• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.136-136
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• 1999

박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.7
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• pp.40-50
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• 1999

Recently, a laser displacement sensor is widely used for the manufacturing automation. The sensor is generally composed of a diode laser and a light receiving device. The diode laser emits a laser beam and the receiving device detects the light reflected from the measured object. The object position is obtained based upon triangulation method. As a light receiving device, a PSD is usually utilized since its structure is very simple and rugged and has a high accuracy. Although the theoretical relationship for this sensor had been developed, the characteristics of the sensor have not been much experimentally studied. In this paper, several experimental results will presented. The measurement accuracy is affected by the surface conditions such as the reflectance characteristics, the angle of the object's surface and the laser intensity. In addition, it is found that the PSD and the signal processing circuit have nonlinearities and showed that those nonlinearities can be reduced by controlling the emitting laser intensity.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.1
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• pp.108-113
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• 2014

This paper presents the influence on the transmission characteristics of swelling in rectangular waveguides for Q-band. We derived the Green's functions of the waveguide with eigenfunction expansion method. The reflection coefficient of the waveguide with a swelling is calculated by using internal impedance in order to investigate the influence of swelling in the waveguide. In order to check the validity of the theoretical analysis, the calculated reflection coefficients are compared with the measured results.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.7
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• pp.722-729
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• 2013

This paper presents the influence on the transmission characteristics of dimensional tolerances of rectangular waveguides usually used as a low-loss transmission line in the millimeter-wave band. We derived the Green's functions of the waveguide with eigenfunction expansion method. The reflection coefficient of the waveguide with a post is calculated by using internal impedance in order to investigate the influence of dimensional tolerances of the waveguide. In order to check the validity of the theoretical analysis, the calculated reflection coefficients are compared with the measured results.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.5
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• pp.10-17
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• 1989

A new design method of lossy matching network for the microwave broadband ampilfier is presented by using seattering parameters instead od modeling of transistor. A lossy matching network is represented as the combination of 2 lossless networks between which lossy serial or parallel immittance is inserted without using specific topology, and so many useful matching cireuits can be realized. Also it is shown that linear transforming relation exists between gain and reflection coefficient of the amplifier, and the transforming equation is derived using scattering parameters. With this equation some constant gain circles can be drawn on reflection coefficient plane to get adequate reflection coefficient and gain. And since the relations between amplifier gain/reflection coefficient and the immittance of passive element are bilinear transformations. constant gain or reflection coefficients circles. Illustrative examples are presented to show the usefulness of proposed method.

• Journal of the Korean Chemical Society
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• v.36 no.3
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• pp.442-445
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• 1992

Optical type hydrometer has been designed and constructed utilizing the fact that the refractive index of solution is varied in accordance with its specific gravity. Optical hydrometer produces the electric singal output with reflection of light in accordance with its specific gravity. This can be applied to continuous monitoring and/or automatic control of the specific gravity of solution. U-shaped glass rod was used a transfer medium of light, and the electronic circuit which utilize phase sensitive detection technique was designed to measure accurately the intensity of light. The specific gravity of sulfuric acid was measured with this hydrometer and the results show good linearity of output signal with its specific gravity.

• The Journal of the Korea institute of electronic communication sciences
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• v.16 no.5
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• pp.991-1000
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• 2021

Among non-invasive blood glucose detection technologies, the optical technique is a method that uses light reflection, absorption, and scattering characteristics when passing through a biological medium. It reduces pain or discomfort in measurement and has no risk of infection. So it is becoming a major flow of blood glucose detection research. Among them, near-infrared spectroscopy has a disadvantage in that the complexity increases when analyzing signals detected due to interferences between proteins and acids that share a similar absorption function with blood glucose molecules. In this study, a non-invasive sensor system with multiple near-infrared bands was designed and manufactured to alleviate the deterioration of blood glucose detection function that may occur due to skin absorption of near-infrared rays. A blood survey was conducted to verify the system, and the degree of blood glucose response in the blood was collected as spectral data, and the results of this study were quantitatively verified in terms of correlation between the data and blood glucose.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.9 no.2
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• pp.41-50
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• 2010

In this paper, a multi-band antenna with novel structure for mobile communications is designed and fabricated. The proposed antenna has the Multi-band antenna characteristics by two common-grounded slots with different size and angle. In order to reduce size and to enhance the gain of the antenna, a reflector is consisted of chokes on the three sides. It is optimized by using the CST Microwave Studio commercial software based on the FIA(Finite Integration Algorithm) and PBA(Perfect Boundary Approximation), and then the fabricating and measuring is practiced. As a result of measurement, the reflection coefficient is less than -11 dB(VSWR < 1.8) and the gain of antenna is more than 6dBi at 824~894MHz and 1885-2500MHz.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.3
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• pp.566-574
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• 1988

A study is described for obtaining real time in situ size and velocity measurements of the spray-droplet using crossed-beam interferometry. The optical arrangement is similar to dual-beam laser Doppler velocimetry(LDV). Droplets passing trough the probe volume scatter light to the collecting lens placed at 90.deg. off-axis angle. The dual-beam light scatter is analyzed by the geometric optics theory to relate the scattered fringe pattern to droplet diameter. The droplet size measurement is based upon the signal visibility. As the system is based on the Doppler effect, a single component of velocity is velocity is extracted concurrent with the size information. The validity of the method is evaluated by comparing its performance to widely accepted but limited technique, the collection method. By using 90.deg. off-axis scatter detection angle, the measurement of the droplet size and velocity distributions, and the local correlations between droplet sizes and velocities in relatively dense spray environments are made possible.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.128-128
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• 2000

박막의 탄성 특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 이러한 방법들은 필름의 두께가 일정 두께 이상이 되어야 정확한 측정이 가능한 방법으로 매우 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang, bridge 방법이 제시되었으며, 이 방법은 간단한 식각 공정을 통해 매우 얇은 박막에도 적용시킬 수 있다는 장점을 가지고 있다. 본 연구에서는 아주 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang 방법을 이용하여 순수한 Diamond-like carbon (DLC) 필름과 Sidl 첨가된 DLC 필름의 탄성 특성을 평가하고자 한다. 실험에서 사용한 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400 Vb로 합성압력은 10mTorr로 고정하였다. 사용한 반응 가스는 벤젠(C6H6), 그리고 벤젠과 희석된 실렌(SiH4 : H2 = 10 : 90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 일정량의 Si을 함유시켰다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 변화시켰으며, KOH(5.6mol) 용액을 이용하여 습식 식각을 함으로써 freehang을 제작하였다. 이때 식각액에 의한 DLC 필름의 손상은 관찰되지 않았다. 필름의 잔류 응력을 측정하기 위해 200$\pm$10 혹은 100$\pm$5$\mu\textrm{m}$ 두께의 얇은 (100) Si wafer를 5$\times$50 mm2의 strip 형태로 절단하여 사용하였다. 필름의 압축 잔류 응력에 의해 발생한 필름/기판 복합체의 곡률은 laser 반사법과 $\alpha$-step profiler를 이용하여 측정하였으며, 이 결과를 Brenner 등에 유도된 식을 이용하여 잔류 응력을 계산하였다. 또한 제작된 frddhang은 광학 현미경과 전자주사현미경에 의해 관찰되었다. 이렇게 제작된 freehang을 이용하여 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류 응력을 박막의 응력-변형률 관계식에 적용하여 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. 측정 결과 필름의 잔류 응력과 biaxial elastic modulus는 필름의 두께가 감소함에 따라 감소하는 경향을 나타냈으며, 같은 두께의 필름인 경우, 식각 깊이에 따른 biaxial elastic modulus 의 변화를 통해 최적의 식각 깊이를 알 수 있었다.