• Title/Summary/Keyword: 박막 패터닝 공법

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A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet (미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구)

  • Suh, Young-Ho;Son, Gi-Hun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.1
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    • pp.28-38
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    • 2009
  • Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.

Numerical Study on a Thin Film Patterning Process Using Microdroplet Ejection (미세액적의 분사를 이용한 박막 패터닝 공정에 대한 수치적 연구)

  • Suh, Young-Ho;Son, Gi-Hun
    • 한국전산유체공학회:학술대회논문집
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    • 2008.03b
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    • pp.658-659
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    • 2008
  • Numerical simulation is performed for a microdroplet deposition on the pre-patterned micro-structure. The liquid-air interface is tracked by level set method improved by incorporating the ghost fluid approach based on a sharp-interface representation. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to overcome the patterning error.

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