell characteristics can be improved by annealing but are deteriorated at temperature above 600[$^{\circ}C$] for longer than 15[min]. Also, we investigated the spectral response with short circuit current of the cells and found that the increasing of the annealing caused the peak shifted to the long wavelength region. And by experiment of the X-ray diffraction, it is shown to grow the grains of the thin film with increasment of annealing temperature. The test results from the $ITO_{(n)}/Si_{(p)}$ solar cell are as follows. short circuit current : Isc= 31 $[mW/cm^2]$ open circuit voltage : Voc= 460[mV] fill factor : FF=0.71 conversion efficiency : ${\eta}$=11[%]. under the solar energy illumination of $100[mW/cm^2]$.

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