• 제목/요약/키워드: 방전 플라즈마 소결법

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Cu 함유량에 따른 Mo-Cu 박막의 특성 평가

  • 이한찬;문경일;신승용;이붕주;신백균
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.259-259
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    • 2012
  • Mo-Cu 합금은 열전도도, 전기전도도가 우수하고 합금조성에 따라 열팽창계수의 조절이 가능하여 반도체소재, 방열소재, 접점소재 등에 적용가능성이 높은 재료로 주목받고 있다. 또한 상태도 상에서 고용도가 전혀 없기 때문에 박막을 제작하였을 경우, 나노 복합체 형성이 용이하고 질소 분위기에서는 MoN-Cu로 상분리가 가능하여 하드상과 소프트상의 물성을 동시에 보유한 박막 제작이 가능하다. 또한 고온에서 산화반응에 의해 생기는 $MoO_3$, $CuO_3$와 같은 준안정상의 산화물들은 육방정계 구조(HCP)를 가지며 전단특성이 우수하여 자동차 저마찰 코팅재료로써 많은 연구가 진행되고 있다. 반면, Mo-Cu 는 상호간에 고상은 물론 액상에서도 고용도가 전혀 없기 때문에 일반적인 방법으로는 합금화 또는 복합화가 어렵다. 또한 Mo-Cu 박막을 제작할 경우 복수의 타겟을 이용해야 하기 때문에 성분조절과 구조적 제어가 불리하고 공정의 복잡화라는 단점을 가지고 있으며 추가적으로 다른 원소를 첨가하여 3원계, 4원계 이상의 박막을 형성하는 것에 한계가 있다. 따라서 본 연구에서는 위와 같은 문제점을 해결하기 위하여 상호간의 고용도가 없는 재료의 합금화가 용이한 기계적 합금화법(Mechanical Alloying)을 이용하여 Mo-Cu 합금분말을 제조하였고, 준안정상태의 구조의 유지가 가능한 방전 플라즈마 소결법(Spark Plasma Sintering)을 이용하여 합금타겟을 제작하였다. Mo-Cu 박막은 제작된 합금타겟을 사용하여 DC 스퍼터링 공정으로 제작하였다. Mo-Cu 박막의 공정조건으로는 타겟조성, 공정분위기, 가스 비율로 정하여 실험을 진행하였다. 제작된 박막은 자동차 코팅재료로써의 적용가능성을 보기 위해서 내열성, 내식성, 내마모성의 특성을 평가하였다.

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방전플라즈마 소결법으로 제조된 Ta-Cu의 미세조직 및 전기접점 특성 (Microstructure and Electric Contact Properties of Spark Plasma Sintered Ta-Cu Composite)

  • 주원;김영도;심재진;최상훈;현승균;임경묵;박경태
    • 한국분말재료학회지
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    • 제24권5호
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    • pp.377-383
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    • 2017
  • Microstructure, electric, and thermal properties of the Ta-Cu composite is evaluated for the application in electric contact materials. This material has the potential to be used in a medium for a high current range of current conditions, replacing Ag-MO, W, and WC containing materials. The optimized SPS process conditions are a temperature of $900^{\circ}C$ for a 5 min holding time under a 30 MPa mechanical pressure. Comparative research is carried out for the calculated and actual values of the thermal and electric properties. The range of actual thermal and electric properties of the Ta-Cu composite are 50~300 W/mk and 10~90 %IACS, respectively, according to the compositional change of the 90 to 10 wt% Ta-Cu system. The results related to the electric contact properties, suggest that less than 50 wt% of Ta compositions are possible in applications of electric contact materials.

다이아몬드전착 밴드쏘우장비를 이용한 고치밀도 알루미나소결체의 다이싱가공 성능평가 (Performance Evaluation of Dicing Sawing of High-densified Al2O3 Bulk using Diamond Electroplated Band-saw Machine)

  • 이용문;박영찬;김동현;이만영;강명창
    • 한국기계가공학회지
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    • 제16권6호
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    • pp.1-6
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    • 2017
  • Recently, the brittle materials such as ceramics, glass, sapphire and textile material have been widely used in semiconductors, aerospace and automobile owing to high functional characteristics. On the other hand, it has the characteristics of difficult-to-cut material relative to all materials. In this study, diamond electro-deposited band-saw machine was developed to operate stably using water-coolant type through relative motion between band-saw tool and $Al_2O_3$ material. High densified $Al_2O_3$ material was manufactured by spark plasma sintering method. The bulk density was observed by the Archimedes law and the theoretical density was estimated to be $3.88g/cm^3$ and its hardness 14.7 MPa. From the dicing sawing test of $Al_2O_3$ specimen, behavior of surface roughness and band-saw wear are dominantly affected by the increase of the band-saw linear velocity. Additionally, an continuous pattern type of diamond band-saw was a very effective due to entry impact as a one-off for brittle material.

기계적 합금화법과 방전 플라즈마 소결법으로 제조된 Al-25Ti-8Mn 금속간 화합물의 산화 거동 (Oxidation Behavior of Al-25Ti-8Mn Intermetallic Compound Fabricated by Mechanical Alloying and Spark Plasma Sintering)

  • 최재웅;김기홍;황길호;홍석준;강성군
    • 한국재료학회지
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    • 제15권7호
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    • pp.439-443
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    • 2005
  • The oxidation behavior and the thermal stability of nanocrystalline Al-25Ti-8Mn intermetallic compound were investigated. $Al_3Ti$ intermetallic compound, which has a potential for high temperature structural material, was fabricated by mechanical alloying(MA) with $8at.\%$ Mn to enhance the thermal stability and ductility. And Al-25Ti-8Mn intermetallic compound was sintered by spark plasma sintering(SPS) at $700^{\circ}C$. After sintering process, cubic $Ll_2$ structure was maintained without phase transformation and the grain size was about 50nm. To investigate the oxidation behavior of the specimens, thermal gravimetric analysis(TGA) was performed at 700, 800, 900, and $1000^{\circ}C$ for 24 h in $O_2$. As the temperature increased from $700^{\circ}C\;to\;900^{\circ}C$ the weight gain of specimens increased. However at $1000^{\circ}C$, unlike the oxidation behavior of $700^{\circ}C\;to\;900^{\circ}C$, the weight gain of specimen decreased drastically and the transition from linear rate region to parabolic rate region occurred rapidly due to the dense $\alpha-Al_2O_3$.

방전플라즈마 소결법에 의해 제조된 Al 타겟과 스퍼터링 박막의 특성평가 (Fabrication and Evaluation of Al Targets using the SPS Technique and their Sputter Fabricated Films)

  • 현혜영;김민정;유정호;정칠성;양준모;오익현;박현국;이승민;오용준
    • 대한금속재료학회지
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    • 제49권6호
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    • pp.493-497
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    • 2011
  • The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and spark plasma sintering (SPS) were compared and analyzed. The results, revealed that, the Al film prepared by heating at $60^{\circ}C/min$ (SPS process) showed a specific resistance similar to the commercial cast Al film. In addition, the results of XRD, SIMS and TEM, showed that there was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Al target was found to have properties quite similar to the commercial one and it is expected to be applied in future research to the metal wiring material for semiconductor/display devices.

방전플라즈마소결법 적용 승온속도 변화에 따라 제조된 Fe-20Cu-1C 소결체 제조 및 특성평가 (Fabrication and Mechanical Property of Fe-20Cu-1C Compacts by SPS process with Different Heating Rate)

  • 유정한;신수식;유병록;김경식;장준호;오익현;김갑태;박현국
    • 한국분말재료학회지
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    • 제24권4호
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    • pp.302-307
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    • 2017
  • In this study, Fe-Cu-C alloy is sintered by spark plasma sintering (SPS). The sintering conditions are 60 MPa pressure with heating rates of 30, 60 and $9^{\circ}C/min$ to determine the influence of heating rate on the mechanical and microstructure properties of the sintered alloys. The microstructure and mechanical properties of the sintered Fe-Cu-C alloy is investigated by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). The temperature of shrinkage displacement is changed at $450^{\circ}C$ with heating rates 30, 60, and $90^{\circ}C/min$. The temperature of the shrinkage displacement is finished at $650^{\circ}C$ when heating rate $30^{\circ}C/min$, at $700^{\circ}C$ when heating rate $60^{\circ}C/min$ and at $800^{\circ}C$ when heating rate $90^{\circ}C/min$. For the sintered alloy at heating rates of 30, 60, and $90^{\circ}C/min$, the apparent porosity is calculated to be 3.7%, 5.2%, and 7.7%, respectively. The hardness of the sintered alloys is investigated using Rockwell hardness measurements. The objective of this study is to investigate the densification behavior, porosity, and mechanical properties of the sintered Fe-Cu-C alloys depending on the heating rate.