• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.94-97
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• 2003

본 연구에서는 반도체제조에 필수적으로 사용되는 플라즈마장비의 성능을 예측.분석하여 개발 시간 및 비용의 절감과 장비의 성능을 극대화 할 수 있도록 이론적 전산모사 환경(VIP-SEPCAD)을 개발하고 있다. VIP-SEPCAD는 플라즈마의 물리.화학적 특성을 예측하는 plasma model, 중성화학종들의 반응 및 유돈 특성을 예측하는 neutral reaction-transport model, particle의 유동 특성을 예측하는 particle transport model, particle의 생성 및 성장 특성을 예측하는 particle formation-growth model, 식각 또는 증착되는 웨이퍼 표면변화를 예측하는 surface evolution model로 구성되어 있다. 현재 개발된 VIP-SEPCAD를 이용하여 산소 플라즈마의 특성과 각종 화학성분들의 분포를 예측하고 particle의 거동에 대하여 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.412-412
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• 2010

플라즈마는 미세 전기 소자 제작에 있어 박막의 증착, 식각, 세정등 여러 가지 공정에서 널리 사용되고 있다. 미세 소자의 선폭의 감소와 높은 생산성을 위한 웨이퍼 면적의 대형화가 진행됨에 따라 플라즈마의 균일도는 공정 수율 향상의 관점에서 중요한 요소로 그것의 계측과 공정 중 실시간 감시에 필요성이 부각되고 있다. 플라즈마에 존재하는 라디칼의 밀도, 이온의 밀도, 전자 온도 등의 웨이퍼 상에서의 공간 분포와 공정 결과물과의 상관관계에 대한 연구는 현재까지 다양하게 진행 되었으며 특히, 라디칼의 공간 분포가 공정 결과물의 균일도와 큰 상관 관계가 있는 것으로 알려져 있다. 라디칼의 농도 분포를 계측은 레이저 유도 형광법, 발광 분광법, 흡수 분광법 등을 통하여 이루어져 왔으며, 특히 발광 분광법의 경우 계측의 민감성, 편의성등을 이유로 가장 널리 사용되고 있다. 그러나 현재 까지 진행된 발광 분광법을 이용한 라디칼의 공간 분포 계측은 그 자체로 공간 분포를 계측하는 것이 아닌 플라즈마 밀도의 축 대칭성을 가정하여 Abel inversion을 적용하거나, 광섬유를 플라즈마에 직접 삽입하는 방식을 사용하기 때문에 실제 반도체 제작공정을 비롯한 미세소자 공정 플라즈마의 라디칼 밀도 분포를 실시간, 비 접촉 방식으로 계측 하는데 한계가 있다. 본 연구에서는 반도체 공정 플라즈마의 밀도 균일성 분석을 위한 공간 분해 발광 분광기를 제안한다. 기존의 발광 분광법과 비교하여 공간 분해능 향상을 위하여 직렬로 설치된 다수의 렌즈, 개구, 그리고 핀홀을 이용하였다. 공간 분해 발광 분광기의 공간 분해능을 계산하였으며, 실험을 통하여 검증 하였다. 또, HDP CVD를 이용한 $SiO_2$ 박막 증착 공정에서 산소 라디칼의 농도와 증착된 박막의 두께 분포의 상관 관계를 계측 함으로써 공간 분해 발광 분광기의 플라즈마 공정 적용 가능성 입증 하였다.

• Korean Journal of Ecology and Environment
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• v.39 no.1 s.115
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• pp.73-84
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• 2006

The objective of this study was to analyze long-term temporal trends of water chemistry and spatial heterogeneity for 10 sampling sites of the Yeongsan River watershed using water quality dataset during 1995 to 2004 (obtained from the Ministry of Environment, Korea). The water quality, based on multi-parameters of biological oxygen demand (BOD), chemical oxygen demand (COD), conductivity, dissolved oxygen (Do), total phosphorus (TP), total nitrogen (TN) and total suspended solids (TSS), largely varied depending on the sampling sites, seasons and years. Largest seasonal variabilities in most parameters occurred during the two months of July to August and these were closely associated with large spate of summmer monsoon rain. Conductivity, used as a key indicator for a ionic dilution during rainy season, and nutrients of TN and TP had an inverse function of precipitation (absolute r values> 0.32, P< 0.01, n= 119), whereas BOD and COD had no significant relations(P> 0.05, n= 119) with rainfall. Minimum values in conductivity, TN, and TP were observed during the summer monsoon, indicating an ionic and nutrient dilution of river water by the rainwater. In contrast, major inputs of total suspended solids (TSS) occurred during the period of summer monsoon. BOD values varied with seasons and the values was closely associated (r=0.592: P< 0.01) with COD, while variations of TN were had high correlations (r=0.529 : P< 0.01) with TP. Seasonal fluctuations of DO showed that maximum values were in the cold winter season and minimum values were in the summer seasons, indicating an inverse relation with water temperature. The spatial trend analyses of TP, TN, BOD, COD and TSS, except for conductivity, showed that the values were greater in the mid-river reach than in the headwater and down-river reaches. Conductivity was greater in the down-river sites than any other sites. Overall data of BOD, COD, and nutrients (TN, TP) showed that water quality was worst in the Site 4, compared to those of others sites. This was due to continuous effluents from the wastewater treatment plants within the urban area of Gwangju city. Based on the overall dataset, efficient water quality management is required in the urban area for better water quality.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2002.04a
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• pp.133-136
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• 2002

제주도에 내리는 강수의 동위원소 조성의 시공간적인 분포를 파악하고 지하수 함양과의 관련성을 연구하기 위하여, 한라산의 남측과 북측 사면에 8개의 강수채수기를 설치하여 1년 동안 (2000. 9 ~ 2001. 8) 월강수를 채취하였다. 연구기간 동안에 강수량은 남쪽사면이 북쪽사면보다 약 37% 더 많았다. 강수의 산소동위원소 조성은 온도효과를 거의 보이지 않았다. 그러나 여름 강우에는 우량효과가 매우 뚜렷하였다. 고도가 높아지면서 강수의 동위원소 조성이 낮아지는 고도효과가 남측과 북측사면에서 모두 뚜렷이 관찰되었다. 가중평균값으로 볼 때 북측사면 강수의 동위원소 조성이 남측사면 강수보다 약 0.5$^{0}$ $_{00}$ 낮은 것이 관찰되었는데 이는 비그늘효과(rain shadow effect) 때문인 것으로 해석된다. 다른 지역에 비하여 북부지역 지하수 동위원소 조성이 상대적으로 결핍되어 있는 것은 기존 연구 결과처럼 지하수 이동속도가 빠르기 때문에 일어나는 현상이 아니고 지하수로 함양된 강수의 원래의 동위원소 조성을 반영하기 때문인 것으로 해석된다.다.

• Proceedings of the KSRS Conference
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• 2001.03a
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• pp.91-91
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• 2001

현재 진행되고 있다고 여겨지는 지구변화 (Global Change)의 연구는 환경/지구과학의 초미의 관심사로 떠오르고 있다. 특히 온실가스의 분출로 인한 지구 온난화 (Global Warming)는 지구환경에 부정적인 효과가 초래될 것으로 우려되는바, 여러 지구환경 인자들의 변화를 초래할 것으로 예측되고 있다. 가장 직접적인 인자는 대기온도이고 아울러 해수온도/해류, 바람속도/방향, 대기화학 조성, 식생분포, 구름량, 얼음분포 등이 간접적인 인자들이다. 본 연구에서는 EOS 위성군 중 고층대기 연구를 위한 UARS 위성의 HRDI 센서의 자료를 분석하였다. HRDI는 대기성분 중 산소 $O_2$ 발광선의 도플러 변이를 측정하여 바람속도를 측정한다. 이 자료의 분석을 통하여 50~100 km 상공의 바람속도 변화를 지상에서의 OH 발광선 관측치와 비교하였다. 본 연구는 초기 연구로서 정략적이고 보편적인 결과 도출보다는 향후 연구를 위한 기반연구로서의 성격을 갖는다. 지구온난화는 대기의 온도를 상승시키고, 이는 대기 중 에너지의 증가를 불러와 필연적으로 고층대기의 교란 현상이 있을 것으로 예상된다. 앞으로 지구전체 대기의 풍속/풍향의 고도변화가 분석되면 지구온난화에 의한 고층대기 변화가 탐지될 것으로 기대된다.

• Applied Chemistry for Engineering
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• v.25 no.1
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• pp.78-83
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• 2014

In this research, we evaluated the performance and characteristics of carbon supported PtM (M = Ni and Y) alloy catalysts (PtM/Cs) synthesized by a modified polyol method. With the PtM/Cs employed as a catalyst for the oxygen reduction reaction (ORR) of cathodes in proton exchange membrane fuel cells (PEMFCs), their catalytic and ORR activities and electrical performance were investigated and compared with those of commercial Pt/C. Their particle sizes, particle distributions and electrochemically active surface areas (EAS) were measured by TEM and cyclic voltammetry (CV), while their ORR activity and electrical performance were explored using linear sweeping voltammetries with rotating disk electrodes and rotating ring-disk electrodes as well as PEMFC single cell tests. TEM and CV measurements show that PtM/Cs have the compatible particle size and EAS with Pt/C. When it comes to ORR activity, PtM/C showed the equivalent or better half-wave potential, kinetic current density, transferred electron number per oxygen molecule and $H_2O_2$ production(%) to or than commerical Pt/C. Based on results gained by the three electrode tests, when the PEMFC single cell tests were carried out, the current density measured at 0.6 V and maximum power density of PEMFC single cell adopting PtM/C catalysts were better than those adopting Pt/C catalyst. It is therefore concluded that PtM/C catalysts synthesized by modified polyol can result in the equivalent or better ORR catalytic capability and PEMFC performance to or than commercial Pt/C catalyst.

• Clinical and Experimental Pediatrics
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• v.52 no.12
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• pp.1337-1347
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• 2009

Purpose:Taurine (2-aminoethanesulfonic acid) is a simple sulfur-containing amino acid. It is abundantly present in tissues such as brain, retina, heart, and skeletal muscles. Current studies have demonstrated the neuroprotective effects of taurine, but limited data are available for such effects during neonatal period. The aim of this study was to determine whether taurine could reduce hypoxic-ischemic (HI) cerebral injury via anti-apoptosis mechanism. Methods:Embryonic cortical neurons isolated from Sprague-Dawley (SD) rats at 18 days gestation were cultured in vitro. The cells were divided into hypoxia group, taurine-treated group before hypoxic insult, and taurine-treated group after HI insult. In the in vivo model, left carotid artery ligation was performed in 7-day-old SD rat pups. The pups were exposed to hypoxia, administered an injection of 30 mg/kg of taurine, and killed at 1 day, 3 days, 1 week, 2 weeks, and 4 weeks after the hypoxic insult. We compared the expressions of Bcl-2, Bax, and caspase-3 among the 3 groups by using real- time polymerase chain reaction (PCR) and western blotting. Results:The cells in the taurine-treated group before hypoxic insult, although similar in appearance to those in the normoxia group, were lesser in number. In the taurine-treated group, Bcl-2 expression increased, whereas Bax and caspase-3 expressions reduced. Conclusion:Taurine exerts neuroprotective effects onperinatal HI brain injury due to its anti-apoptotic effect. The neuroprotective effect was maximal at 1-2 weeks after the hypoxic injury.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.9 no.2
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• pp.64-72
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• 2004

We measured the vertical profiles of $O_2$, H$_2$S, and pH in sediment pore water beneath marine cage fish farms using a microsensor with a 25 ${\mu}{\textrm}{m}$ sensor tip size. The sediments are characterized by high organic material load. The oxygen consumption, hydrogen sulfide oxidation, and sulfate reduction rates in the microzonations (derived from the vertical distribution of chemical species concentration) were estimated by adapting a simple one-dimensional diffusion-reaction model. The oxygen penetration depth was 0.75 mm. The oxic microzonations were divided into upper and lower layers. Due to hydrogen sulfide oxidation within the oxic zone, the oxygen consumption rate was higher in the lower layer. The total oxygen consumption rate integrated with reaction zone depth was estimated to be 0.092 $\mu$mol $O_2$cm$^{-2}$ hr$^{-1}$ . The total hydrogen sulfide oxidation rate occurring within 0.7 mm thickness was estimated to be 0.030 $\mu$mo1 H$_2$S cm$^{-2}$ hr$^{-1}$ , and its turnover time in the oxic sediment layer was estimated to be about 2 minutes. This suggests that hydrogen sulfide was oxidized by both chemical and microbial processes in this zone. The molar consumption ratio, calculated to be 0.84, indicates that either other electron accepters exit on hydrogen sulfide oxidation, or elemental sulfur precipitation occurs near the $O_2$- H$_2$S interface. Total sulfate reduction flux was estimated to be 0.029 $\mu$mol cm$^{-2}$ hr$^{-1}$ , which accounted for more than 60% of total $O_2$ consumption flux. This result implied that the degradation of organic matter in the anoxic layer was larger than in the oxic layer.

• Journal of Energy Engineering
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• v.22 no.2
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• pp.169-174
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• 2013

An experimental study has been conducted for the design of the regenerative oxy-fuel combustion system with ceramic ball. Various design parameters are considered such as ball size, regenerator weight, and combustion load. Regenerative system with a pair of oxygen burners and regenerators is set up and the temperature of oxygen and exhaust gas passing through ball regenerator is measured. It is shown that the temperature distributions with time are affected by ball diameter and regenerator weight, and the significant temperature change is observed by combustion load. As the ball size decreases and the regenerator weight increases, the regenerating temperature efficiency increases. It is found that the heat recovery ratio is low despites of high regeneration temperature efficiency.

• The Journal of the Acoustical Society of Korea
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• v.24 no.2
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• pp.97-102
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• 2005

Acoustic experiments were performed with Zostera marina to study the characteristics of backscattering of seagrass living in the bottom interface. Field experiments were conducted in the Dongdae man, Namhae for day and night to consider the effects of air-bubble from photosynthesis of seagrass. The multi-frequency (30$\~$120 kHz) responses were measured and the distributions of back scattering strength due to the movement of seagrass were Presented by PDF (probability density function) at 120 120 kHz. The results were shown both the frequency dependence and diurnal variation of the backscattering strength between day and night. This diurnal variation may be caused by the amount of oxygen in dissolved bubbles formed by Photosynthesis of seagrass.