Effects of Process Variables on the Microstructure and Gas Sensing Characteristics of Magnetron Sputtered $\textrm{SnO}_2$ Thin Films
(마그네트론 스퍼터링 증착 조건에 따른 $\textrm{SnO}_2$ 박막의 미세구조와 가스검지특성 변화)
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- Korean Journal of Materials Research
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- v.9 no.11
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- pp.1083-1087
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- 1999