• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.97-97
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• 2010

많은 플라즈마 공정 중에 건식 식각은 복잡하고 표면반응이 잘 알려지지 않은 등의 이유로 가장 어려운 분야 중의 하나이다. 이러한 이유로 식각 장치 디자인뿐만 아니라 플라즈마를 이용한 건식 식각의 공정 조건은 수많은 시행착오를 통해 시도되어 왔다. 이런 문제들을 극복하기 위해 많은 연구자들에 의해서 다양한 방법과 tool을 이용해 모델링이 시도되고 있다. 본 연구에서는 $CF_4$ 가스를 이용한 유도결합 플라즈마에 의해 Si와 $SiO_2$를 식각하는 것을 상용 프로그램인 전산모사 유체역학 시뮬레이터인 CFD-ACE+를 이용하여 모델링했다. 150 mm 직경의 웨이퍼에 대한 모델은 식각 속도 실험결과와 비교 하였다. Ar의 경우 20 mTorr에서 13.56 MHz, 500 W인가 시 2.0 eV의 전자온도와 $7.3{\times}10^{11}\;cm^{-3}$의 전자밀도가 계산결과와 상당히 일치하게 측정되었고, $CF_4$를 이용한 $SiO_2$ 식각에서도 식각 속도가 평균 190 nm/min로 일치했고 식각 균일도는 3% 였다. 450 mm 웨이퍼 공정용 장치의 모델 계산 결과에서는 안테나와 기판의 거리, 챔버의 단면적, 기판 지지대와 배기구와의 높이 등 기하학적인 구조와 각 안테나 턴의 위치 및 전류비가 플라즈마 균일도에 많은 영향을 주었으며, 안쪽부터 4 turn이 있는 경우 2번째, 4번째 turn에만 1:4의 전류비를 인가했을 때, 수십%의 전자밀도의 불균일도를 4.7%까지 낮출 수 있었다. 또한, Si 식각에서는 식각 속도의 분포가 F radical의 분포와 같은 경향을 보임을 확인했고, $SiO_2$ 식각에서는 전자 밀도의 분포와 일치함을 확인함으로써 균일한 식각을 위해서 두 물질의 식각 공정에서는 다른 접근의 시도가 필요함을 확인했다. 플라즈마의 준중성 조건을 이용해서 Poisson 방정식을 풀지 않고 sheath를 해석적 모델로 처리하는 방법과, Poisson 식으로 정전기장을 푸는 방법을 통해서 입사 이온의 에너지 분포를 비교하였다. 에너지 범위는 80~120 eV로 같지만, 실험에서는 IED가 낮은 에너지 쪽이 더 높게 측정됐고, 계산 결과에서는 높은 에너지 쪽이 높았다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.5
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• pp.449-456
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• 2010

The HCCI engine is a prospective internal combustion engine with which high diesel-like efficiencies and very low NOx and particulate emissions can be achieved. However, several technical issues must be resolved before HCCI engines can be used for different applications. One of the issues concerning the HCCI engine is that the operating range of this engine is limited by the rapid pressure rise caused by the release of excessive heat. This heat release is because of the self-accelerated combustion reaction occurring in the engine and the resulting engine knock in the high-load region. The purpose of this study is to evaluate the role of thermal stratification and fuel stratification in reducing the pressure rise rate in an HCCI engine. The concentrations of NOx and CO in the exhaust gas are also evaluated to confirm combustion completeness and NOx emission. The computation is carried out with the help of a multizone code, by using the information on the detailed chemical kinetics and the effect of thermal and fuel stratification on the onset of ignition and rate of combustion. The engine is fueled with dimethyl ether (DME), which allows heat release to occur in two stages, as opposed to methane, which allows for heat release in a single stage.

• Applied Chemistry for Engineering
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• v.1 no.2
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• pp.215-223
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• 1990

The effects of sulfur on the catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, have been studied using thermal desorption spectrometry(TDS) under ultra-high vacuum(UHV) conditions. Sulfur weakened both the adsorptions of CO and NO by direct site blocking and indirect electronic effect. S(a) desorbing below 800 K gave little effect on reaction activity whereas S(a) desorbing above 800 K, which adsorbs as an atomic state, gave much effect on it. The adsorbed sulfur existed on the surface of platinum in the form of islands, and also reduced the adsorption energies of adsorbates by the long-ranged electronic effect. The platinum catalyst in the reaction between CO and NO was poisoned selectively by S(a), poisoning firstly the active sites of this reaction.

• Applied Chemistry for Engineering
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• v.1 no.2
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• pp.207-214
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• 1990

The catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, has been studied using thermal desorption spectrometry(TDS) and steady-state experiment under ultra-high vacuum(UHV) conditions. With the pressures of CO and NO of each $1{\times}10^{-7}Torr$, the $CO_2$ formation rate showed a maximum at 560K. At the reaction temperature of 560K and the NO pressure of $1{\times}10^{-7}Torr$, the production of $CO_2$ was first order in $CO_2$ was first order in CO pressure below $1.35{\times}10^{-7}Torr$ of CO pressure whereas at higher CO pressures the rate became minus 0.3 order in CO. But the efforts of reactant pressure on the reaction was understood in consideration of the surface concentrations of adsorbates. With the results, we proposed a new reaction mechanism for this reaction.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.171-171
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• 2011

헬륨냉동계통은 연구용 원자로인 하나로에서 냉중성자를 생산할 수 있도록 설치된 수조내기기 내의 감속재인 수소가 정상적으로 열 사이펀을 유지하기 위한 주요 계통이다. 헬륨냉동계통은 헬륨가스를 압축하는 헬륨 압축부분과 헬륨가스를 팽창시켜 저온을 생성시키는 헬륨 팽창부분으로 나누어진다. 헬륨 압축부분은 두 개의 스크류가 맞물려 회전하면서 약 1.05 bar(a)의 헬륨가스를 최대 13 bar(a)까지 압축시키는 압축기가 있으며, 헬륨 팽창부분인 냉동박스의 팽창 터빈은 self-acting gas bearing에 의해 구동되며, 저온모드 운전 시작시 헬륨 압축부분에서 일부의 가스는 팽창 터빈 축(shaft)으로 유입되어 회전속도가 서서히 증가하면서 고속으로 회전하여 극저온의 헬륨가스(14~18 K)를 생성하는 주요 기기이다. 헬륨을 팽창하는 부분인 냉동박스 내로 헬륨 압축가스를 유입하기 전에 압축된 헬륨가스 내 불순물의 순도를 분석하여 냉동박스의 주요 부품인 팽창터빈의 운전에 영향을 미치지 않는 것이 가장 중요하다. 따라서 헬륨 저압측에 헬륨가스 내 불순물 즉, 수소($H_2$), 수분($H_2O$), 질소($N_2$), 탄화수소류(CxHy) 및 오일(Oilaerosol) 등의 함량을 분석하기위해 가스 분석기가 설치되어 있으며, 냉동박스 내로 유입되기 전에 헬륨압축에서 순환되는 가스 내 불순물인 수분, 질소, 탄화수소류 및 오일은 10 vpm 이하이어야 하며, 수소 함량은 0.1 % 이내이어야 한다. 헬륨 압축부분에서 순환되는 가스의 불순물이 요구 조건에 만족하도록 헬륨 고압측과 헬륨 저압측에 cryogenic adsorber를 설치하여 가스 내 불순물을 제거하는 가스순도제어 작업을 수행해야 한다. cryogenic adsorber를 사용하기 위해서는 장치 내의 불순 가스를 공정진공도(1.33 X $10^{-3}$ mbar) 이하로 진공배기하는 작업이 매우 중요하다. 이는 계통의 헬륨가스가 오염되지 않도록 하는 것으로 cryogenic adsorber 내에는 액체질소를 충전하여 액체질소 온도에 노출된 활성탄층을 헬륨가스가 흐르면서 수분, 질소, 탄화수소류 및 오일 등이 제거된다. 이 논문에서는 헬륨냉동계통의 가스 순도 제어 작업을 통해 헬륨가스의 순도가 요구조건 이하로 만족하며, 팽창 터빈의 운전에 영향을 미치지 않음을 기술하고자 한다.

• Journal of Energy Engineering
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• v.20 no.4
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• pp.338-345
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• 2011

The swirl flow applied for high efficiency and reduction of emission such as NOx, CO in a gas turbine engine makes recirculation zone by shear layer in the combustion chamber. This recirculation zone influences a decreasing flame temperature and flame length by burned gas recirculation. Also it is able to suppress from instability in lean-premixed flame. In this study, it was found that the swirl flow field was characterized as function of swirl number using PIV measurement in dump combustor. As increasing swirl number, a change of flow field was presented and recirculation zone was shifted in the nozzle exit direction. Also turbulent intensity and turbulent length scale in combustor were decreased in combustion. It has shown reduction of eddies scale with swirl number increasing.

• Journal of Hydrogen and New Energy
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• v.19 no.4
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• pp.305-312
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• 2008

ZnO/Zn redox cycle is the one of the promising thermochemical cycles for hydrogen production via water splitting with high temperature heat source like a concentrated solar energy. This paper reports the particle size effect of Zinc on water splitting behavior. Water splitting reaction experiments were carried out at isothermal conditions of 350 and 400$^{\circ}C$ in TGA (Thermo Gravimetric Analyzer) using four commercial Zinc powders (nano, <10 ${\mu}m$, <150 ${\mu}m$ and $150{\sim}600\;{\mu}m$ particle sizes). Before the experiments, average particle size of Zinc powders was analyzed by PSA (Particle Size Analysis). After the experiments, XRD (X-Ray Diffraction) and SEM (Scanning Electron Microscope) analyses were conducted on the samples. The experimental results showed that particle size had a effect on the conversion of Zinc to ZnO. Zinc conversion was increased, as the particle size decreased. Especially, the nano size particles were aggregated and the particle's morphology changed on the surface during hydrolysis reaction.

• Journal of the Korean Society of Propulsion Engineers
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• v.9 no.1
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• pp.35-45
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• 2005

Numerical study is carried out to investigate the effects of chemistry and thermal radiation on the rocket plume flow field at various altitudes. Navier-Stokes equations for compressible flows were solved by a fully-implicit TVD code based on the finite volume method. An infinitely fast chemistry module for hydrocarbon mixture with detailed thermo-chemical properties and a thermal radiation module for optically thick media were incorporated with the fluid dynamics code. The plume flow fields of a kerosene-fueled rocket flying at Mach number zero at sea-level, 1.16 at altitude of 5.06 km and 2.90 at 17.34 km were numerically analyzed. Results showed the plume structures at different altitude conditions with the effects of chemistry and radiation. It is understood that the excess temperature by the chemical reactions in the exhaust gas may not be ignored in the view point of propulsion performance and thermal protection of the rocket base, especially at higher altitude conditions.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.11a
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• pp.410-415
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• 2010

The engine ground and altitude tests were carried out to investigate the effect of jet fuel alteration on the performance of a small turbojet engine. JP-S was supplied 8% higher than JP-8 by fuel metering system at the same command. The employment of JP-S showed the similar starting characteristic to that of JP-8, however, difference in the ignition time and acceleration rate of engine speed due to the difference of fuel flow rate by fuel metering system was observed. In spite of jet fuel alteration, the test results yield the similar Steady-State engine performance in Net thrust, Air flow, Exhaust Gas Temperature, etc. On the other hand, the Fuel consumption of JP-S increased by 5 % compared with that of JP-8. In point of Specific Fuel Consumption (SFC), SFC of JP-S was approximately 1.1~2.6 %, 5 % higher than that of JP-8 in ground and altitude tests respectively at the same thrust.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.10
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• pp.1033-1040
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• 2011

The premixed burner is a very strong candidate for using household boiler burner system because it has high efficiency, low emission and can be used in compact boiler system. Usually, household boiler burner systems use a Bunsen burner, which consists of an inner rich premixed flame and fuel burned completely by a secondary air supply. It has a relatively long flame length and operates in a high excess of air, so it is difficult to fit such a burner into a high efficiency compact boiler. In this paper, the characteristics of a premixed combustion burner for surface media such as metal fiber, ceramic, and SUS fin were evaluated. In particular, the flow velocity over the burner surface for the cold flow characteristics of the surface material were measured and adjusted. The combustion tests were carried out by taking pictures of the flame and measuring the flame temperature. The amounts of CO and NO were measured and the characteristics of the surface burner materials, combustion chamber, and heat exchangers were evaluated for various excess air ratios and heating values.