PEMOCVD에 의한 강 유전체 $\textrm{SrBi}_{2}\textrm{Ta}_{2}\textrm{O}_{9}$ 박막의 제조 및 증착온도 특성
(Preparation and Characteristics of Ferroelectric $\textrm{SrBi}_{2}\textrm{Ta}_{2}\textrm{O}_{9}$ Thin Films Deposited by Plasma-Enhanced Metalorganic Chemical Vapor Deposition Technique with Various Deposition Temperatures)
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- 한국재료학회지
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- 제7권5호
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- pp.381-385
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- 1997