• 대한방사선방어학회:학술대회논문집
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• 2011.04a
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• pp.50-51
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• 2011

• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.73-80
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• 2006

Thermally-driven effusion of inert gases out from Si(100), into which energetic $\~l keV\;He^+,\;Ne^+,\;A^r+,\;and\;Kr^+ ions$ had been implanted at a moderate substrate temperatures of $\~400 K$, was investigated by means of temperature-programmed desorption (TPD) mass spectrometry. While He effused out broadly over $500\~1,100 K$, Ne, Ar, and Kr effusion occurred sharply at 810, 860, and 875 K, respectively. Hydrogen adsorption/desorption analysis for the ion-treated Si(100) surfaces indicated minimal to severe damage by ions with increasing mass from He to Kr. Implications of these results in light of literature reports are discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 1993.02a
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• pp.115-115
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• 1993

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2011.05a
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• pp.119-120
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• 2011

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.139.1-139.1
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• 2014

구연산 전처리 후 진공 중 산화처리를 한 스테인레스강 진공용기에 비증발성 게터(NEG)와 스퍼터 이온펌프의 조합을 사용하여 낮은 10의 -12 mbar의 극고진공에 도달하였다. 실험에 사용된 진공용기의 기체방출률은 기존의 일반 스테인레스강 진공용기에 비해 15배 이상 낮은 것으로 측정되었다. 극고진공에 도달하기 위해 수소에 대한 배기속도가 높은 NEG 펌프를 주 펌프로 사용하였으며 스퍼터 이온펌프는 NEG가 배기하지 못하는 무극성 또는 불활성 기체를 배기하는 보조펌프로 작용하도록 하였다.

• Journal of the Korean Society of Propulsion Engineers
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• v.19 no.1
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• pp.9-17
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• 2015

The basic flow configuration is composed of a plane, double shear layer where relatively thin mid gas layer is sandwiched between air and fuel stream. The present study describes numerical investigations concerning the combustion enhancement according to a variation of mid layer thickness. In this case, the effect of heat release in turbulent mixing layers is important. For the numerical solution, a fully conservative unsteady $2^{nd}$ order time accurate sub-iteration method and $2^{nd}$ order TVD scheme are used with the finite volume method including k-${\omega}$ SST model. The results consists of three categories; single shear layer consists of fuel and air, inert gas sandwiched between fuel and air, cold fuel gas sandwiched between fuel and air. The numerical calculations has been carried out in case of 1, 2, 4 mm of mid layer thickness. The height of total gas stream is 4 cm. The combustion region is broadened in case of inert gas layer of 2, 4 mm thickness and cold fuel layer of 4 mm thickness compared with single shear layer.

• Fire Science and Engineering
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• v.17 no.2
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• pp.43-49
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• 2003

For the inert gases of Ar, $N_2$and $CO_2$, the empirical equations of the gas mixture were correlated in terms of saturated pressure, density and viscosity. They were obtained by regression analysis based on the mixing rule. The empirical equation of saturated pressure was assumed as the first order function of temperature. The empirical form of density was expressed as compressibility factor and saturated pressure while the empirical equation of viscosity was formulated as a power function of temperature. This empirical equations of the physical properties were obtained in the composition of Ar, $N_2$and $CO_2$, 40/50/10(mol. %).

• Journal of the Korean Vacuum Society
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• v.11 no.2
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• pp.108-112
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• 2002

We investigated the secondary electron emission characteristics of MgO layer used as the protecting material in a.c. plasma display panel(a.c.-PDPs) using a pulsed ion beam technique, where the surface charging can be effectively suppressed during the measurement. The measurement of the secondary electron emission coefficients ($\gamma$) on the surface of $SiO_2$ was carried out and then, it was found that the yields were dependent on incident ion energies. In addition, it was clearly demonstrated that the sputtering on MgO surface leads to lower yields, which suggests that the surface plays a key role on the operating conditions, such as life time, fast response, and etc.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.217-217
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• 2011

플라즈마를 이용하는 식각 및 증착등의 반도체공정에 있어서 최근에는 기판의 크기가 점차 증가하는 추세에 있다. 이러한 대면적 플라즈마 발생장치 내에서 플라즈마 밀도와 라디칼 농도의 공간적인 특성을 이해하는 것에 대한 중요성이 더해지고 있다. 이를 위해 Langmuir probe와 같은 전기적 접근법에 의한 진단방법이나 광학적 접근법에 의한 진단방법에 대한 연구가 이루어 졌다. 전기적 접근법에 의한 플라즈마의 진단방법은 원리가 간단하고 정확도가 높다는 장점이 있지만 진단 장치에 의한 플라즈마의 간섭이 크고 식각가스의 경우 진단이 어렵다는 단점이 있다. 그에 비해 광학적 진단방법은 플라즈마에 간섭이 많지 않은 방법으로 알려져 있고 레이저 형광법(LIF), 원적외선 레이저 흡수 분광법(IR laser Absorption Spectroscopy), 광량측정법(Actinometry)등이 있다. 이 중 레이저 형광법, 원적외선 레이저 흡수 분광법의 경우, 진단장치가 매우 복잡하고 가격이 비싸다는 단점을 가지고 있다. 반면 광량측정법의 경우 다른 광학적 접근법에 의한 진단방법에 비해 원리와 실험장치가 간단하고 공간적인 라디칼 분포의 진단이 쉽다는 점에서 장점을 가지고 있다. Actinometry는 Ar과 같은 불활성 기체를 작은 비율을 넣어서 여기 된 불활성 기체의 파장세기와 여기 된 측정 라디칼의 파장세기의 비교를 통해 상대밀도를 측정하는 방법이다. 이 측정 방법에 Abel's inversion equation을 적용함으로 해서 대면적 M-ICP(Magnetized - Induced Coupled Plasma)에서 식각가스인 $CF_4$플라즈마에서 F 라디칼 농도의 공간적인 분포를 측정하고 분석하였다. 또한 플라즈마의 압력, 소스 전력 값과 기판 전력 값등의 조건의 변화에 따라 F 라디칼 농도의 분포가 어떻게 달라지는지에 대해 측정 분석하여 다루었다.

• Fire Science and Engineering
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• v.17 no.1
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• pp.26-32
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• 2003

Inert gases, Af, $N_2$, $CO_2$, as a Halon alternative, the empirical equations were correlated in terms of saturated pressure, density and viscosity, They were obtained by regression analysis from the experimental data in the literature. The empirical equations of saturated pressure were expressed as the second and third order function of temperature. The empirical equation for Ar and $N_2$ of density were expressed as the first order function of temperature. And $CO_2$ was expressed as the second and third order function of temperature. The empirical equation of viscosity was formulated as a power function with temperature. This empirical equations would allow us to predict pure component state.