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Platinum 유기착화합물을 이용한 금속박막의 증착에 관한 연구

  • Yoo, Dae-Hwan;Choi, Sung-Chang;Ko, Seok-Geun;Choi, Ji-Yoon;Shin, Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.153-153
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    • 1999
  • platinum 유기착화합물을 사용하여 유리 기판 위에 Pt를 증착시켰다. Pt를 증착하기 위하여 Pt 착화합물을 용해 시킨 후, 유리 기판을 용액속에 담근 후 가열하여 Pt막을 증착하였다. 증착 후 Pt의 면저항은 200~75$\Omega$의 값을 나타내어 비교적 높은 저항값을 나타내었다. 높은 저항값을 낮추기 위해 진공 10-5Torr에서 50, 100, 150, 25$0^{\circ}C$로 열처리를 하였다. 이러한 저항값을 변화의 원인을 살펴보기 위하여 X-선 회절법을 이용하여 결정성의 변화를 살펴보았고, 화학적 조성의 변화는 X-ray 광전자 분광법을 이용하여 조사하였다. 열처리 전 Pt막은 비정질 상태를 나타내었으나, 6$0^{\circ}C$에서 30분간 열처리한 후에는 결정성이 증가하는 것으로 관찰되었다. 열처리 후 결정방향은 {111] 방향이 주 방향이였으며 [002] 방향의 피크도 관찰되었다. 따라서 성장된 막은 다결정 막임을 알 수 있었다. XPS를 이용하여 조성을 조사하여 본 결과 열처리하지 않은 시료의 경우 유기물과 반응하여 Pt의 피크가 넓게 나타나나 열처리 후에는 유기물이 분해되어 Pt의 고유한 피크를 관찰할 수 있었다. 따라서 전기전도도의 변화는 유기물의 분해를 통하여 순수한 Pt로 변해가면서 감소하는 것으로 생각되어 지며 결정성 또한 전기전도도 변화에 중요한 역할을 함을 알 수 있었다. 기존의 방법을 이용하여 Pt를 증착할 경우 기판과 쉽게 박리 되는 현상이 관찰되었으나 본 방법을 이용하여 증착된 Pt 박막의 경우 열처리 후에는 기판과의 접착력이 기존의 방법보다 뛰어나 박리되는 현상이 관찰되지 않았다.$ 이상에서 안정한 것을 볼 수 있었다. 텅스텐 박막은 $\alpha$$\beta$-W 구조를 가질 수 있으나 본 연구에서 성장된 텅스텐은 $\alpha$-W 구조를 가지는 것을 XRD 측정으로 확인하였다. 성장된 텅스텐 박막의 저항은 구조에 따라서 변화되는 것으로 알려져 있다. 증착조건에 따른 저항의 변화는 SiH4 대 WF6의 가스비, 증착온도에 따라서 변화하였다. 특히 온도가 40$0^{\circ}C$ 이상, SiH4/WF6의 비가 0.2일 경우 텅스텐을 증착시킨 후에 열처리를 거치지 않은 경우에도 기존에 발표된 저항률인 10$\mu$$\Omega$.cm 대의 값을 얻을 수 있었다. 본 연구를 통하여 산화막과의 접착성 문제를 해결하고 낮은 저항을 얻을 수 있었으나, 텅스텐 박막의 성장과정에 의한 게이트 산화막의 열화는 심각학 문제를 야기하였다. 즉, LPCVD 과정에서 발생한 불소 또는 불소 화합물이 게이트의 산화막에 결함을 발생시킴을 확인하였다. 향후, 불소에 의한 게이트 산화막의 열화를 최소화시킬 수 있는 공정 조건의 최저고하 또는 대체게이트 산화막이 적용될 경우, 개발된 연구 결과를 산업체로 이전할 수 있는 가능성이 높을 것을 기대된다.박막 형성 메카니즘에 큰 영향을 미침을 알 수 있었다. 또한 은의 전기화학적 다층박막 성장은 MSM (monolayer-simultaneous-multilayer) 메카니즘을 따름을 확인하였다. 마지막으로 구조 및 양이 규칙적으로 조절되는 전극의 응용가능성이 간단히 논의될 것이다.l 성장을 하였다는 것을 알 수 있었다. 결정성

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Analyzing off-line Noah land surface model spin-up behavior for initialization of global numerical weather prediction model (전지구수치예측모델의 토양수분 초기화를 위한 오프라인 Noah 지면모델 스핀업 특성분석)

  • Jun, Sanghee;Park, Jeong-Hyun;Boo, Kyung-On;Kang, Hyun-Suk
    • Journal of Korea Water Resources Association
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    • v.53 no.3
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    • pp.181-191
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    • 2020
  • In order to produce accurate initial condition of soil moisture for global Numerical Weather Prediction (NWP), spin-up experiment is carried out using Noah Land Surface Model (LSM). The model is run repeatedly through 10 years, under the atmospheric forcing condition of 2008-2017 until climatological land surface state is achieved. Spin-up time for the equilibrium condition of soil moisture exhibited large variability across Koppen-Geiger climate classification zone and soil layer. Top soil layer took the longgest time to equilibrate in polar region. From the second layer to the fourth layer, arid region equilibrated slower (7 years) than other regions. This result means that LSM reached to equilibrium condition within 10 year loop. Also, spin-up time indicated inverse correlation with near surface temperature and precipitation amount. Initialized from the equilibrium state, LSM was spun up to obtain land surface state in 2018. After 6 months from restarted run, LSM simulates soil moisture, skin temperature and evaportranspiration being similar land surface state in 2018. Based on the results, proposed LSM spin-up system could be used to produce proper initial soil moisture condition despite updates of physics or ancillaries for LSM coupled with NWP.

Velocity-based decision of water quality measurement locations for the identification of water quality problems in water supply systems (상수도시스템 수질사고 인지를 위한 유속기반 수질계측기 위치 결정)

  • Hong, Sungjin;Lee, Chanwook;Park, Jiseung;Yoo, Do Guen
    • Journal of Korea Water Resources Association
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    • v.53 no.11
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    • pp.1015-1024
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    • 2020
  • Recently, water pollution accidents have continued to occur in pipelines such as red water Incheon and Seoul. In order to recognize this water quality problem, it is necessary to install a water quality sensor in an appropriate location and measure it in advance to detect or block the water supply to the water faucet of the shelter. However, there are limitations, such as maintenance costs, to installing multiple water meters in all pipelines. Therefore, this study proposed a methodology for determining and prioritizing the installation location of flow-based water quality sensor for the recognition of water quality problems in pipelines. We applied the proposed procedure to the pipe break scenario. The results of the determination of the location of the water quality sensor were presented by applying it to the pipe network that actually operates the emergency pipe in Korea. The result of the decision showed that in the event of abnormal situation caused by the destruction of individual pipes, the flow rate of the pipes around the aqueduct and the tank may change rapidly, resulting in water quality accidents caused by turbidity. In the future, it is expected that the water quality monitoring point selection method, such as establishing an external pipe operation plan for pipe cleaning, will utilize the procedure for determining the location of the water quality sensor according to the velocity.

Gall formation on different age, habitat, and parasite position in Rhus javanica L. (붉나무의 수령, 서식지 및 기생위치에 따른 오배자 형성)

  • Jo, Hyeong-Chan;Han, Kwang-Soo;An, Eun-Yong
    • Korean Journal of Medicinal Crop Science
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    • v.8 no.4
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    • pp.304-311
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    • 2000
  • This study was conducted to investigate the ratio and number of the Rhus javanica gall formed by chinese sumac aphid, Scheleechtendalia chinensis, in several different conditions in which R. javanica lives. The density of 11 to 15-year-old R. javanica was more higher and the number of galls was also higher than 1 to 5- or over 16-year-old one at these sites. The formed gall according to four directions such as the East, West, South and North was founded the highest at the East and followed South, North, and West order. The formative rate of R. javanica gall did not differ in the mixture forest, and in the habitat having a heap of a little stone and mosses near a valley was better than in the site of road perimeter. Through an index of the gall diameter and the number of chinese sumac aphid, we evaluated the gall processing and development formed by the aphid. As the density of aphids increase, the size of the gall was also more plumped. The part of phyllotaxy of R. javanica gall in leaf and pinnate of was increased in the middle and upper part of terminal leaflet and leaflet was more occupied than wing. R. javanica which did not form a gall in natural environmental, formed gall by a artificial inoculation of S. chinensis. Some gall disappeared during a gall development from various environmental conditions.

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Variation of Yield and Loganin Content According to Harvesting Stage of Dipsacus asperoides Wall (천속단의 수확시기에 따른 수량과 Loganin 성분 변이)

  • An, Chanhoon;Kim, Young Guk;An, Tae Jin;Hur, Mok;Lee, Jeonghoon;Lee, Yunji;Cha, Seon Woo;Song, Beom Heon
    • Korean Journal of Medicinal Crop Science
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    • v.24 no.2
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    • pp.110-114
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    • 2016
  • Background: This study aimed to investigate the effect of harvest time on the growth, yield characteristics and loganin content in Dipsacus asperoides Wall. Methods and Results: Dipsacus asperoides seedlings were planted within a nursery environment in early May 2015 and harvested in early, middle and late October 2015, and early November 2015. Harvest time did not result significant differences in the plant height, stem diameter, branch length, leaf width and aboveground dry weight moreover, no significant differences were observed in root length, number of roots and root diameter. However, the diameter of lateral roots was greater in the harvests from the late October and period thereafter. The highest values of root dry weight and yield were recorded in early November. Specifically, the yield significantly increased from 205 kg/10 a (index: 100) in early October to 358 kg/10 a (index: 175) in early November, in terms of root part weight. Loganin contents of D. asperoides differed significantly among harvest times raging from 0.0766% in early October to 0.1704% in late November, thereby showing an increasing trend in later harvest times. Conclusions: These results suggest that the optimum harvest time for D. asperoides is early November, when the yield is the highest. Harvest time significantly affected loganin contents, which constantly increased from early October until early November.

The Permeation Behaviors of $H_2S/CH_4$ using Polyimide Hollow Fiber Membranes (폴리이미드 중공사막을 이용한 $H_2S/CH_4$ 투과거동에 관한 연구)

  • Lee, Hyung-Keun;An, Young-Mo;Kim, Dae-Hoon;Jo, Hang-Dae;Seo, Yong-Seog;Park, Yeong-Seong
    • Membrane Journal
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    • v.19 no.4
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    • pp.261-267
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    • 2009
  • Polyimide which is the glassy polymer has high chemical resistance, thermal stability and high mechanical property. In this study, the polyimide hollow fiber membranes were prepared by the dry-jet wet phase inversion in order to investigate the permeation porperties of the $H_2S$ and $CH_4$. The morphology of prepared hollow fiber membranes and their permeation behaviors of $H_2S$ and $CH_4$ before and after silicon coating were evaluated. The permeance of $H_2S$ and $H_2S/CH_4$ selectivity increased due to plasticization with increasing the feed pressure. The permeance of KSM03b and selectivity of KSM03d were highest among the three type membranes used this experiments. The permeance decreased but the $H_2S/CH_4$ selectivity increased with increasing the air gap. The permeance reduced after silicon coating. However, the selectivity increased and the selectivity of KSM03d was 275 at 7 atm.

Characterization of a Revertant that Restroes the Export of Ribose-Bnding Potein to the Priplasm in Echerichia coli (리보스 결합 단백질을 페리플라슴으로 수송하는 복귀변이주의 분석)

  • ;;Randall, Linda L.
    • Korean Journal of Microbiology
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    • v.26 no.4
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    • pp.283-290
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    • 1988
  • A spontaneous revertant of mutation rbsB103 that is ribose taxis-positive was characterized. This revertant was found to be export-competent in the export of ribose-binding protein shown by the disappearance of accumulated mutant precursor protein and the export of mature ribose-binding protein to the periplasm. The reversional change was shown to be in the region of risB gene that codes for the amino terminal portion of ribose-binding protein. Analysis by high-performance liquid chromatography of peptide patterns of ribose-binding proteins confirmed the relationship between the wild-type and the revertant proteins as shown for the mutant previously (Iida et al., 1985). When the processing rate of presursor proteins from the wild type and the revertant strain in vivo was compared by pulse-chase experiment, it was found that processing is less efficient than normal in the revertant. Purified mature proteins from both wild-type and revertant were subjected to amino acid sequencing. The results confirmed the amino acid changes deduced from the DNA sequencing and showed that processing of the revertant precursor occured in the correct position even though there are two different amino acids present in the signal sequence.

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Magenetic Properties of Nd-Fe-B-Co-based Melt-spun Ribbons an dTheir Bonded Magents (Nd-Fe-B-Co계 급냉리본과 Bond 자석의 자기적 성질)

  • Gang, Gye-Myeong;Gang, Gi-Won;O, Yeong-Min;Song, Jin-Tae
    • Korean Journal of Materials Research
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    • v.3 no.2
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    • pp.175-184
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    • 1993
  • Abstract Co-and/or AI-added Nd-Fe-B-based magnetic alloys were fabricated by using vacuum induction melting frunace, and melt-spun ribbons were made of the magnetic alloys with single roll rapid quenching method. The variation of magnetic properties of the melt-spun ribbons as a function of Cuwheel velocity (Vs) were investigated. Bonded magnets were made of the optimally quenched ribbon fragments, and the magnetic properties of the melt-spun ribbons and the bonded magnets were studied, relating to the microstructure and crystalline structure. Cu-wheel surface velocity had a strong effect on the magnetic properties of the melt-spun ribbons, and the maximum properties were obtained around Vs =20m/sec. The optimally quenched ribbon had a cellura-type microstructure, in which fine N$d_2$F$e_14$B grains were surrounded by thin Nd-rich phase. In case of a 2.1at% AI-added melt-spun ribbon, the magnetic properties were as follows: iHc, Br, and (BH)max were 15.5KOe, 7.8KG and 8.5MGOe respectively. And resin bonded magnets were fabricated by mixing optimally quenched ribbon fragments with 2.5wt % polyamide resin, compacting and binding at room temperature. The iHc, Br and (BH)max of bonded magnet were lO.2KOe, 4.4KG and 3.3MGOe respectively. And hot-pressed magnets were made by pressing the overquenched ribbons at high temperature. The magnetic properties of hot-pressed magnets were better than those of bonded magnets, and when the holding time was 8 minutes, the iHc, Br, and (BH)max of the hot-pressed magnet were 1O.8KOe, 7.3KG and 8.0MGOe respectively. Domain structure was mainly maze pattern, which means that the easy magnetization axis could be aligned, and the domain width of the hot-pressed magnets was smaller than that of bonded magnets.

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A Study on the Solubility of Nb in Zr-0.8Sn Alloy by Thermoelectric Power Measurement (TEP 측정방법을 이용한 Zr-0.8Sn 합금의 Nb 고용도에 관한 연구)

  • Oh, Yeong-Min;Jeong, Heung-Sik;Jeong, Yong-Hwan;Kim, Seon-Jin
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.453-459
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    • 2001
  • It is important for the fabrication of nuclear cladding to optimize the microstructure, because the properties of Zr-based nuclear claddings such as mechanical properties, oxidation-resistance and corrosion- resistance vary widely with its microstructure. The microstructure in Zr-based alloy is strongly dependent on the solubility of alloying element. However, it is very difficult to measure the solubility due to the low solution limit of alloying elements in Zr-based alloy. In this study, Thermoelectric Power(TEP) measurements are used to determine the solubility of Nb in Zr-0.8Sn alloy, which is confirmed by optical microscopy and transmission electron microscopy. The solutioning of Nb obtained by a homogenization treatment and water-quench leads to a decrease of TEP The saturation of TEP appears with the increase of homogenization temperature, which means the saturation of the Nb content in the matrix. From these results, the solubility ($C_{Nb}$) of Nb in Zr-0.8Sn with temperature could be expressed as fellow equation : $4.69097{\times}10^{16}{\times}e^{-25300\times\;I/T}$(ppm.at.%)

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Cu dry etching by the reaction of Cu oxide with H(hfac) (Cu oxide의 형성과 H(hfac) 반응을 이용한 Cu 박막의 건식식각)

  • Yang, Hui-Jeong;Hong, Seong-Jin;Jo, Beom-Seok;Lee, Won-Hui;Lee, Jae-Gap
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.527-532
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    • 2001
  • Dry etching of copper film using $O_2$ plasma and H(hfac) has been investigated. A one-step process consisting of copper film oxidation with an $O_2$ plasma and the removal of surface copper oxide by the reaction with H(hfac) to form volatile Cu(hfac)$_2$ and $H_2O$ was carried but. The etching rate of Cu in the range from 50 to 700 /min was obtained depending on the substrate temperature, the H(hfac)/O$_2$ flow rate ratio, and the plasma power. The copper film etch rate increased with increasing RF power at the temperatures higher than 215$^{\circ}C$. The optimum H(hfac)/O$_2$ flow rate ratio was 1:1, suggesting that the oxidation process and the reaction with H(hfac) should be in balance. Cu patterning using a Ti mask was performed at a flow rate ratio of 1:1 on 25$0^{\circ}C$\ulcorner and an isotropic etching profile with a taper slope of 30$^{\circ}$was obtained. Cu dry patterning with a tapered angle which is necessary for the advanced high resolution large area thin film transistor liquid-crystal displays was thus successfully obtained from one step process by manipulating the substrate temperature, RF power, and flow rate ratio.

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