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ICP 식각 장치에서 GDP 구조 및 유량비율에 의한 플라즈마 균일도 최적화에 대한 수치해석

  • Yang, Won-Gyun;Jeon, Gyeong-Hui;Ju, Jeong-Hun;Nam, Chang-Gil
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.280-280
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    • 2011
  • 유도결합 플라즈마를 이용한 식각 장치에서 플라즈마 균일도 향상에 대한 수많은 연구가 이뤄지고 있다. 안테나의 디자인, 인가 전력과 주파수, 안테나와 기판간의 거리, 기판과 챔버 외벽간의 거리 등 다양한 변수들이 변화되어 왔다. 또한, 최근에는 식각 균일도뿐만 아니라 식각 속도 향상에도 많은 관심이 모아지면서 유동에 영향을 주는 GDP 구조가 다시 중요해지고 있다. 본 연구에서는 300 mm 식각장치를 형상화하고, GDP의 구조와 유량비에 따라 플라즈마의 균일도에 어떻게 영향을 끼지는지 사용 유체역학 전산모사 프로그램인 CFD-ACE+를 이용하여 예측해 보았다. 안테나는 2중 직렬방식으로 안쪽과 바깥쪽의 안테나에 각기 다른 전력을 인가 할 수 있는 구조를 사용했으며, 압력은 10에서 60 mTorr까지 변화시켰다. GDP의 구조는 안쪽 입구와 바깥쪽 입구가 있으며 역시 따로 유량을 조절할 수 있도록 설계하였다. 안쪽 입구는 수직방향을 향하고 있으며, 바깥쪽 입구는 90도 이내의 각을 갖도록 꺾여 있는 것과 수평방향으로 주입할 수 있는 구조, 두 가지를 사용하였다. 유량 비율은 안쪽 입구와 바깥쪽 입구를 2:8, 5:5, 8:2로 고정하였다. 우선 GDP의 구조가 90이내의 각을 갖도록 주입되는 구조에서는 어떤 유량비율에서도 약간의 vortex가 발생했다. 수직방향의 유량이 감소될수록 기판에서 멀리서 발생했으며 강도 또한 감소했다. 기판 표면에서의 압력분포 균일도도 8:2에서 2.8%, 2:8에서 0.6%로 향상되었다. 2:8의 유량 비율에서 압력을 10에서 60 mTorr까지 향상시키면 vortex 효과는 감소되나 기판에서의 압력 균일도가 0.8%까지 약간 나빠졌다. 여기서 발생되는 vortex는 GDP 구조를 수평방향으로 주입되기 함으로서 해결할 수 있었으며, 압력 균일도도 0.2%까지 향상시킬 수 있었다. 또한, 강한 수직방향의 유량은 중심에 발생하는 플라즈마의 중앙을 밀어내는 효과를 확인했으며, 실험적 증명이 추후 연구단계로 진행될 예정이다. 식각 균일도나 식각 속도를 예측하려면 CF계열의 복잡한 가스를 사용해야하기 때문에 유량이 플라즈마에 미치는 영향을 보기 위해서 본 연구에서는 단일종인 Ar 가스만을 사용하였다. 첫 단계로 이와 같이 최적화시킨 유동조건에서 복잡한 식각가스를 이용한 플라즈마 계산은 다음 단계로 준비 중에 있다.

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Biomechanical Application of Plantar Pressure Distribution for Walking on Uneven Rocky Surface (Uneven Rocky Surface 이동 시 압력분포를 적용한 운동역학적 활용)

  • Chung, Yong-Min
    • Korean Journal of Applied Biomechanics
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    • v.19 no.2
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    • pp.387-397
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    • 2009
  • Physical activity has been increased with increased leasure time. Specifically, due to our mountainous geographical benefits, people actively participate in hiking and climbing as regular daily activities. Thus, more stable and comfortable hiking boots are required to walk on uneven and sloped rocky surface for a long period of time. 5 male subjects were recruited for testing planter pressure patterns of four different conditions(barefoot, classic hiking boot, stiffness 60 and stiffness 65). Tested hiking boots(stiffness 60 and stiffness 65) consists of the multiple pieces of outsoles as they are designed for a better shock absorption. In the results, some positive aspects of stiffness 60 and stiffness 65 such as wide contact area and powerful propulsive patterns at take off was observed compared to the classic hiking boots. Therefore, biomechanical development of hiking related clothes and footwear as well as equipment would be beneficial for people who enjoy hiking to maximize their quality of activities.

A Study on the Estimating of the Dump Truck's Travel Speed Based on Analysis of Factors Affecting Earthmoving Operation (운반작업의 영향요소분석을 통한 덤프트럭의 운반속도 산정방법에 관한 연구)

  • Park, Hyeon-Yong;Tae, Yong-Ho;Woo, Sung-Kwon
    • Korean Journal of Construction Engineering and Management
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    • v.8 no.3
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    • pp.97-105
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    • 2007
  • In many construction projects, such as dams, highways, airports, buildings, industrial plants, and sewerage and drainage systems earthmoving operation is defined the movements of a certain quantity of earth to alter the surface configuration or conditions so that projects requirement can be met. Accurate calculation of travel time is essential for determining productivity of earthmoving operations, and for ultimately selecting the most cost-effective fleet configuration for executing the work. Also transportation work that utilizes dump truck consists average So in the whole expenses earthmoving operation, and is an important cost factor for cost management. Therefore this study proposes a methodology for optimum transfer speen based on the analysis of factors affecting earthmoving operation in different road types by collecting the sources of dump truck running speeds and considering the main factors affecting the earthmoving operation.

Earth Pressure Distribution with Rigid Retaining Wall Movements (강성토유벽의 움직임에 따른 토압분포)

  • 강병희;채승호
    • Geotechnical Engineering
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    • v.5 no.1
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    • pp.47-60
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    • 1989
  • Lateral earth Pressure distributions due to the ,randy soil backfill behind the rigid vertical walls for three different wall movement modes are obtained by the elasto-plastic finite element analys of soil deformation, and these earth pressures are compared with both Rankine's and Dubrova's active earth pressures. Thereby, the effects of the magnitude and the mode of wall displacement on the earth pressure distribution are investigated. Three different modes of wall movement considered in this study are the rotation about bottom, the rotation about top and the translation. For the case of the wall rotation about top, the earth pressure distribution is shown as a reverse S-curve-shaped distribution due to the arching effect. Consequently, the point of application of the lateral thrust is much higher than one-third of the wall height from the base. And, comparing the other modes of wall movement, the magnitude and the point of appliestion of the lateral thrust for the wall rotation about top are larger and higher, respectively. The wedge-shaped plastic zone in the backfill at active failure is developed only for the mode of wall rotation about bottom. The lateral earth pressure distributions on the walls with inclined backfill of several different slopes are shown for the mode of wall rotation about bottom.

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DFabrication of $GdAlO_3$ Buffer Layers by Sol-Gel Processing (졸-겔법에 의한 $GdAlO_3$ 버퍼층의 제조)

  • Bang, Jae-Cheol
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.5
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    • pp.801-804
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    • 2006
  • [ $GdAlO_3(GAO)$ ] buffer layer for $YBa_2Cu_3O_{7-{\delta}}(YBCO)$ coated superconductor wire was fabricated by sol-gel processing. Precursor solution was prepared by dissolving 1:1 stoichiometric quantaties of gadolinium nitrate hexahydrate and aluminum nitrate nonahydrate in methanol. The solution was spin-coated on $SrTiO_3(STO)$(100) single crystal substrates and heated at $1000^{\circ}C$ for 2h in wet $N_2-5%\; H_2$, atmosphere. A SEM(scanning electron microscopy) observation of the surface morphology of the GAO layer has shown that it has a faceted morphology indicating epitaxy. It was shown from x-ray diffraction(XRB) that GAO buffer layer was highly c-axis oriented epitaxial thin film with both good out-of-plane($FWHM=0.29^{\circ}$ for the (002) reflection) and in-plane ($FWHM=1.10^{\circ}$ for the {112} reflection) alignment.

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Radio Path Loss and Angle of Arrival Measurements to the Radio Environments at 60GHz (60GHz 대역에서의 전파 환경별 경로손실 및 도래각 측정)

  • Song, Ki-Hong
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.11 no.12
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    • pp.2233-2240
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    • 2007
  • This paper presents the measured path loss exponents and standard deviations using measured data at 60GHz to analyze the propagation characteristics of millimeter wave bands having great demand for picocellular communications. In addition the angle of arrival(AOA) were measured to analyze the arrival direction of muitipath waves affecting the received signal strength. As results of analysis, the pathloss exponents in each environment are found to be lower than 2 for free space pathloss exponent. They were determined with the qualities of bottom materials affecting signal strength. The angles of arrival by multipath waves were different with the circumference structures between transmitter and receiver. That is, the multipath waves excluding direct and ground reflected wave were difficult to find in wide space such a gymnasium and playground, however the wall multipath waves were found to arrive at receiver in the corridor. The multipath waves at 60GHz can be known to hardly affect to the received signal strength because of weak signals compared with direct wave.

Effects of Film Thickness and Annealing Temperature on the Specific Contact Resistivity and the Transmittance of the IZO Layers Grown on p-GaN by Roll-to-Roll Sputtering (p-GaN 위에 Roll-to-Roll sputter로 성장된 IZO의 접촉 비저항 및 투과도에 대한 박막 두께와 열처리 온도의 영향)

  • Kim, Jun Young;Kim, Jae-Kwan;Han, Seung-Cheol;Kim, Han Ki;Lee, Ji-Myon
    • Korean Journal of Metals and Materials
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    • v.48 no.6
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    • pp.565-569
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    • 2010
  • We report on the characteristics of indium-oxide-doped ZnO (IZO) ohmic contact to p-GaN. The IZO ohmic contact layer was deposited on p-GaN by a Roll-to-Roll (RTR) sputter method. IZO contact film with a thickness of 360, 230 and 100 nm yielded an ohmic contact resistance of $4.70{\times}10^{-4}$, $5.95{\times}10^{-2}$, $4.85{\times}10^{-1}\;{\Omega}cm^{2}$ on p-GaN when annealed at $600{^{\circ}C}$ for 1 min under a nitrogen ambient, respectively. While the transmittance of IZO film with a thickness of 360 nm slightly increased in the wavelength range of 380-800 nm after annealing, the transmittance rapidly increased up to 80% after annealing at $600{^{\circ}C}$ in the wavelength range of 380~430 nm because the crystallization of IZO film and created Ga vacancies near the p-GaN surface region were affected by the annealing. These results indicate that ohmic contact resistance and transmittance of the IZO films improved.

Retrieval of the Fraction of Photosynthetically Active Radiation (FPAR) using SPOT/VEGETATION over Korea (SPOT/VEGETATION 자료를 이용한 한반도의 광합성유효복사율(FPAR)의 산출)

  • Pi, Kyoung-Jin;Han, Kyung-Soo
    • Korean Journal of Remote Sensing
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    • v.26 no.5
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    • pp.537-547
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    • 2010
  • The importance of vegetation in studies of global climate and biogeochemical cycles is well recognized. Especially. the FPAR (fraction of photosynthetically active radiation) is one of the important parameters in ecosystem productivity and carbon budget models. Therefore, accurate estimates of vegetation parameters are increasingly important in environmental impact assessment studies. In this study, optical FPAR using the Terra MODIS (MODerate resolution Imaging Spectroradiometer), SPOT VEGETATION and ECOCLIMAP data reproduced on the Korean peninsula. We applied the empirical method which is usually estimated as a linear or nonlinear function of vegetation indices. As results, we estimated the accurate expression which is 0.9039 of $R^2$ in cropland and 0.7901 of $R^2$ in forest. Finally, this study could be demonstrated to calibrate that produced FPAR while the overall pattern and random noise through the comparative analysis of FPAR on the reference data. Optimal use of input parameter on the Korean peninsula should be helping the accuracy of output as well as the improved quality of research.

Design of a Thrust Stand Using Flexure (플렉셔를 적용한 추력 시험대 설계)

  • Jin, Juneyub;Park, Youngseok;Lee, Changwook;Jeong, Sangseop;Lee, Juhyung;Baek, Cheulwoo
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.49 no.3
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    • pp.205-212
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    • 2021
  • In this study, two types of thrust stand modeling were proposed for the design of a thrust stand using flexure. Type A model generate combined load for tangential (thrust) and axial compressive load (self weight). And type B generate combined load for tangential and axial tensile load. The research was done by comparing the influence of the load between the models through a 1D calculation and computational analysis. The 1D calculated value and the computational analysis value were compared for a total of 10 sections and the results were confirmed to be very similar. In order to prove the validity of the analysis results, the equivalent stress was confirmed from the computational analysis of the flexure, and the production of the Type B model was selected from the evaluation of the yield condition (Von-Mises Yield Criterion).

GSSHA 지하수 모의를 위한 대수층 깊이 공간 분포 기법 연구

  • Jea-Whan Shin;Tae-Hee Yoon;Young-Seok Lee;Suk-Hwan Jang
    • Proceedings of the Korea Water Resources Association Conference
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    • 2023.05a
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    • pp.522-522
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    • 2023
  • 지하수 시스템의 방출은 저지대 강에서 건조기에 흐르는 하천 유지유량의 원천이 된다. 수자원 분야에서 분포형 모형이 도입되며 수문 분석의 고도화가 이루어지고 있는 오늘날에도, 아직 대수층 깊이 등 지하수관련 매개변수에 대한 연구는 미진한 실정이다. 본 연구는 분포형 모형의 지하수 관련 매개변수 중 지형자료에 해당하는 대수층 깊이의 물리적인 분포형태를 예측하고, 지하수 모의결과를 검토하여 해당 기법의 적용성을 확인하였다. 본 연구에서는 북측의 미계측 유역을 포함한 소양강 유역을 연구대상 지역으로 설정하였고, 정밀한 분포형 모형인 GSSHA(Gridded Surface Hydrologic Analysis)를 활용하였다. 대수층 깊이 추정 방법은 크게 세가지 시나리오로 구분하여 모의를 진행하였다. 유역의 지하수 데이터를 통해 도출된 대수층깊이 등분포(시나리오1), 지표 고도와 대수층 깊이의 선형 반비례 관계를 가정한 선형 회귀식(시나리오2), 동일한 가정을 두고 Log차원에서 회귀식을 적용한 경우(시나리오 3). 위 3가지 시나리오를 통해 산정된 유출량과, 지하수 수위 등을 소양강댐 유입량 자료 및 유역 내 6개 지하수 관측소를 대상으로 결과를 비교하여 적용성을 확인하였다. 시나리오별 유출량 모의 오차평가 결과, 관측 첨두 유량을 가장 잘 반영하고 있는 기법은 일반적으로 선행 연구에서 많이 활용하고 있는 등분포형 기법으로 분석되었으며, 과소·과대 모의된 정도를 나타내는 지표와 모형의 효율성을 나타내는 지표는 선형 회귀분석 기법이 가장 우수한 결과로 분석되었다. 따라서, 대수층 깊이를 등분포하여 모의하던 기존 방식에 비해 지면고도-대수층깊이 간의 반비례 관계를 적용하는 방식이 지하수 모의에 있어서 보다 합리적일 것으로 판단된다. 향후 임의의 인자와 대수층 깊이간의 정밀한 회귀관계를 도출한다면 더욱 합리적이고 신뢰성 높은 결과를 얻을 수 있을것으로 기대된다. 또한 유역 단위의 지하수 모의가 정밀하게 이루어진다면 최근 많은 관심이 집중되는 하천 유지유량과 건기 유출 등의 연구 분야에도 많은 기여를 할 수 있을 것으로 기대된다.

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