• Journal of the KSME
• /
• v.55 no.6
• /
• pp.34-37
• /
• 2015

이 글에서는 유전체 배리어 방전 플라즈마를 활용하여 오일 미스트를 1차 집진한 뒤에 2차적으로 $CO/CO_2$로 전환하여 저감하는 기술에 대해 소개하고자 한다.

• Journal of IKEEE
• /
• v.23 no.2
• /
• pp.431-437
• /
• 2019

This work was carried out ozone generation and TCE decomposition characteristics using dielectric ball materials filled barrier discharge reactor and catalyst's reactor for ozone decomposition. Ozone concentration generated from $Al_2O_3$ or $TiO_2$ filled barrier discharge reactor was so high compared with non-filled discharge reactor. This reactor is good discharge structure for generating the high ozone concentration. In addition, TCE decomposition rate and COx conversion rate increased using $MnO_2$ filled discharge reactor, because ozone was decomposed at the same discharge space on the surface of $MnO_2$ catalysts. To identify the $MnO_2$ catalytic effects, TCE decomposition rate reached to 100[%] by the decomposition of ozone at $MnO_2$ catalyst's reactor by the arrangement of $Al_2O_3$ filled discharge reactor and $MnO_2$ catalyst reactor. Finally, $MnO_2$ catalyst is good materials for the decomposition of ozone and this process will be useful for decomposing VOCs such as TCE.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.10a
• /
• pp.38.2-38.2
• /
• 2011

폴리머 박막은 그 고유한 특성으로 인해 여러 산업적으로 널리 사용되고 있는 재료이다 예로 의약품이나 식품 포장지의 배리어, 전자부품의 절연체, 반도체 공정에서의 사용, 혹은 부식방지를 위해 사용 되어지기도 한다. 이 폴리머 박막을 증착 하기 위한 방법으로 이전부터 CVD (Chemical Vapor Deposition) 방법이 많이 사용되었고 지금까지도 가장 많이 사용되는 방법이다. CVD를 사용하여 $SiO_2$-like 필름의 증착은 전구체(precursor)로 Silane ($SiH_4$)을 사용하였으며, 플라즈마 발생 소스(source)로 열 혹은 전기장 등을 사용 하며 공정 시 압력 또한 대부분 저압 하에서 실시 하였다. 이와 같은 이전 CVD 방법의 문제는 사용되는 Silane 자체가 인체에 해로울 정도로 독성이 있으며 폭발성도 같이 가지고 있어 작업환경의 위험성이 높으며 열을 사용한 CVD의 경우 높은 공정 온도로 인해 증착 할 수 있는 대상이 제한 되어 지며 높은 열의 발생을 위해 많은 에너지의 소비가 필요하다. 저압 플라즈마를 사용한 CVD 는 공정상 높은 열의 발생이 일어나지 않아 기판 운용상 문제가 되지 않지만 저압 환경에서 해당 공정이 이루어기 때문에 인해 필수적으로 고가의 진공 챔버가 필수적이며 저압을 유지할 고가의 진공 펌프나 추가 장비들이 필요하게 된다, 또한 챔버 내에서 이루어지는 공정으로 인해 공정의 연속성이 떨어져 시잔비용 또한 많이 잡아 먹는다. 이러한 열 혹은 저압 플라즈마등을 사용한 공정의 단점을 해결하기 위해 여러 연구자들이 다양한 방법을 통해 연구를 하였다. 대기압 유전체 배리어 방전(AP-DBD: Atmospheric Pressure-Dielectric Barrier Discharge)을 사용한 폴리머 박막의 증착은 이전 전통적인 방법에 비해 낮은 장비 가격과 낮은 공정 온도 그리고 연속적인 공정 등의 장점이 있는 폴리머 박막 증착 방법 이다. 대기압 유전체 배리어 방전 공정 변수로 공급 전압 및 주파수 그리고 공급 전압의 영향, 전구체를 유전체 배리어 방전 전극으로 이동 시키기 위해 사용된 캐리어 가스의 종류 및 유량, 화학양론적 계수를 맞추기 위해 같이 포함되는 산소 가스의 유량, DBD 전극의 형태에 따른 증착 박막의 균일성 등 이 존재하며 이런 많은 변수 들에 대한 연구가 진행 되었지만 아직 이 대기압 DBD를 이용한 폴리머 박막의 증착에 대한 명확한 이해는 아직 완전 하다 할 수 없다. 본 연구에서는 이러한 대기압 DBD를 이용하여 폴리머 박막의 증착시 영향을 미치는 많은 공정 변수 등이 박막생성에 미치는 영향과 증착된 박막의 성질에 대한 연구를 진행 하였다.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2009.10a
• /
• pp.371-372
• /
• 2009

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.4
• /
• pp.524-533
• /
• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Aim of this work is to determine design and operating parameters of a hybrid air cleaning system. DBD and ESP(Electrostatic Precipitator) are used as nano particle charger and collector, respectively. Pelletized MnO$_2$ catalyst or activated carbon is used fer ozone decomposition or adsorption material. AC voltage of 7～10 KV(rms) and 60 Hz is used as DBD plasma source. DC - 8 KV is applied to the ESP for particle collection. The overall particle collection efficiency for the hybrid system is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized MnO$_2$ catalyst or activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.20 no.7
• /
• pp.58-64
• /
• 2006

Recently deep interests have been paid on the effective generation of ozone, which has been widely used for water treatment, deodorization, color removal, and chemical processing of exhausted smoke. The silent discharge reaction has been proposed as the most effective one in the many ozone generation methods, because the silent discharge can be generated under the conditions of lower applied voltage and power consumption, compared other ones. In this paper, in order to improve the ozone generation and ozone generation efficiency, the conventional silent discharge chamber with $Al_2O_3$ dielectric layer and tubular ferroelectric bed discharge reactor packed with $Al_2O_3$ pellets were made, and the silent discharge of the reactors were studied experimentally. The ozone generation characteristics are also discussed based on the discharge characteristics, especially on the wall charge accumulation properties and power consumption. The results show that the electric charges of discharge tube with bead are around 2.5 times as large as those without bead. In the discharge chamber packed with dielectric beads, the ozone concentration and the energy yield characteristics were also improved, compared with those in the conventional silent discharge reactor.

• Applied Chemistry for Engineering
• /
• v.23 no.6
• /
• pp.608-613
• /
• 2012

Dielectric barrier discharge plasma reactor was applied to the removal of ethylene from a simulated storage facility ($1.0m^3$) of fruits and vegetables. The system operated in a closed-loop mode by feeding the contaminated gas to the plasma reactor and recirculating the treated gas back to the storage facility. The experiments were carried out with parameters such as discharge power, circulation flow rate, initial ethylene concentration and treatment time. The rate of ethylene decomposition was mainly controlled by the discharge power and the treatment time. With the other conditions kept constant, the ethylene decomposition rate in the presence of the manganese oxide ozone control catalyst installed downstream from the plasma reactor was lower than that in the absence of it. The suggests that unreacted ozone from the plasma reactor accumulated in the storage facility where it additionally decomposed ethylene. On the basis of an initial ethylene concentration of 50 ppm, the energy requirement for completing the decomposition was about 60 kJ.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.1261-1266
• /
• 2004

Dielectric Barrier Discharge (DBD) in air, which has been established for the production of large quantities of ozone, is more recently being applied to a wider range of aftertreatment processes for HAPs (Hazardous Air Pollutants). Although DBD has high electron density and energy, its potential use as precharging nano and submicron particles are not well known. In this work, we measured I-V characteristics of DBD and estimated collection efficiency of the particles by DBD type 2-stage ESP. To examine the particle collection with various applied voltage waveforms of DBD for nano and submicron sized, bimodal particles were generated by a electrical tube furnace and an atomizer.

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.1678-1683
• /
• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Although DBD high electron density and energy, its potential use as nano and sub-micron sized particle charging are not well known. Aim of this work is to determine design and operating parameters of a two-stage ESP with DBD. DBD and ESP are used as particle charger and precipitator, respectively. We measured particle precipitation efficiency of two-stage ESP and estimated ozone decomposition of both pelletized $MnO_2$ catalyst and pelletized activated carbon. To examine the particle precipitation efficiency, nano and sub-micron sized particles were generated by a tube furnace and an atomizer. AC voltage of $7{\sim}10$ kV(rms) and 60 Hz is used as DBD plasma source. DC -8 kV is applied to the ESP for particle precipitation. The overall particle collection efficiency for the two-stage ESP with DBD is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized $MnO_2$ catalyst or pelletized activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.11
• /
• pp.1542-1547
• /
• 2003

Although dielectric barrier discharge (DBD) in air has been applied to a wider range of aftertreatment processes for HAPs (Hazardous Air Pollutants), due to its high electron density and energy, its potential use as precharging dust particles is not well known. In this work, we measured size distributions of bimodal aerosol particles and estimated collection efficiency of the particles by an electrostatic precipitator (ESP) using DBD as particle charger. To examine the particle collection with DBD charger, nano size particles of NaCl(20∼100nm) and DOS (50∼500nm) were generated by a tube furnace and an atomizer, respectively. For experimental conditions of 60㎐, 11㎸ and 60 lpm, the particle collection efficiency for the hybrid system was over 85%, based on the number of particles captured.