• Title/Summary/Keyword: 미소스위치

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Suppression of Microwelding on RF MEMS Direct Contact Switches (직접접촉식 RF MEMS 스위치에서의 미소용접 현상 억제)

  • Lee, Tae-Won;Kim, Seong-Jun;Park, Sang-Hyun;Lee, Ho-Young;Kim, Yong-Hyup
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.4
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    • pp.41-46
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    • 2005
  • In this paper, a new method for suppressing microwelding on the RF MEMS (Radio Frequency Microelectromechanical System) direct contact switches is introduced. Two kinds of refractory metals, tungsten and molybdenum were coated onto the contact point of the switches and the effect of the coating was examined. The changes in insertion loss and isolation at the switch were measured by using network analyzer and power loss was evaluated by power measurement. The results revealed that while tungsten and molybdenum showed higher contact resistance than gold in low input power range, they enhanced the power handling capability and reliability of the switches in high input power region.

Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon (스냅스루 좌굴을 이용한 미소스위치의 설계, 제작 및 실험)

  • Go, Jeung-Sang;Cho, Young-Ho;Kwak, Byung-Man;Park, Kwan-Hum
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.2
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    • pp.481-487
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    • 1996
  • A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/$P^+$silicon bimorphs have been fabricated. Geometric size and mechanical behavior of each material film have been measured from on-chip test structures. Estimated and measured characteristics of the fabricated devices are compared.

MEMS를 이용한 Optical Switch

  • Korea Optical Industry Association
    • The Optical Journal
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    • s.97
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    • pp.67-72
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    • 2005
  • 광통신 기술의 발전으로 광 스위치 분야의 개발이 활발히 진행되고 있으며 이중에서도 MEMS를 이용한 광 스위치가 주류를 이루어 개발되고 있다. 특히 최근에는 OXC(Optical Cross Connect)에 사용되는 MEMS actuator로 구동되는 미소거울이 스위치내부에 사용되는 유일한 대안으로 떠오르면서 많은 기업들이 특허를 출원하고 있다. 현재 미국이 압도적인 기술우위를 보이고 뒤이어 일본이 현재 많은 개발을 서두르고 있음을 볼 수 있다. 한국은 미래의 주역이 될 것으로 보이는 MEMS 기술개발에 많은 투자를 해야 할 것이며 더불어 이를 이용한 응용 분야에 대한 상호 복합적 연구 또한 진행해야 세계 기술시장에 당당히 설 수 있을 것으로 보인다.

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Analysis of Oscillation Modes in Discrete Power Systems Including GTO Controlled STATCOM by the RCF Method (GTO 제어 STATCOM을 포함하는 이산 전력시스템의 RCF 해석법에 의한 진동모드 해석)

  • Kim, Deok-Young
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.5
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    • pp.829-833
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    • 2007
  • In this paper, the RCF method is applied to analyze small signal stability of power systems including GTO controlled parallel FACTS equipments such as STATCOM. To apply the RCF method in power system small signal stability problems, state transition equations of generator, controllers and STATCOM are presented. In eigenvalue analysis of power systems, STATCOM is modelled as the equivalents voltage source model and the PWM switching circuit model. As a result of simulation, the RCF method is very powerful to calculate the oscillation modes exactly after the switching operations, and useful to analyze the small signal stability of power systems with periodically operated switching devices such as STATCOM.

Spot marking of the multilayer thin films by Nd:YAG laser (Nd:YAG 레이저에 의한 다층 박막의 미소 점 마킹)

  • Kim, Hyun-Jin;Shin, Yong-Jin
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.361-368
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    • 2004
  • We separated the multilayer structure of CD-R(compact disk-recordable) and investigated optimal spot marking conditions and physical and chemical transitions in response to various laser beam energh levels. Spot marking(80 ${\mu}{\textrm}{m}$ spot size) was produced on the surface of each layer using a Q-switched Nd:YAG laser between 27 mJ and 373mJ. By investigating resulting pit formation with Optical Microscopy(OM) and Optical Coherence Tomography(OCT), we analyzed the formation process of spot marking in the multilayer structure of different chemical composition. The localized heating of the substrate in the multilayer thin film caused the short temporal thermal expansion, and absorbed optical energy between reflective and dye interfaces melted dye and increased the volume. During the cooling phase, formation of pit and surrounding rim can be explained by three distinct processes; effect of surface tension, evaporation by spontaneous temperature increase due to laser energy, and mass flow from the recoil pressure. Our results shows that the spot marking formation process in the multilayer thin film is closely related to the layers' physical, chemical, and optical properties, such as surface tension, melt viscosity, layer thickness, and chemical composition.

Thermomechanical Effect on the Water Wet Dental Hard Tissue by the Q-switched Er : YAG Laser

  • Y. H. Kwon;Ky0-han Kim
    • Journal of Biomedical Engineering Research
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    • v.20 no.2
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    • pp.231-236
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    • 1999
  • Understanding the exgenous water induced thermomechanical effect on the dental hard tissue by the Q-switched Er:YAG laser (1-$mutextrm{s}$-long pulse width) has an important impact on the further understanding of the free-running Er:YAG laser (250-$mutextrm{s}$-long pulse width) ablation on the dental gard tissue because one macroscopic effect in the free-running laser is an accumulation of microscopic effects we investigated in this study. The Q-switched Er:YAG laser with exogenous water on the tooth enhanced ablation rate compared to the case of no water on the tooth. The frequency of exogenous-water jet on the tooth has affected the ablation rate in such a way that as we dispensed water drops less frequently we could get more enhanced ablation rate. The amplitude of the recoil pressure depends on the tooth surface conditions such that as surfaces wet, and as the volume of the exogenous water drop increased, the amplitude of the recoil pressure increased also. From this study we realized that the 1 $mutextrm{s}$ long pulsed induced thermomechanical effect provides us useful information for the understanding of the free-running Er:YAG laser induced ablation with exogenous water.

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