• 한국정밀공학회지
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• 제22권6호
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• pp.30-39
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• 2005

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.276-279
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• 2005

This paper presents a novel cylindrical capacitive sensor (CCS) for both radial and axial motion measurements. Although the new CCS has almost the same geometric configuration as the conventional CCS, the unused axial area of the CCS is utilized to measure the axial motion of the rotor, which can affords more compact design and reduction of the system complexity. First, a theoretical model of the proposed CCS is derived. Based on the derived theoretical model, compensation methods to decouple the radial and axial motion measurements are proposed. In addition, error analysis is performed and a design rule is proposed to guarantee the same accuracy in measuring both radial and axial motions. Finally, a test rig and electronics for the proposed CCS are built and the effectiveness of the proposed CCS is verified with experiments and simulations.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1005-1008
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• 1995

The spindle is a very important part of machine tool. The evaluation of spindle motion is required for improving the performance of machine tools. The evaluation tools have been developed for precison spindle by the reversal technique, and 3D error map motion of spindle is proposed. This technique makes us understand the total movement of spindle more easily. The proposed technique has been successfully applied to practical machine tools, giving high potentials for the spindle performance measurement.