• Title/Summary/Keyword: 비절연

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ECR-PECVD 방법으로 제작된 DLC 박막의 기판 Bias 전압 효과

  • 손영호;정우철;강종석;정재인;황도원;김인수;배인호
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.188-188
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    • 2000
  • DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

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Comparison of meridians electric response property for laser and acupuncture stimulation (레이저자극과 수기자극에 대한 경락전기반응 특성비교)

  • Lee, Yong-Heum;Ryu, Yeon-Hang;Jung, Byoung-Jo;Shin, Tae-Min
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.11 no.12
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    • pp.2335-2342
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    • 2007
  • Laser stimulation has been widely studied and used in clinic. However, electrical response by laser stimulation on meridians has not been investigated. In this study, we compared electric potential of laser and acupuncture stimulation on meridians. We measured electric potential variation at acupoints(Samgan(LI3) and Hapgok(LI4)) on Large Intestine Meridian. In laser stimulation results, average peak electric potential is very low($7.53{\pm}3.44{\mu}V$) for before and after stimulation. However, acupuncture stimulation was performed in ground connection condition and resulted in huge variation of average peak electric potential($2.65{\pm}1.53mV$). That is, the intensity and pattern of electric potential were dependent on the ground connection condition and individual. Also, the electric potential pattern was very similar to the pattern of electric charge and discharge of capacitor. The acupuncture stimulation using a insulating needle resulted in lower average peak electric potential variation($0.25{\pm}0.16mV$) than that of acupuncture stimulation. It might present little electrical response of acupuncture stimulation using insulating needles. In point of electrical response, the laser stimulation was determined to be no acupuncture effect at meridian. Acupuncture stimulation seems to be most effective method to induce electrical response at meridians. The procedure and effect of acupuncture might be considered as energy consensus phenomenon by transportation of bio-ion charge between a practitioner and patient.

A Study on the Flame Retardance and Electrical Properties of Silicone Composites (실리콘 복합체의 내화 및 전기 특성에 관한 연구)

  • Lee, Sung-Ill;Lee, Hae-Joon
    • Elastomers and Composites
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    • v.38 no.3
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    • pp.227-234
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    • 2003
  • Silicone composites for high voltage insulator (HVI SC) were prepared by adding aluminum trihydrate(ATH) treated by surface treatment agent to base silicone compound at the ratio oi 100:20, 100:40, 100:60, 100:80, and 100:100, respectively And also, ATH was treated by various surface treatment agents, such as stearic arid, acryl silane, and vinyl silane under compounding process. Mechanical properties and electrical properties were investigated for the various contents of ATH and surface-treatment agents. Mechanical properties such as tensile strength, elongation, and tear strength decreased as the load of ATH increased. Volume resistivity, AC break down strength, and tracking resistance for HVI SC containing ATH treated by vinyl silane were better than those for HVI SC containing ATH treated by other surface treatment agents, such as stearic acid and acryl silane. Polymer-filler interaction of silicone composites according to surface treatment agents was studied by measuring bound rubber contend(BR). From the experimental results, BR of silicone composite containing ATH treated with vinyl silane was higher than that of the others. The degree of rule for silicone composite was investigated using Rheometer. Maximum torque of silicone composites contaning ATH treated with vinyl silane was higher than that of silicone composite contaning ATH treated with other surface agents.

Quantification of Rockwool Substrate Water Content using a Capacitive Water Sensor (정전용량 수분센서의 배지 함수량 정량화)

  • Baek, Jeong-Hyeon;Park, Ju-Sung;Lee, Ho-Jin;An, Jin-Hee;Choi, Eun-Young
    • Journal of Bio-Environment Control
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    • v.30 no.1
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    • pp.27-36
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    • 2021
  • A capacitive water sensor was developed to measure the capacitance over a wide part of a substrate using an insulated electrode plate (30 cm × 10 cm) with copper and Teflon attached on either side of the substrate. This study aimed to convert the capacitance output obtained from the condenser-type capacitance sensor into the substrate water content. The quantification experiment was performed by measuring the changes in substrate water weight and capacitance while providing a nutrient solution and by subsequently comparing these values. The substrate water weight and capacitance were measured every 20 to 30 seconds using the sensor and load cell with a software developed specifically for this study. Using a curve-fitting program, the substrate water content was estimated from the output of the capacitance using the water weight and capacitance of the substrate as variables. When the amount of water supplied was increased, the capacitance tended to increase. Coefficient of variation (CV) in capacitance according to the water weight in substrate was greater with the 1.0 kg of water weight, compared with other weights. Thus, the fitting was performed with higher than 1.0 kg, from 1.7 to 6.0 kg of water weight. The correlation coefficient between the capacitance and water weight in substrate was 0.9696. The calibration equation estimated water content from the capacitance, and it was compared with the substrate water weight measured by the load cell.

Development of Environmentally Friendly Backfill Materials for Underground Power Cables Considering Thermal Resistivity (열 저항특성을 고려한 지중송전관로 친환경 되메움재 개발)

  • Kim, Daehong;Oh, Gidae
    • Journal of the Korean GEO-environmental Society
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    • v.12 no.1
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    • pp.13-26
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    • 2011
  • Because the allowable current loading of buried electrical transmission cables is frequently limited by the maximum permissible temperature of the cable or of the surrounding ground, there is a need for cable backfill materials to be maintained at a low thermal resistivity during the service period. Temperatures greater than $50^{\circ}C$ to $60^{\circ}C$ may lead to breakdown of cable insulation and thermal runaway if the surrounding backfill material is unable to dissipate the heat as rapidly as it is generated. This paper describes the results of studies aimed at the development of backfill material to reduce the thermal resistivity. A large number of different additive materials were tested to determine their applicability as a substitute material. The results of Dong-rim river sand (relatively uniform) show that as water content level increases, thermal resistivity tends to decrease, whereas the thermal resistivity on dry condition is very high value($260^{\circ}C-cm/watt$). In addition, other materials(such as Jinsan granite screenings, A-2(sand and gravel mixture), E-1(rubble and granite screenings mixture) and SGFC(sand, gravel, fly-ash and cement mixture)) are well-graded materials with low thermal resistivity($100^{\circ}C-cm/watt$ when dry). Based on this research, 4 types of improved materials were suggested as the environmentally friendly backfill materials with low thermal resistivity.

Effects of Activator on Rubber Characteristics for Gasket to Lithium Ion Battery (리튬 이온 전지용 개스킷 고무 물성에 미치는 가교조제의 영향)

  • Kang, Dong-gug;Kim, Hye-young;Kang, Young-im;Hur, Byung-ki;Seo, Kwan-ho
    • Applied Chemistry for Engineering
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    • v.22 no.4
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    • pp.395-399
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    • 2011
  • Material of the gasket for lithium ion battery requires the chemical resistance, the electrical insulting property, the compression set, the anti-contamination level and the low temperature resistance. We compounded ethylene propylene diene monomer (EPDM), which showed widely different solubility parameter index, with adjusting the amount of metal oxide as an activator. We did long-term test and compression set against an electrolyte with consideration for operating conditions in lithium-ion battery. In these tests, we checked the physical, chemical characteristics and the effect to lithium ion battery with different kinds of activators. In case of rubber with ZnO as an activator, through 1000 h depositing test in propylene carbonate which is one of representative solvents, we could get the satisfying characteristics and result. However, $Zn^{2+}$ had eluted in the ion elution test. So, ZnO should be limited in EPDM compound for the gasket material in lithium-ion battery.

Experimental Study of Flip-Bucket Type Hydraulic Energy Dissipator on Steep slope Channel (긴구배수로 감세공의 Filp Bucket형 이용연구)

  • 김영배
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.13 no.1
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    • pp.2206-2217
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    • 1971
  • Spillway and discharge channel of reservoirs require the Control of Large volume of water under high pressure. The energies at the downstream end of spillway or discharge channel are tremendous. Therefore, Some means of expending the energy of the high-velocity flow is required to prevent scour of the riverbed, minimize erosion, and prevent undermining structures or dam it self. This may be accomplished by Constructing an energy dissipator at the downstream end of spillway or discharge channel disigned to dissipated the excessive energy and establish safe flow Condition in the outlet channel. There are many types of energy dissipators, stilling basins are the most familar energy dissipator. In the stilling basin, most energies are dissipated by hydraulic jump. stilling basins have some length to cover hydraulic jump length. So stilling basins require much concrete works and high construction cost. Flip bucket type energy dissipators require less construction cost. If the streambed is composed of firm rock and it is certain that the scour will not progress upstream to the extent that the safety of the structure might be endangered, flip backet type energy dissipators are the most recommendable one. Following items are tested and studied with bucket radius, $R=7h_2$,(medium of $4h_2{\geqq}R{\geqq}10h_2$). 1. Allowable upstream channel slop of bucket. 2. Adequate bucket lip angle for good performance of flip bucket. Also followings are reviwed. 1. Scour by jet flow. 2. Negative pressure distribution and air movement below nappe flow. From the test and study, following results were obtained. 1. Upstream channel slope of bucket (S=H/L) should be 0.25<H/L<0.75 for good performance of flip bucket. 2. Adequated lip angle $30^{\circ}{\sim}40^{\circ}$ are more reliable than $20^{\circ}{\sim}30^{\circ}$ for the safety of structures.

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Characteristics of the ( Pb, La ) $TiO_3$ Thin Films with Pb/La Compositions (Pb/La 조성에 따른 ( Pb, La ) $TiO_3$ 박막의 특성 변화)

  • Kang, Seong-Jun;Joung, Yang-Hee;Yoon, Yung-Sup
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.1
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    • pp.29-37
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    • 1999
  • In this study, we have prepared PLT thin films having various La concentrations by using sol-gel method and studied on the effect of La concentration on the electrical properties of PLT thin films. As the La concentration increases from 5mol% to 28mol%, the dielectric constant at 10kHz increases from 428 to 761, while the loss tangent decreases from 0.063 to 0.024. Also, the leakage current density at 150kV/cm has a tendency to decrease from 6.96${\mu}A/cm^2$ to 0.79${\mu}A/cm^2$. In the result of hysteresis loops of PLT thin films, the remanent polariation and the coercive field decrease from 9.55${\mu}C/cm^2$ to 1.10${\mu}C/cm^2$ and from 46.4kV/cm to 13.7kV/cm, respectively. With the result of the fatigue test on the PLT thin films, we have found that the fatigue properties are improved remarkably as the La concentration increases from 5 mol% to 28mol%. In particular, the PLT28) has paraelectric phase and its charge storage clensity and leakage current density at 5V are 134fC/${\mu}cm^2$ and 1.01${\mu}A/cm^2$, respectively. The remanent polarization and coercive field of the PLT(10) film are 6.96${\mu}C/cm^2$ and 40.2kV/cm, respectively. After applying of $10^9$ square pulses with ${\pm}5V$, the remanent polarilzation of the PLT(10) film decreases about 20% from the initial state. In the results, we conclude that the 10mol% and the 28mol% La doped PLT thin films are very suitable for the capacitor dielectrics of new generation of DRAM and NVFRAM respecitively.

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Recovery of $SF_6$ gas from Gaseous Mixture ($SF_6/N_2/O_2/CF_4$) through Polymeric Membranes (고분자 분리막을 이용한 혼합가스($SF_6/N_2/O_2/CF_4$)로부터 $SF_6$의 회수)

  • Lee, Hyun-Jung;Lee, Min-Woo;Lee, Hyun-Kyung;Choi, Ho-Sang;Lee, Sang-Hyup
    • Membrane Journal
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    • v.21 no.1
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    • pp.22-29
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    • 2011
  • During the maintenance, repair and replacement process of circuit breaker, $SF_6$ reacted with input air in arc discharge, which led to the production of by-product gases (eg, $N_2$, $O_2$, $CF_4$, $SO_2$, $H_2O$, HF, $SOF_2$, $CuF_2$, $WO_3$). Among these various by-product gases, $N_2$, $O_2$, $CF_4$ is major component. Therefore, the effective separation process is necessary to recycle the $SF_6$ gas from the mixture gas containing $N_2$, $O_2$, $CF_4$. In this study, the membrane separation process was applied to recycle the $SF_6$ gas from the mixture gas containing $N_2$, $O_2$, $CF_4$. The concentration of $SF_6$ gas in gas produced from the electric power industry is over than 90 vol%. Therefore, we made the simulated gas containing $N_2$, $O_2$, $CF_4$, $SF_6$ which the concentration of $SF_6$ gas is minimum 90 vol%. From the results of membrane separation process of $SF_6$ gas from $N_2$, $O_2$, $CF_4$ $SF_6$ mixture gases, PSF membrane shown the highest recovery efficiency 92.7%, in $25^{\circ}C$ and 150 cc/min of retentate flow rate. On the other hand, PC membrane shown the highest recovery efficiency 74.8%, in $45^{\circ}C$ and 150 cc/min of retentate flow rate. Also, the highest rejection rate of $N_2$, $O_2$, $CF_4$ is 80, 74 and 58.9% seperately in the same operation condition of highest recovery efficiency. From the results, we supposed the membrane separation process as the effective $SF_6$ separation and recycle process from the mixture gas containing $N_2$, $O_2$, $CF_4$, $SF_6$.

Metal Oxides Decorated Carbon Nanotube Freestanding Electrodes for High Performance of Lithium-sulfur Batteries (고성능 리튬-황 전지를 위한 금속산화물을 첨가한 탄소나노튜브 프리스탠딩 전극)

  • Yun Jung Shin;Hyeon Seo Jeong;Eun Mi Kim;Tae Yun Kim;Sang Mun Jeong
    • Korean Chemical Engineering Research
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    • v.61 no.3
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    • pp.426-438
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    • 2023
  • Lithium-sulfur batteries, recently attracting attention as next-generation batteries, have high energy density but are limited in application due to sulfur's insulating properties, shuttle phenomenon, and volume expansion. This study used an economical and simple vacuum filtration method to prepare a freestanding electrode without a binder and collector. Carbon nanotubes (CNTs) are used to improve the electrical conductivity of sulfur, where CNT also acts as both collector and conductor. In addition, metal oxides (MOx, M=Ni, Mg), which are easy to adsorb lithium polysulfide, are added to the CNT/S electrode to suppress the shuttle reaction in lithium-sulfur batteries, which is a result of suppressing the loss of active sulfur material due to the excellent adsorption of lithium polysulfide by metal oxides. The MOx@CNT/S electrode exhibited higher capacity characteristics and cycle stability than the CNT/S electrode without metal oxides. Among the MOx@CNT/S electrodes, the NiO@CNT/S electrode displayed a high discharge capacity of 780 mAh g-1 at 1 C and an extreme capacity decrease to 134 mAh g-1 after 200 cycles. Although the MgO@CNT/S electrode exhibited a low discharge rate of 544 mAh g-1 in the initial cycle, it showed good cycle stability with 90% of capacity retention up to 200 cycles. Further, to achieve high capacity and cycle stability, the Ni0.7Mg0.3O@CNT/S electrode, mixed with Ni:Mg in the ratio of 0.7:0.3, manifested an initial discharge rate of 755 mAh g-1 (1 C) and a capacity retention rate of more than 90% after 200 cycles. Therefore, applying binary metal oxides to CNT/S provides a freestanding electrode for developing economical and high-performance Li-S batteries, effectively improving lithium polysulfide's high capacity characteristics and dissolution.