Deposition characteristics of (Ba,Sr) $RuO_3$ thin films prepared by ultrasonic spraying deposition
(초음파 분무 증착법으로 제조한(Ba,Sr) $RuO_3$ 산화물 전극의 증착 특성)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.11 no.3
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- pp.111-114
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- 2001