• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.562-562
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• 2013

산소 플라즈마는 음이온을 발생시키는 음전성 플라즈마로서 감광제 세정이나 금속, 폴리실리콘 등의 식각을 위해 할로겐 가스와 혼합하여 반도체나 디스플레이 공정에 광범위하게 사용되고 있다. 산소 플라즈마는 아르곤 플라즈마와 그 특성이 상이하고, 다량의 음이온이 국부적으로 만들어지므로 음이온의 공간분포 진단이 중요하다. 본 연구에서는 평판형 부유형 탐침에 고조화파 분석법을 적용하여 양이온의 밀도를 구하고, 직류 차단 커패시터를 제거하여 접지전위에서 전자 전류 측정을 통하여 위치에 따른 전자의 상대적인 공간 분포를 얻었다. 이러한 방법으로 측정된 양이온과 전자의 공간 분포로부터 음이온의 공간 분포를 구할 수 있었다. 가스 압력, 산소 첨가량, 인가 전력 등 여러 조건에서 측정된 음이온의 분포는 이론적인 경향성과 유사함을 확인할 수 있었다.

• Korean Journal of Materials Research
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• v.2 no.2
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• pp.119-125
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• 1992

Oxygen segregation in horizontal-magnetic-field-applied Czochralski (HMCZ) silicon crystals has been studied as a function of magnetic field strength (B) and crucible rotation rate (C). Along the axis of 57mm din. <100> crystals grown under B=2, 3, 4 kG and C=4-15rpm, the oxygen distribution was usually saw-tooth shaped and fluctuated unevenly. Compared to the conventional CZ method, this result seems to indicate that the horizontal magnetic field, at levels used in the present experiment, had a destabilizing influence on oxygen transport to the growth interface. On the other hand, as C increased, the oxygen fluctuation lessened, and [0] increased overall. At B=2 kG, an oxygen profile in a level of 27-36 ppma was achieved by a programmed ramp of C. Oxygen precipitation behavior of the HMCZ silicon during a simulated device manufacturing process was compared and found to be inferior to that of typical CZ silicon. The uneven oxygen profile in the as-grown state was identified as the major source of poor precipitation uniformity in the HMCZ silicon.

• Ocean and Polar Research
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• v.32 no.4
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• pp.439-448
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• 2010

General consensus on typical vertical profile of dissolved oxygen in the Ulleung Basin is that dissolved oxygen concentration beyond 300 m decreases with increasing depth. However, the results of our observations in 2005 and 2006 revealed three different dissolved oxygen distribution types in the deep layer of the Ulleung Basin. The first type showed oxygen concentration decreasing with increasing depth (Type-1), the second showed oxygen concentration decreasing very sharply near the bottom boundary layer but constant in the bottom adiabatic layer (Type-2), the final was of the oxygen minimum layer above the bottom boundary layer (Type-3). Type-2 was the most common pattern in the Ulleung Basin. Type-1 was most common close to the Japan Basin, including the Ulleung Interplane Gap, while Type-3 was found around Dok do. Oxygen Consumption Rate (OCR) at surface sediment estimated using the dissolved oxygen distribution at the bottom boundary layer was $0.2{\sim}5.8\;mmol{\cdot}m^{-2}d^{-1}$, which coincided with OCR from direct sediment incubation. This implies that organic matter decomposition at surface sediment may play an important role in dissolved oxygen distribution patterns at the bottom boundary layer of the Ulleung Basin.

• Journal of the Korean Ceramic Society
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• v.38 no.8
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• pp.698-704
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• 2001

Doped ceria의 전기전도도는 도핑 원소의 종류와 양에 큰 의존성을 가지고 특정 조성에서 최대 전도도 값을 가지며 높은 dopant 농도에서는 전기전도도는 감소한다. 이런 현상은 dopant와 산소 빈자리 사이의 회합 형성과 관련이 있다고 알려져 있다. 그러나 Gd 이온이 도핑된 ceria의 경우 주된 회합종이 (2G $d_{Ce}$ $V_{o}$ )인지 (G $e_{Ce}$ $V_{o}$ ) 인지는 명확하게 알려져 있지 않다. 본 연구에서는 회합분포가 전기전도도에 미치는 영향을 연구하기 위해 결함의 회합종과 분포가 다른 3가지 경우에 대해서 시뮬레이션을 행하였다. 분자동력학법을 이용하여 다양한 온도와 다른 회합분포의 경우에 대해 산소 확산계수가 계산되어졌으며, 계산된 산소 확산계수는 실험적으로 결정된 bulk 전도도로부터 얻어진 산소 확산계수와 비교되어졌다. 그 결과 (2G $d_{Ce}$ $V_{o}$ )와 (G $e_{Ce}$ $V_{o}$ ) 회합이 공존하며 이들이 통계학적으로 이항 분포를 가지는 경우가 실험적으로 보고된 값과 가장 일치하는 결과를 얻을 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.561-561
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• 2013

볼츠만 관계식을 아르곤과 산소 플라즈마에서 공간상의 전자 전류 측정과 전자에너지 분포함수의 측정을 통해 실험적으로 검증하였다. 전자의 에너지 분포가 볼츠만 관계식을 따를 때, 탐침의 전위를 고정시켜 각 위치마다 측정 할 경우 탐침과 플라즈마 간의 전위차의 감소와 플라즈마 밀도 감소가 서로 상쇄되는 효과로 인해 공간상에서 전자전류가 일정하게 측정이 된다. 또한 볼츠만 관계식을 전자역학적으로 해석할 때, 전자에너지 분포함수의 비국부적 특성을 의미하기 때문에 공간상에서 전자에너지 분포함수가 일정하게 측정된다. 낮은 압력에서 전자전류는 공간상에서 일정하였고, 전자에너지 분포함수 또한 전체 에너지 상에서 일치하는 것을 확인할 수 있었다. 이는 전자가 아르곤과 산소 플라즈마에서 각각의 경우에 볼츠만 관계식을 따르는 것으로 볼 수 있다. 하지만 압력이 높을 때, 산소 플라즈마인 경우 볼츠만 관계식 따르지 않았지만 아르곤 플라즈마에서는 여전히 볼츠만 관계식을 따르는 것을 확인할 수 있었다. 이러한 차이는 산소기체의 경우 분자기체에서 비탄성 충돌을 유발하는 반응들이 다양한 전자에너지 영역에 대해서 존재하여, 전자의 에너지 특성이 비국부적 영역에서 국부적 영역으로 전이가 되기 때문인 것으로 해석할 수 있다. 또한 챔버 벽면으로 빠져나가는 전자에 대해서도 볼츠만 관계식을 실험적으로 검증을 해 보았고, 플라즈마 내에서의 결과와 유사한 경향성을 관찰할 수 있었다.

• 한국해양학회지
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• v.14 no.2
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• pp.67-70
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• 1979

The characteristics of distribution of dissolved oxygen off the east coast of Korea were studied. The oxygen minimum layer was not clearly appeared on the vertical distribution of dissolved oxygen through the year. The dissolved oxygen content of the proper cold water of Japan Sea was 5.1-6.0ml/l which is very higher than those of the North Pacific region, and it means that the speed of transportation of a new and oxygen rich water from surface to deeper layer is relatively fast. Water masses in east coast of Korea can be classified by using of O$\_$2/-Salinity relations.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.2
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• pp.91-95
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• 2000

The effects of argon gas flow on the axial temperature gradient near the interface, the oxygen concentration, and the radial oxygen uniformity was investigated for 8-inch CZ silicon growth. As argon flow rate was increased, the temperature gradient was increased in the crystal near the crystavmelt interface and the oxygen content in the crystal was decreased. But the radial oxygen uniformity was deteriorated. It was found that argon flow is one of the important growing parameters to affect the quality of crystals such as oxygen content and uniformity.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.16 no.3
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• pp.291-297
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• 1983

This paper describes the variations of the distribution of dissolved oxygen in the Japan Sea in summer during 1974-1977. In the Tsushima Current region of the Japan Sea the salinity maxima appears frequently in summer and the dissolved oxygen at the salinity maximum is less than that in the Japan Sea Proper Water. The Japan Sea is divided into three parts with respect to the type of vertical profiles of dissolved oxygen: The southern region of about $35^{\circ}N$ which has low dissolved oxygen similar to those in the Kuroshio region, the Japan Sea Proper Water region, and the area between about $36^{\circ}N$ and $40^{\circ}N$ which has high dissolved oxygen. The ranges of the dissolved oxygen and thermosteric anomaly(${\delta}_T$) at the salinity maximum are roughly between 4.9 and 6.5 m/l and between 210 and 240 cl/t respectively. The most frequent ranges of those values are between 5.5 and 5.7 ml/l and between 230 and 240 cl/t. The northern boundary of the Tsushima Current can be known by the characteristics of the distribuion of dissolved oxygen.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.3
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• pp.406-417
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• 1997

A numerical study was conducted on the optimum magnetic field intensity and asymmetric factor for uniform axial oxygen concentration in 8 inch silicon single crystal growing process by magnetic Czochralski method. For constant shape of cusp field, a change of coil and crucible position were compared. In case of symmetric cusp field, magnetic field intensity variation shows concave downward with crystal growing for uniform, axial oxygen concentration. A numerical results show similar value of standard deviation of average oxygen concentration for uniform oxygen concentration between coil and crucible position change. In case of asymmetric cusp field. asymmetric factor is increased with crystal growing to have uniform oxygen concentration.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.24 no.5
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• pp.303-314
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• 1991

Hypoxic bottom $(\leq2.0ml/l),\;40\%\;oxygen\;saturation)$ is formed in the semi-closed Wonmun bay during summer and autumn early. This study was carried out to know seasonal distribution of marine bacteria and the role of marine bacteria for forming the hypoxic bottom at Wonmun bay during summer and autumn early, 1990. During the study periods, 170 bacterial strains were isolated from sea water and sediment. Viable cell counts were ranged between $10^5-10^7\;cells/ml$. The dominant species were Acinetobacter spp. in spring, Flavobacerium spp. in summer, Pseudomonas spp. in autumn, Serratia spp. in winter. Because ETSA(Electron Transport System Activity) reveals potential consumption of oxygen in the aquatic microorganisms, the ETSA was used as potential consumption of oxygen in this study. The potential consumption of oxygen was in the range of $232.4-637.5{\mu}l/O_2/l/day$ by marine organism and $142.6-432.4{\mu}l/O_2/l/day$ by marine bacteria during the study periods. The ratio of potential oxygen consumption of marine bacteria to total marine microorganism was 0.54. The potential consumption of oxygen by marine bacteria closely related with the number of viable cells. Consequently, bacteria play an important role to form Hypoxic bottom at marine environment.