• Journal of Soil and Groundwater Environment
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• v.12 no.3
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• pp.29-35
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• 2007

Titanium was oxidized with oxygen plasma and calcinated with rapid thermal annealing for degradation of humic acid dissolved in water. Titania photocatalytic plate was produced by titanium surface oxidized with oxygen plasma by Plasma Enhanced Chemical Vapor Deposition (PECVD). RF-power and deposition condition is controlled under 100 W, 150 W, 300 W and 500 W. Treatment time was controlled by 5 min and 10 min. The film properties were evaluated by the X-ray Photoelectron Spectroscopy (XPS) and X-Ray Diffraction (XRD). From the experimental results, we found the optimal condition of titania film which exhibited good performance. Moreover photocatalytic capacity was about twice better than thermal spray titania film, and also as good as titania powder.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.542-542
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• 2013

저온 플라즈마를 발생시키는 대기압 마이크로-플라즈마 젯(Micro-plasma jet)을 이용하여 플라즈마와 세포와의 상호작용에 대한 연구를 진행하였다. 세포의 대사과정에서 생성되는 활성산소 종(Reactive Oxygen Species, ROS)은 세포에 산화 스트레스를 유발시킨다. 이러한 스트레스는 세포 예정사(programmed cell death)의 원인이 된다. 플라즈마 형성 기체로 헬륨, 아르곤, 질소를 사용하여 각각의 기체에 따른 세포의 형태 변화 및 세포 내 활성 산소 종의 영향을 분석하였다. 실험에 사용된 세포는 인체의 폐암 세포[Human lung cancer cell, A549]이며 플라즈마 처리 후 Intracellular ROS assay를 통하여 플라즈마에서 발생되는 활성 산소 종(Reactive Oxygen Species, ROS)이 세포 내에 들어가 활성 산소 종을 증가시키는 것을 확인하였다. 이때, 플라즈마에서 발생되는 활성 산소 종(Reactive Oxygen Species, ROS)들은 광 방출 스펙트럼(Optical Emission Spectroscopy)로 분석하였고, 기체별로 비교하여 보았다. 또한, 이 때 발생되는 플라즈마의 전류-전압 특성에 따른 optical intensity를 비교하였다.

• Korean Journal of Environmental Biology
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• v.40 no.4
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• pp.641-650
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• 2022

The purpose of this study was to compare the efficiency of air and oxygen injected into the underwater non-thermal dielectric barrier discharge plasma (DBD plasma) device used to remove five types of antibiotics (tetracycline, doxycycline, oxytetracycline, clindamycin, and erythromycin) artificially contained in the fish farm discharge water. The voltage given to generate DBD plasma was 27.8 kV, and the measurement intervals were 0, 0.5, 1, 2, 4, 8, 16 and 32 minutes. Tetracycline antibiotics significantly decreased in 4 minutes when air was injected and were reduced in 30 seconds when oxygen was injected. After the introduction of air and oxygen at 32 minutes, 78.1% and 95.8% of tetracycline were removed, 77.1% and 96.3% of doxycycline were removed, and 77.1% and 95.5% of oxytetracycline were removed, respectively. In air and oxygen, 59.6% and 83.0% of clindamycin and 53.3% and 74.3% of erythromycin were removed, respectively. The two antibiotics showed lower removal efficiency than tetracyclines. In conclusion, fish farm discharge water contains five different types of antibiotics that can be reduced using underwater DBD plasma, and oxygen gas injection outperformed air in terms of removal efficiency.

• Journal of the Korean Ceramic Society
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• v.37 no.9
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• pp.833-838
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• 2000

기존의 핵연료재료 습식처리 공정 대체를 위한 건식 처리 공정 기초 연구로서 산소 플라즈마 기체에 의한 금속우라늄과 이산화우라늄의 산화 연구를 수행하였다. 연구결과 산소 플라즈마를 사용할 경우 $UO_2$는 40$0^{\circ}C$에서 약 300% 정도, 50$0^{\circ}C$에서는 70% 정도의 산화율 증가가 일어났으며 금속우라늄의 경우에도 35$0^{\circ}C$에서 50% 정도의 증가를 확인할 수 있었다. 이들 산화율은 플라즈마 출력이 증가함에 따라 비례적으로 증가하였는데 이는 출력 증가에 따른 플라즈마내 산소 원자의 발생과 일치하여 이러한 산화율 증가 현상은 플라즈마내 산소 원자가 주도하는 것으로 드러났다. 이들 실험 결과는, 기존의 실험 결과와 길이, 시간에 따라 산화량이 선형적으로 증가하는 것으로 나타나 산소 플라즈마 산화 반응은 표면 반응이 주요 반응이라는 것이 밝혀졌다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2003.11a
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• pp.181-184
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• 2003

Low Energy High flux Plasma Source인 Stationary Plasma thruster (SPT)를 이용하여 폴리이미드의 표면개질 후 접촉각과 표면에너지의 변화를 조사하고 접착력과의 관계를 조사하였다. 이온에너지는 180 eV - 200 eV, 이온전류 밀도는 수백 ${\mu}A/cm^2$, 이온선량은 $5\times10^{15}/cm^2$부터, $10\times^{18}/cm^2$로 $Ar^+,\;N_2^+,\;O_2^+$를 이온 주입시켰다. 표면 처리된 폴리이미드에 대한 접촉각 변화는 dual contact anglemeter로 증류수와 에틸렌글리콜을 이용하여 측정하였고, 표면에너지의 변화량을 구하였다. 접촉각의 변화는 아르곤 이온의 경우는 최저 $35^{\circ}$, 질소와 산소의 경우 $1\times10^{17}/cm^2$에서 각각 $14^{\circ},\;10^{\circ}$정도의 전촉각을 보였으며, $5\times10^{17}/cm^2$이상에서는 측정하기 불가능하였다. 산소 이온빔으로 처리된 PI의 표면을 x-ray photoelectron spectroscopy를 통하여 측정하여본 결과, 친수성기가 많이 형성되었음을 확인할 수 있었다. 접촉각 측정으르부터 PI의 표변에너지는 42.1 mN/m에서 아르곤 이온빔의 처리 시 65.2 mN/m로 산소 이온빔의 처리 시 81.2 mN/m로 각각 1.5배, 1.9배 정도 증대하였다. 산소 이온빔으로 처리된 PI 표면위에 스퍼터링으로 300 nm 정도의 clad layer 형성 후 $20{\mu}m$ 정도의 구리 전기 도금막을 형성하여, peel 강도를 측정한 결과 0.79 kg/cm의 강도를 얻을 수 있었다.

• Composites Research
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• v.16 no.4
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• pp.74-79
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• 2003

Comparison of interfacial properties and microfailure mechanisms of oxygen-plasma treated poly(p-phenylene-2,6-benzobisoxazole(PBO. Zylon) and poly(p-phenylene terephthalamide)(PPTA, Kevlar) fibers/ epoxy composites were investigated using micromechanical technique and nondestructive acoustic emission(AE). Interfacial shear strength(IFSS) and work of adhesion, Wa of PBO or Kevlar fibers/epoxy composites increased by oxygen-plasma treatment. Plasma-treated Kevlar fiber shooed the maximum critical surface tension and polar term, whereas the untreated PBO fiber showed the minimum value. Microfibril fracture pattern of plasma-treated Kevlar fiber appeared obviously. Based on the propagation of microfibril failure toward core region. the number of AE events for plasma-treated PBO and Kevlar fibers increased significantly. The results oi nondestructive AE were consistent well with microfailure modes by optical observation in microdroplet and two-fiber composites tests.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.4
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• pp.63-69
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• 1999

The electrical properties of rf-magnetron sputtered $Ba_{0.5}Sr_{0.3}TiO_3$ (BST) capacitors were investigated by varying annealing temperature and atmosphere of the rapid thermal annealing (RTA). The electrical properties of Pt/BST/Pt capacitors were found to strongly depend on the RTA condition. It seems that the dependence of the electrical properties of the Pt/BST/Pt capacitors on the RTA condition is related to the oxygen vacancies in BST thin films. In order to clarify the relation between the oxygen vacancies and the electrical properties of Pt/BST/Pt capacitors, we have examined the two different annealing methods. One annealing method was performed in $O_2$ gas and the other was done in $O_2$-plasma at the same condition of 450$^{\circ}C$, 20 mtorr. It was found that the leakage current densities of $O_2$-plasma annealed capacitor were much lower than those of $O_2$ annealed capacitor. The dielectric constants of $O_2$ annealed capacitor decreased about 14% comparing with those of as-deposited. In contrast, there was no decrease in the dielectric constant of $O_2$-plasma annealed. These results indicate that $O_2$-plasma annealing is very effective in compensation the oxygen vacancies in BST thin films. It can be also concluded that the oxygen vacancies greatly affect the electrical properties of Pt/BST/Pt capacitors.

• Applied Chemistry for Engineering
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• v.30 no.2
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• pp.160-166
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• 2019

In this study, oxygen functional groups were introduced on activated carbon fibers (ACFs) by oxygen plasma treatment to improve the adsorption performance on an acetic acid which is a sick house syndrome induced gas. The active species was generated more as the flow rate of the oxygen gas increased during the plasma treatment. For this reason, the specific surface area (SSA) of the ACFs decreased with much more physical and chemical etching. In particular, the SSA of the sample (A-O60) injected with an oxygen gas flow rate of 60 sccm was reduced to about $1.198m^2/g$, which was about 6.95% lower than that of the untreated samples. On the other hand, the oxygen content introduced into the surface of ACFs increased up to 35.87%. Also, the adsorption performance on the acetic acid gas of the oxygen plasma-treated ACFs was improved by up to 43% compared to that of using the untreated ACFs. It is attributed to the formation of the hydrogen bonding due to the dipole moments between acetic acid molecules and oxygen functional groups such as O=C-O introduced by the oxygen plasma treatment.

• Journal of the Korean Vacuum Society
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• v.20 no.4
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• pp.258-265
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• 2011

A zero-dimensional global model simulator for atmospheric pressure oxygen plasmas has been developed. The simulation model considers the configurations similar to that of plasma needle device. The simulation results show that those species of O, $O_3$, $O_2*$ and ${O_2}^+$ have the highest density in sequence. Electrons dissipate most of their energy through the collisions with oxygen molecules. If the input power increases, the density of most species also increases as much as three-boy collision for the creation of ozone is weakened and hence the density of ozone decreases. The body to volume ratio also affects the plasma density.

• Elastomers and Composites
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• v.37 no.2
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• pp.99-106
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• 2002

In this work, the surface properties and mechanical interfacial properties of the carbon blacks treated by oxygen plasma were investigated. The surface properties of carbon black by oxidation process of oxygen plasma were studied in acid-base surface value, zeta potential, and X-ray photoelectron spectroscopy (XPS). And their mechanical interfacial properties of the carbon black/rubber composites were evaluated by the composite tearing energy ($G_{III}c$). As a result, it was found that the introduction rate of oxygen-containing polar functional groups, such as carboxyl, hydroxyl, lactone, and carbonyl groups, onto the carbon black surfaces was increased by increasing the plasma treatment time. It revealed that the polar rubber, such as acrylonitrile butadiene rubber (NBR), showed relatively a high degree of interaction with oxygen-containing functional groups of the carbon black surfaces, resulting in improving the tearing energy ($G_{III}c$) of the carbon black/acrlyonitrile butadiene rubber composites.