• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.4
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• pp.48-56
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• 1999

In this paper, we have investigated experimentally the effects of initial oxygen concentration on oxygen pileup phenomenon and the diffusion of implanted impurities. 1.2 MeV $^{11}B^{+}$ and 2.2 MeV $^{31}P^{+}$ ions were implanted into p-type (100) Si wafers with a dose of 1${\times}10^{15}$ / $\textrm{cm}^2$. Secondary ion mass spectrometry(SIMS) measurements were carried out to obtain depth distribution profiles for implanted impurities and oxygen atoms after two-step annealing of $700^{\circ}C$(20 hours)+$1000^{\circ}C$(10 hours). Residual secondary defect distribution and annealing behabiour were also studied by cross-sectional transmission electron microscopy(TEM) observations. Oxygen pileup nearly $R_p$(projected range) were observed by SIMS measurements and considerable amount of residual secondary defect layer were observed by TEM observations. It can be seen that oxygen atoms are trapped at the secondary defects by the experimental results. Enhanced diffusions of boron and phosphorus to the bulk direction were observed with the increasing of initial oxygen concentration.

• Resources Recycling
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• v.25 no.2
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• pp.10-16
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• 2016

In this study, the Ni base superalloy was recycled by Argon oxygen decarburization(AOD) process using an inconel 713C scrap. During AOD process, argon gas was continuously injected 1,000 sccm and oxygen gas was injected into 10, 20 and 30 minutes of 100, 250 and 500 sccm.. In early stage of oxygen injection, the oxygen dose increased with increasing Al, Cr, and Mo content and decreasing C content. And Al content was decreased by carburization with added elements in late stage Because of oxidation was occurred with Al, Cr etc. after the reaction of carbon has been finished. From the results, the ratio of ${\gamma}^{\prime}$ phase reduced due to decreasing of Al content for that reason Al is the main element to form the ${\gamma}^{\prime}$ phase. Also carbide reduced owing to decreasing of C content so the mechanical properties of the specimens excessively injected by excess $O_2$ gas were decreased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.384-384
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• 2008

그라핀 기판 제작을 위해서는 그라파이트의 탈착이 가장 핵심 기술이다. 본 연구에서는 신뢰성 있는 그라핀 기판 제작을 위해서, HOPG(Highly Ordered Pyrolytic Graphite) 기판에 고농도의 이온을 주입하고, HOPG를 이형기판에 본딩한후, 후속 열처리를 통해 HOPG를 탈착시켜 그리핀을 얻는 일련의 기본 실험에 대한 결과를 보여 주고자 한다. 기대하는 효과는 고농도의 수소/산소 이온의 경우 주입된 고농도의 수소/산소가 후속 열처리동안 이동 및 뭉침현상을 통해 HOPG기판 내에 수소압력(혹은 CO2 발생)을 증가시켜 HOPG를 자르는 것을 기대하고 있다. 일차 수소이온 주입의 실험결과, 기대와는 달리 $900^{\circ}C$ 열처리에도 절단현상이 발견되지 않아서 산소이온주입에 대한 추가실험을 진행 중이다. 그라핀 본딩의 경우 그라핀의 큰 roughness로 인해 $SiO_2$만의 Fusion 본딩은 불가능함을 여러 실험을 통해 알 수 있었고, 현재 SiO2/SOG 혹은 SiO2/Fox를 이용한 본딩실험을 진행중이다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.81-81
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• 1999

고에너지 이온 주입에 의해 형성되는 결함의 거동을 DLTS(deep level transient spectroscopy)를 통해 조사하였다. 이온 주입에 이용된 기판들은 서로 다른 산소 농도를 가지고 있었으며, B 이온의 주입 농도는 각각 5X10E13 ~ 4X10E14으로 주입 에너지는 1.5MeV였다. 이온 주입에 의해 형성된 buried layer 내의 boron의 농도는 SIMS(secondary ion mass spectroscopy)를 이용하여 측정하였으며, 열처리에 따른 이차 결함의 생성은 TEM(transmission electron microscopy) 및 BMD(bulk micro defect)를 조사함으로써 알 수 있었다. 이온 주입에 의해 형성된 일차 결함의 제거 및 silicon 내부에서의 금속 gettering을 위하여 furnace 및 RTA (rapid thermal annealing)를 이용한 열처리를 행하였다. 이온주입 초기 상태 및 산소의 농도 또는 이온주입의 농도에 따른 결함을 살펴보기 위하여 DLTS를 이용하였으며, 또한 열처리에 따른 이러한 초기 결함들의 거동을 조사하여 TEM 및 BMD 결과와 비교, 분석하였다.

• Korean Journal of Soil Science and Fertilizer
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• v.33 no.6
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• pp.472-481
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• 2000

This experiment used the enclosed bench-scale reactors was conducted to find out optimal aeration rate for reducing the emission of odors and producing the good-quality compost with the mixture of dairy manure and rice straw. The reactors with gas sampler were aerated at four different rates of 0.09, 0.18, 0.90 and $1.79l\;min^{-1}kg^{-1}$dry solids for 574 hours. The oxygen content within composting pile instantly decreased after aeration. Oxygen limitation(below 15%) in the treatments of $0.90l\;min^{-1}kg^{-1}$ and less was exponentially negative relationship with aeration rates and in the range of 35 to 300 hours after aeration. However, the treatment of $1.79l\;min^{-1}kg^{-1}$ didn't show the oxygen limitation. The oxygen consumption rate and the cumulative amount of oxygen consumed by different aeration rates was ranged in $0.80{\sim}1.57O_2g\;h^{-1}\;kg^{-1}VS^{-1}$, $460{\sim}900O_2g\;kg^{-1}VS^{-1}$, respectively, and they were high in the order of 0.90, 1.79, 0.18, $0.09l\;min^{-1}kg^{-1}$. The maximum oxygen consumption rate was estimated in the range of $1.2{\sim}1.3lmin^{-1}kg^{-1}$. The emission concentrations of sulfur compounds such as hydrogen sulfide, sulfur dioxide and methylmercaptan were remarkably high in the initial composting time. Then they were rapidly decreased with the passing of composting time and clearly with increasing aeration rates. Their average concentrations were in the range of 0.03~2.18, 0~0.50, $0.07{\sim}3.38mg\;kg^{-1}$, respectively and high in the order of methylmercaptan, hydrogen sulfide, and sulfur dioxide. Concentrations of sulfur compounds emitted from composting showed exponentially negative relationship at 1% statistically with the oxygen concentration. It was estimated that hydrogen sulfide and methylmercaptan suddenly increased in the level of 5% oxygen concentration and below, that they were little emitted in 15% and over but sulfur dioxide was emitted in the level of 20% oxygen.

• Journal of the Korean Society of Radiology
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• v.13 no.1
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• pp.55-63
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• 2019

It was reported that there were some cases in which signal was not inhibited but high signal appeared in cerebrospinal fluid on FLAIR(fluid attenuated inversion recovery) of MRI(Magnetic Resonance Imaging) in case a person inhales high-concentration oxygen. This study was to prepare basic database. We produced a phantom fixed with agar gel and by using it, obtained the images of the signals of normal saline into which oxygen was injected and normal saline diluted with contrast media by changing the TI(Inversion Time) of FLAIR technique and analyzed them. In the result of FLAIR technique of MRI using Philips Achieva MR 3.0T in Busan P Hospital, the SNR(Signal to Noise Ratio) of normal saline into which oxygen was injected was higher than the SNR of normal saline into which oxygen was not injected. However, it was not higher than the SNR of normal saline diluted with contrast media. In the TI 1,800ms, we could obtain the images which do not have the rise of the signal due to oxygen. In the CNR(Contrast to Noise Ratio) of normal saline into which oxygen was injected and normal saline diluted with contrast media as well, it was higher in the TI 1,800ms than in the TI 2,800ms that is mainly used clinically. It is thought that the result of this study could be basic database for studies on change of signal of cerebrospinal fluid as a result of injection of oxygen in FLAIR technique of MRI.

• Korean Journal of Environmental Biology
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• v.40 no.4
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• pp.641-650
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• 2022

The purpose of this study was to compare the efficiency of air and oxygen injected into the underwater non-thermal dielectric barrier discharge plasma (DBD plasma) device used to remove five types of antibiotics (tetracycline, doxycycline, oxytetracycline, clindamycin, and erythromycin) artificially contained in the fish farm discharge water. The voltage given to generate DBD plasma was 27.8 kV, and the measurement intervals were 0, 0.5, 1, 2, 4, 8, 16 and 32 minutes. Tetracycline antibiotics significantly decreased in 4 minutes when air was injected and were reduced in 30 seconds when oxygen was injected. After the introduction of air and oxygen at 32 minutes, 78.1% and 95.8% of tetracycline were removed, 77.1% and 96.3% of doxycycline were removed, and 77.1% and 95.5% of oxytetracycline were removed, respectively. In air and oxygen, 59.6% and 83.0% of clindamycin and 53.3% and 74.3% of erythromycin were removed, respectively. The two antibiotics showed lower removal efficiency than tetracyclines. In conclusion, fish farm discharge water contains five different types of antibiotics that can be reduced using underwater DBD plasma, and oxygen gas injection outperformed air in terms of removal efficiency.

• Plant Journal
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• v.15 no.3
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• pp.29-34
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• 2019

In the study, the effect of steam injection on syngas productivity was investigated under the constant operating conditions of gasifier oxygen load while the coal feed was fixed and the steam injection flow rate is changed in Taean IGCC plant. The maximum syngas average productivity was found to be at 80 % and 90 % of gasifier oxygen loads with the steam injection flow rate of 0.14 kg/s and 0.15 kg/s per coal burner. Through this study, the syngas productivity was changed by adjusting the steam injection amount and as the steam injection flow rate increased, the syngas productivity increased and then decreased again. The syngas productivity can be increased only by steam injection without supplying additional coal and it is considered that the syngas productivity has different characteristics depending on coal type. Thus it is recommended to operate the gasifier using Carbo-One coal with the steam injection flow rate of about 0.14 kg/s per coal burner when the gasifier oxygen load is 80 % ~ 90 %.

• The Journal of Engineering Geology
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• v.25 no.3
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• pp.339-347
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• 2015

Riverbank filtration has been suggested as a cost-effective method for improving water quality. However, high concentrations of Fe²⁺ and Mn²⁺ cause problems for the use of water and the maintenance of facilities. We evaluated the effectiveness and efficiency of an Fe²⁺ and Mn²⁺ removal technique based on the in situ injection of highly oxygenated water at a site on the Anseong River, between Anseong City and Pyeongtaek City, Gyeonggi Province. The removal process consists of three steps: injection, resting, and extraction. Results show that the removal efficiency increases with repeated application of the process. The amount of Fe-reduced drinking water satisfying water regulations (limit, 0.3 mg/L Fe) obtained using oxygenated water injection was five times higher than the amount of injected oxygenated water. Levels of Mn²⁺ were also reduced following the injection of oxygenated water.

• Electrical & Electronic Materials
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• v.2 no.1
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• pp.25-32
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• 1989

Silicon Nitride, Silicon OxyNitride, Silicon Oxide film을 RF Sputter법으로 제작하였다. RF power 1kw에서 산소 공급량과 기관온도에 따라 제작된 막의 조성을 ESCA로 분석하였으며 산소 공급량과 기판온도의 증가에 따라 막에서의 산소함량이 크게 증가하였다. 또한 막의 밀도, 굴절율, 유전율은 산소함량의 증가에 따라 감소하였고 분극율은 Clausius-Mossotti방정식에서 얻을 수 있었다.