• 한국표면공학회지
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• 제56권6호
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• pp.420-426
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• 2023

We prepared a highly sensitive hydrogen (H₂) sensor based on Indium oxides (In₂O₃) porous nanoparticles (NPs) loaded with Platinum (Pt) nanoparticle in the range of 1.6~5.7 at.%. In₂O₃ NPs were fabricated by microwave irradiation method, and decorations of Pt nanoparticles were performed by electroless plating on In₂O₃ NPs. Crystal structures, morphologies, and chemical information on Pt-loaded In₂O₃ NPs were characterized by grazing-incident X-ray diffraction, field-emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, respectively. The effect of the Pt nanoparticles on the H₂-sensing performance of In₂O₃ NPs was investigated over a low concentration range of 5 ppm of H₂ at 150-300 ℃ working temperatures. The results showed that the H₂ response greatly increased with decreasing sensing temperature. The H₂ response of Pt loaded porous In₂O₃ NPs is higher than that of pristine In₂O₃ NPs. H₂ gas selectivity and high sensitivity was explained by the extension of the electron depletion layer and catalytic effect. Pt loaded porous In₂O₃ NPs sensor can be a robust manner for achieving enhanced gas selectivity and sensitivity for the detection of H₂.